JPH0576776B2 - - Google Patents

Info

Publication number
JPH0576776B2
JPH0576776B2 JP59027619A JP2761984A JPH0576776B2 JP H0576776 B2 JPH0576776 B2 JP H0576776B2 JP 59027619 A JP59027619 A JP 59027619A JP 2761984 A JP2761984 A JP 2761984A JP H0576776 B2 JPH0576776 B2 JP H0576776B2
Authority
JP
Japan
Prior art keywords
inverters
integrated circuit
manufacturing process
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP59027619A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60170955A (ja
Inventor
Masashi Yasuki
Minoru Shioda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP59027619A priority Critical patent/JPS60170955A/ja
Publication of JPS60170955A publication Critical patent/JPS60170955A/ja
Publication of JPH0576776B2 publication Critical patent/JPH0576776B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0165—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including complementary IGFETs, e.g. CMOS devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
JP59027619A 1984-02-15 1984-02-15 製造工程管理用半導体装置 Granted JPS60170955A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59027619A JPS60170955A (ja) 1984-02-15 1984-02-15 製造工程管理用半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59027619A JPS60170955A (ja) 1984-02-15 1984-02-15 製造工程管理用半導体装置

Publications (2)

Publication Number Publication Date
JPS60170955A JPS60170955A (ja) 1985-09-04
JPH0576776B2 true JPH0576776B2 (enExample) 1993-10-25

Family

ID=12225958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59027619A Granted JPS60170955A (ja) 1984-02-15 1984-02-15 製造工程管理用半導体装置

Country Status (1)

Country Link
JP (1) JPS60170955A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2407794A1 (en) 2009-03-11 2012-01-18 Sharp Kabushiki Kaisha Electronic circuit and electronic device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4832490A (enExample) * 1971-09-01 1973-04-28
JPS57133644A (en) * 1981-02-12 1982-08-18 Fujitsu Ltd Semiconductor integrated circuit device

Also Published As

Publication number Publication date
JPS60170955A (ja) 1985-09-04

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees