WO2022257947A1 - 力矩传感器 - Google Patents

力矩传感器 Download PDF

Info

Publication number
WO2022257947A1
WO2022257947A1 PCT/CN2022/097523 CN2022097523W WO2022257947A1 WO 2022257947 A1 WO2022257947 A1 WO 2022257947A1 CN 2022097523 W CN2022097523 W CN 2022097523W WO 2022257947 A1 WO2022257947 A1 WO 2022257947A1
Authority
WO
WIPO (PCT)
Prior art keywords
strain
torque sensor
inner ring
sensor according
beams
Prior art date
Application number
PCT/CN2022/097523
Other languages
English (en)
French (fr)
Inventor
张晟毓
陈兆芃
谢木斯丁奥布力
黎田
Original Assignee
北京思灵机器人科技有限责任公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 北京思灵机器人科技有限责任公司 filed Critical 北京思灵机器人科技有限责任公司
Publication of WO2022257947A1 publication Critical patent/WO2022257947A1/zh

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/16—Rotary-absorption dynamometers, e.g. of brake type
    • G01L3/22—Rotary-absorption dynamometers, e.g. of brake type electrically or magnetically actuated

Definitions

  • the present application relates to the technical field of detection devices, in particular to a torque sensor.
  • Torque sensors also known as torque sensors, are used to measure one-dimensional torque physical quantities.
  • Resistance strain sensor is the most widely used torque sensor at home and abroad. It adopts the traditional method of pasting strain gauges on the surface of elastic beams. When physical quantities such as torque act on the elastic beams, it will cause changes in the stress and strain of the components, which in turn will cause changes in the resistance of the strain gauges. The changes in resistance will be processed by the circuit. Signal output, this kind of sensor is widely used in the measurement of torque.
  • the purpose of this application is to provide a torque sensor to alleviate the technical problem that the existing torque sensor has poor detection accuracy due to the structure of the elastic beam and cannot meet the use requirements of high-precision detection.
  • the torque sensor provided by the application includes an elastic body and a strain detection component
  • the elastic body includes an outer ring, an inner ring, a strain beam and a load beam; the inner ring and the outer ring are ring-shaped and arranged coaxially, the outer ring is configured to be connected to the base, and the inner the ring is configured to connect with the driver of the input torque;
  • the strain beam and the load beam are respectively connected to the inner ring and the outer ring, the strain detection component is arranged on the strain beam, and the cross-sectional area of the strain beam is smaller than the cross-sectional area of the load beam. cross-sectional area.
  • grooves are provided at the bottom of the strain beam, and the thickness of the strain beam is smaller than the thickness of the load beam;
  • the strain beam is a hollow structure
  • the load beam is a solid structure
  • the strain detection component includes a sensitive resistor, and the sensitive resistor is arranged on the top surface of the strain beam.
  • the strain detection component also includes a circuit board and a connecting column;
  • the circuit board is arranged above the elastic body, the circuit board is connected to the elastic body through the connecting column, and there is a gap between the circuit board and the elastic body.
  • the sensitive resistor is disposed on the strain beam through a sputtering coating process.
  • the strain detection component includes a resistance strain gauge, and the resistance strain gauge is pasted on the strain beam.
  • the number of the strain beams and the load beams are multiple, and they are arranged alternately in sequence.
  • the adjacent strain beams and the load-bearing beams are connected by arc-shaped transitions near the joints of the inner ring, and the joints of the strain beams and the inner ring are provided with unloading groove.
  • the number of the strain beams is four, and they are evenly distributed along the circumference of the inner ring;
  • the number of the load beams is four, uniformly distributed along the circumference of the inner ring, and each of the strain beams is located between two adjacent load beams.
  • two strain grid sensitive resistors are arranged on each strain beam, and the included angle between the extending direction of the grid and the extending direction of the strain beam is 45°.
  • the torque sensor provided by the application includes an elastic body and a strain detection component;
  • the elastic body includes an outer ring, an inner ring, a strain beam and a load beam;
  • the inner ring and the outer ring are ring-shaped and arranged coaxially , the outer ring is configured to be connected to the base, and the inner ring is configured to be connected to a driver for input torque;
  • the strain beam and the load beam are respectively connected to the inner ring and the outer ring, and the strain
