JPH0575055B2 - - Google Patents

Info

Publication number
JPH0575055B2
JPH0575055B2 JP60065357A JP6535785A JPH0575055B2 JP H0575055 B2 JPH0575055 B2 JP H0575055B2 JP 60065357 A JP60065357 A JP 60065357A JP 6535785 A JP6535785 A JP 6535785A JP H0575055 B2 JPH0575055 B2 JP H0575055B2
Authority
JP
Japan
Prior art keywords
resistor
semiconductor
resistors
force
moment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60065357A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61223626A (ja
Inventor
Hiroshi Tanigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP60065357A priority Critical patent/JPS61223626A/ja
Publication of JPS61223626A publication Critical patent/JPS61223626A/ja
Publication of JPH0575055B2 publication Critical patent/JPH0575055B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/162—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of piezoresistors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/1627—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of strain gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Manipulator (AREA)
JP60065357A 1985-03-29 1985-03-29 センサ Granted JPS61223626A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60065357A JPS61223626A (ja) 1985-03-29 1985-03-29 センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60065357A JPS61223626A (ja) 1985-03-29 1985-03-29 センサ

Publications (2)

Publication Number Publication Date
JPS61223626A JPS61223626A (ja) 1986-10-04
JPH0575055B2 true JPH0575055B2 (enrdf_load_stackoverflow) 1993-10-19

Family

ID=13284622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60065357A Granted JPS61223626A (ja) 1985-03-29 1985-03-29 センサ

Country Status (1)

Country Link
JP (1) JPS61223626A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008096230A (ja) * 2006-10-11 2008-04-24 Nitta Ind Corp 歪みゲージ式センサ

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07117470B2 (ja) * 1986-07-15 1995-12-18 株式会社リコー 力検出装置
JPH0821721B2 (ja) * 1986-10-09 1996-03-04 株式会社リコー 力検出装置
WO1988008521A1 (en) * 1987-04-24 1988-11-03 Kabushiki Kaisha Nexy Kenkyusho Force and moment detector using resistor
JPH0617834B2 (ja) * 1987-04-24 1994-03-09 株式会社エンプラス研究所 力検出装置
JPS63266329A (ja) * 1987-04-24 1988-11-02 Nekushii Kenkyusho:Kk 力検出装置
JPH0652269B2 (ja) * 1987-04-24 1994-07-06 株式会社エンプラス研究所 加速度検出装置
US4967605A (en) * 1987-04-24 1990-11-06 Wacoh Corporation Detector for force and acceleration using resistance element
JPH0197827A (ja) * 1987-07-08 1989-04-17 Ricoh Co Ltd 半導体拡散型力覚センサ
JP2746298B2 (ja) * 1987-09-03 1998-05-06 株式会社リコー 二成分以上の力検出装置
JP2607096B2 (ja) * 1987-09-18 1997-05-07 株式会社エンプラス研究所 力・モーメント検出装置
JP2596759B2 (ja) * 1987-09-18 1997-04-02 株式会社エンプラス研究所 力検出装置
US5092645A (en) * 1987-09-18 1992-03-03 Wacoh Corporation Robotic gripper having strain sensors formed on a semiconductor substrate
JPH05180714A (ja) * 1992-01-07 1993-07-23 Bando Chem Ind Ltd 張力測定用プーリ装置
EP1327870B1 (en) * 2002-01-11 2013-05-08 Honda Giken Kogyo Kabushiki Kaisha Six-axis force sensor
JP2005106679A (ja) * 2003-09-30 2005-04-21 Nitta Ind Corp 多軸センサユニットおよびこれを利用した多軸センサ
JP4997801B2 (ja) * 2006-03-20 2012-08-08 日産自動車株式会社 サスペンション車体間入力荷重測定装置
JP5243704B2 (ja) * 2006-08-24 2013-07-24 本田技研工業株式会社 力覚センサ
JP6776152B2 (ja) * 2017-02-24 2020-10-28 日本電産コパル電子株式会社 起歪体およびその起歪体を備えた力覚センサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008096230A (ja) * 2006-10-11 2008-04-24 Nitta Ind Corp 歪みゲージ式センサ

Also Published As

Publication number Publication date
JPS61223626A (ja) 1986-10-04

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term