  • the detection component is arranged on the strain beam, and the cross-sectional area of the strain beam is smaller than that of the bearing beam.
  • the outer ring of the elastic body is fixed on the base, and after the inner ring is loaded by the driving part and receives torque, the load beam and the strain beam will be strained.
  • the cross-sectional area of the beam is smaller than the cross-sectional area of the load-bearing beam. Therefore, the deformation of the strain beam is larger than that of the load-bearing beam. Therefore, when the torque is detected by the strain detection component arranged on the strain beam, the deformation error can be avoided.
  • the loss of detection accuracy improve the detection accuracy of the torque sensor, and meet the high-precision detection requirements.
  • Fig. 1 is the structural diagram of the torque sensor that the embodiment of the present application provides;
  • Fig. 2 is a top view of the elastic body of the torque sensor provided by the embodiment of the present application.
  • Fig. 3 is an axial sectional view of the elastic body of the torque sensor provided by the embodiment of the present application.
  • Fig. 4 is a layout structure diagram of the sensitive resistor of the torque sensor provided by the embodiment of the present application.
  • FIG. 5 is a schematic diagram of a sensitive resistor of a torque sensor provided by an embodiment of the present application.
  • Icons 1-elastic body; 2-circuit board; 21-connecting column; 3-sensitive resistor; 4-outer ring; 5-inner ring; 51-installation hole; 6-strain beam; 61-sensitive surface; 62-concave Groove; 63-unloading groove; 7-loading beam; 8-arc structure.
  • the torque sensor provided in this embodiment includes an elastic body 1 and a strain detection assembly, and the elastic body 1 includes an outer ring 4, an inner ring 5, a strain beam 6 and a load beam 7; the inner ring 5 and The outer rings 4 are ring-shaped and arranged coaxially, the outer rings 4 are configured to be connected to the base, and the inner rings 5 are configured to be connected to a driving member for input torque.
  • the strain beam 6 and the load beam 7 are respectively connected to the inner ring 5 and the outer ring 4 , the strain detection component is arranged on the strain beam 6 , and the cross-sectional area of the strain beam 6 is smaller than that of the load beam 7 .
  • the outer ring 4 of the elastic body 1 is fixed on the base, and after the inner ring 5 is loaded by the driving part and receives torque, the load beam 7 and The strain beam 6 produces strain, because the cross-sectional area of the strain beam 6 is smaller than the cross-sectional area of the load beam 7, therefore, the deformation of the strain beam 6 is larger than that of the load beam 7. Therefore, by the strain provided on the strain beam 6
  • the detection component detects the torque, it can avoid the loss of detection accuracy caused by the deformation error, improve the detection accuracy of the torque sensor, and meet the high-precision detection requirements.
  • the inner ring 5 of the elastic body 1 is an annular structure
  • the outer ring 4 of the elastic body 1 is also an annular structure, wherein the outer ring 4 and the inner ring 5 are arranged coaxially, and the outer ring 4 Set in the circumferential direction of the inner ring 5 .
  • One end of the strain beam 6 is fixedly connected to the outer wall of the inner ring 5 of the elastic body 1, and the other end is fixedly connected to the inner wall of the outer ring 4;
  • one end of the load beam 7 is fixedly connected to the outer wall of the inner ring 5 of the elastic body 1, The other end is fixedly connected with the inner wall of the outer ring 4 .
  • the above-mentioned outer ring 4 , inner ring 5 , strain beam 6 and load beam 7 can be integrally formed.
  • the torque sensor provided in this embodiment is used to force control the joints of the manipulator, and is set on the low-speed side. Through the measurement of the output torque of the joints and the Jacobian transformation, the measurement of the six-dimensional force at the end is realized, so that the whole machine of the manipulator shows an ideal impedance or flexible.
  • a groove 62 may be provided at the bottom of the strain beam 6 to reduce the force of the strain beam 6 in the axial direction of the elastic body 1. Thickness, so that the thickness of the strain beam 6 is less than the thickness of the load beam 7, when the driving member rotates, the inner ring 5 of the elastic body 1 drives the strain beam 6 and the load beam connected to the outer ring 4 of the elastic body 1 after being torqued 7 generates a certain strain, which causes the sensitive resistor 3 to change to detect the torque.
  • the strain beam 6 in order to realize that the cross-sectional area of the strain beam 6 is smaller than the cross-sectional area of the load beam 7, the strain beam 6 can also be set as a hollow structure, while the load beam 7 can be set as a solid structure.
  • the load-bearing beam 7 is a solid structure for sharing most of the torque, ensuring that the stress on the strain beam 6 is within an appropriate range, and the strain beam 6 is a hollow structure, which ensures that the upper top surface of the strain beam 6 can generate sufficient and suitable strain for easy detection .
  • the strain detection component includes a sensitive resistor 3 , and the sensitive resistor 3 is arranged on the top surface of the strain beam 6 .
  • the sputtering coating process has extremely high requirements on the elastic body 1.
  • the sensing surface 61 must be located on the top layer to facilitate polishing and grinding and placement of photolithographic wafers.
  • the strain beam 6 minimizes the influence of parasitic loads in other directions during assembly and work.
  • the top surfaces of the strain beam 6 and the load beam 7 are in the same horizontal plane as the top surface of the elastic body 1, that is, the top surface of the strain beam 6 forms the sensitive surface 61 of the elastic body 1, and is in an elastic
  • the topmost layer of the body 1 the advantage of this arrangement is that it can ensure the steady implementation of the process of making the sensitive resistor 3 by sputtering thin films.
  • the elastic body 1 of the torque sensor provided in this embodiment arranges the sensitive surface 61 on the top layer, which is convenient for sensitive surface 61 Grinding and polishing also ensures the uniformity of the adhesive on this surface, thereby making the positioning and fixing of the lithography wafer more reliable.
  • the strain detection assembly further includes a circuit board 2 and a connecting column 21 .
  • the circuit board 2 is arranged above the elastic body 1 , and the circuit board 2 is connected to the elastic body 1 through the connecting column 21 , and there is a gap between the circuit board 2 and the elastic body 1 .
  • the circuit board 2 is located above the elastic body 1, and there is a gap between the top surface of the elastic body 1, that is, the circuit board 2 has a certain distance from the sensitive resistor 3 in the height direction, so as to ensure that the sensitive resistor 3 is not blocked by the circuit board. 2 scratches.
  • a mounting hole 51 may be provided on the inner ring 5 of the elastic body 1 , the circuit board 2 is fixedly connected to the upper end of the connecting post 21 , and the lower end of the connecting post 21 is fixedly connected in the mounting hole 51 .
  • a spacer can also be provided between the circuit board 2 and the elastic body 1, so that a gap is formed between the circuit board 2 and the top surface of the strain beam 6 of the elastic body 1, so as to avoid scratching the surface of the strain beam 6.
  • connection post 21 is a copper post.
  • the strain detection component may include a resistance strain gauge, and the resistance strain gauge is pasted on the strain beam 6 .
  • the sensitive resistor 3 is disposed on the strain beam 6 through a sputtering coating process.
  • the resistance strain gauge made by sputtering coating has the advantages of high precision, good consistency, small creep and wide temperature range. It is widely used in aviation, aerospace, military industry, electric power, metallurgy, medicine, The Internet of Things and other fields are gradually being used.
  • the elastic body 1 is made into a flat flange shape according to the lightweight design requirements of the mechanical arm joint; the round hole in the inner ring 5 in the center is convenient for wiring; the sensitive resistor 3 includes an insulating layer, a sensitive layer, a lead layer, and a protective layer etc.
  • circuit board 2 is responsible for tasks such as bridge formation, amplification, AD conversion, and communication, ensuring that the sensor directly outputs digital signals to facilitate the use of the robotic arm.
  • the number of strain beams 6 is four, and they are evenly distributed along the circumference of the inner ring 5; the number of load beams 7 is four, evenly distributed along the circumference of the inner ring 5, and each strain beam 6 is located between two Between adjacent load beams 7 .
  • adjacent strain beams 6 and load beams 7 are transitionally connected by an arc structure 8 near the junction of the inner ring 5 , and an unloading groove 63 is provided at the junction of the strain beam 6 and the inner ring 5 .
  • the elastic body 1 is loaded
  • the transition between the beam 7 and the strain beam 6 is a relatively large arc-shaped structure 8, and the transition fillet is relatively large, which causes a change in the stiffness of the equal load beam 7 and the strain beam 6 along the width direction, and seriously reduces the sensitivity of the sensitive surface 61. Therefore, an unloading groove 63 is provided at the root where the strain beam 6 and the inner ring 5 meet, and the unloading groove 63 can compensate the strain unevenness of the sensitive surface 61 caused by the transition structure.
  • the unloading groove 63 is a through hole, so the strain beam 6 is connected to the inner ring 5 by thin beams that are symmetrical on both sides of the unloading groove 63, which is for the torque actually received by the sensor except for the torque around the normal central axis.
  • the force in other directions has a certain unloading effect, which reduces the loss of accuracy caused by installation errors and deformation of harmonic flexsplines.
  • This embodiment provides a torque sensor based on the sputter coating process for the joints of the manipulator.
  • the resistance strain gauge is directly generated on the sensitive surface 61 of the strain beam 6 through sputter coating, photolithography and other processes, replacing the traditional
  • the resistance strain gauge pasting process has the advantages of good consistency, high precision, and strong overload resistance. It is suitable for large-scale, standardized, and automated production, and provides core hardware support for the force control performance of the robotic arm.
  • two strain grid sensitive resistors 3 are arranged on each strain beam 6 , and the included angle between the extending direction of the grid and the extending direction of the strain beam 6 is 45°.
  • the process of making the sensitive resistor 3 by the sputtering coating process is mainly as follows: firstly, the entire upper surface of the sensitive surface 61 of the strain beam 6 of the elastic body 1 is polished, and ground to a suitable flatness and roughness, and then the sputtering machine is used to Sputter the SiO2 insulating layer and the material of the sensitive resistor 3 evenly on the entire surface in sequence; then use glue to fix the photolithography plate for development and modeling, and etch out the shearing strain grid sensitive resistors R1 ⁇ R8, the strain grid sensitive resistors
  • the central axis coincides with the central axis in the width direction of the strain beam 6, and the grid and the central axis in the width direction of the strain beam 6 are at 45°, which can detect the shear strain of the sensitive surface 61 to the greatest extent; finally weld the leads, package, Group bridge, test.
  • the torque sensor provided in this embodiment includes a total of 8 sensitive resistors 3, and the composition of two full bridges is as follows: R1-R4 and R5-R8 on the opposite side form bridges respectively, and the above two bridges Sharing an input voltage Ui, the output voltage U01 and U02 are subtracted to filter out common mode noise of the power supply while improving the sensitivity of the sensor by two times.
  • the torque sensor provided by the present application includes an elastic body 1 and a strain detection component;
  • the elastic body 1 includes an outer ring 4, an inner ring 5, a strain beam 6 and a load beam 7;
  • the inner ring 5 and the outer ring 4 are
  • the ring structure is arranged coaxially.
  • the outer ring 4 is configured to be connected to the base, and the inner ring 5 is configured to be connected to the driving part of the input torque;
  • the strain beam 6 and the load beam 7 are respectively connected to the inner ring 5 and the outer ring 4, and the strain detection
  • the assembly is arranged on the strain beam 6 , and the cross-sectional area of the strain beam 6 is smaller than the cross-sectional area of the load beam 7 .
  • the outer ring 4 of the elastic body 1 is fixed on the base, and after the inner ring 5 receives torque through the loading of the driving part, the load beam 7 and the strain beam 6 are strained, and the strain beam 6
  • the cross-sectional area of the strain beam 7 is smaller than the cross-sectional area of the load beam 7, therefore, the deformation of the strain beam 6 is larger than that of the load beam 7. Therefore, when the detection of the moment is realized by the strain detection assembly arranged on the strain beam 6, it can avoid The loss of detection accuracy caused by deformation errors improves the detection accuracy of the torque sensor and meets the requirements of high-precision detection.
  • the deformation of the strain beam is larger than that of the load beam. Therefore, when the torque is detected by the strain detection component arranged on the strain beam, the loss of detection accuracy caused by the deformation error can be avoided. Improve the detection accuracy of the torque sensor to meet the high-precision detection requirements.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

一种力矩传感器，包括弹性体（1）和应变检测组件；弹性体（1）包括外圈（4）、内圈（5）、应变梁（6）和承载梁（7）；内圈（5）和外圈（4）均为环状结构且同轴设置，外圈（4）配置成与基座连接，内圈（5）配置成与输入扭矩的驱动件连接；应变梁（6）和承载梁（7）分别连接内圈（5）和外圈（4），应变检测组件设置在应变梁（6）上，且应变梁（6）的横截面积小于承载梁（7）的横截面积。弹性体（1）的外圈（4）固定在基座上，内圈（5）通过驱动件的加载使承载梁（7）和应变梁（6）产生应变，因应变梁（6）的横截面积小于承载梁（7）的横截面积，应变梁（6）变形相对于承载梁（7）的变形要大，因此，通过设置在应变梁（6）上的应变检测组件实现力矩的检测时，能够避免变形误差造成的检测精度损失，提高力矩传感器的检测精度，满足高精度检测要求。

Description

力矩传感器
相关申请的交叉引用
本申请要求于2021年06月10日提交中国专利局的申请号为202110650814X、名称为“力矩传感器”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请涉及检测器件技术领域，尤其是涉及一种力矩传感器。
背景技术
力矩传感器，又称扭矩传感器，其用于测量一维扭矩物理量。电阻应变式传感器是目前国内外使用最多的一种扭矩传感器。它采用在弹性梁表面贴应变片的传统方法，当扭矩等物理量作用于弹性梁时，会导致元件应力和应变的变化，进而引起电阻应变片电阻的变化，电阻的变化经电路处理后以电信号的方式输出，此种传感器广泛使用在扭矩的测量上。
但目前公知的力矩传感器的弹性梁因结构原因，导致该力矩传感器的检测精度较差，无法满足高精度检测的使用要求。
申请内容
本申请的目的在于提供一种力矩传感器，以缓解了现有力矩传感器因弹性梁的结构原因，导致该力矩传感器的检测精度较差，无法满足高精度检测的使用要求的技术问题。
本申请提供的力矩传感器，包括弹性体和应变检测组件；
所述弹性体包括外圈、内圈、应变梁和承载梁；所述内圈和所述外圈均为环状结构且同轴设置，所述外圈配置成与基座连接，所述内圈配置成与输入扭矩的驱动件连接；
所述应变梁和所述承载梁分别连接所述内圈和所述外圈，所述应变检测组件设置在所述应变梁上，且所述应变梁的横截面积小于所述承载梁的横截面积。
可选的，所述应变梁的底部设有凹槽，所述应变梁的厚度小于所述承载梁的厚度；
和/或，所述应变梁为中空结构，所述承载梁为实心结构。
可选的，所述应变检测组件包括敏感电阻，所述敏感电阻设置在所述应变梁的顶面。
可选的，所述应变检测组件还包括电路板和连接柱；
所述电路板设置在所述弹性体的上方，所述电路板通过所述连接柱与所述弹性体连接，且所述电路板与所述弹性体之间具有间隙。
可选的，所述敏感电阻通过溅射镀膜工艺设置在所述应变梁上。
可选的，所述应变检测组件包括电阻应变计，所述电阻应变计粘贴在所述应变梁上。
可选的，所述应变梁和所述承载梁的数量均为多个，且依次交错设置。
可选的，相邻的所述应变梁和所述承载梁在靠近所述内圈的相接处采用弧形结构过渡连接，所述应变梁与所述内圈的相接处设置有卸荷槽。
可选的，所述应变梁的数量为四个，且沿所述内圈的周向均布；
所述承载梁的数量为四个，沿所述内圈的周向均布，且每个所述应变梁处于两个相邻的所述承载梁之间。
可选的，每个所述应变梁上设有两个应变栅格敏感电阻，栅格的延伸方向与所述应变梁的延伸方向之间的夹角为45°。
本申请提供的力矩传感器，包括弹性体和应变检测组件；所述弹性体包括外圈、内圈、应变梁和承载梁；所述内圈和所述外圈均为环状结构且同轴设置，所述外圈配置成与基座连接，所述内圈配置成与输入扭矩的驱动件连接；所述应变梁和所述承载梁分别连接所述内圈和所述外圈，所述应变检测组件设置在所述应变梁上，且所述应变梁的横截面积小于所述承载梁的横截面积。
与现有技术相比，本申请提供的力矩传感器实际使用时，弹性体的外圈固定在基座上，内圈通过驱动件的加载受到扭矩之后，使承载梁和应变梁产生应变，因应变梁的横截面积小于承载梁的横截面积，因此，应变梁变形相对于承载梁的变形要大，因此，通过设置在应变梁上的应变检测组件实现力矩的检测时，能够避免变形误差造成的检测精度损失，提高力矩传感器的检测精度，满足高精度检测要求。
附图说明
为了更清楚地说明本申请具体实施方式或现有技术中的技术方案，下面将对具体实施方式或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图是本申请的一些实施方式，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本申请实施例提供的力矩传感器的结构图；
图2为本申请实施例提供的力矩传感器的弹性体的俯视图；
图3为本申请实施例提供的力矩传感器的弹性体的轴向剖视图；
图4为本申请实施例提供的力矩传感器的敏感电阻的布置结构图；
图5为本申请实施例提供的力矩传感器的敏感电阻的原理图。
图标：1-弹性体；2-电路板；21-连接柱；3-敏感电阻；4-外圈；5-内圈；51-安装孔； 6-应变梁；61-敏感面；62-凹槽；63-卸荷槽；7-承载梁；8-弧形结构。
具体实施方式
下面将结合实施例对本申请的技术方案进行清楚、完整地描述，显然，所描述的实施例是本申请一部分实施例，而不是全部的实施例。基于本申请中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本申请保护的范围。
如图1至图5所示，本实施例提供的力矩传感器，包括弹性体1和应变检测组件，弹性体1包括外圈4、内圈5、应变梁6和承载梁7；内圈5和外圈4均为环状结构且同轴设置，外圈4配置成与基座连接，内圈5配置成与输入扭矩的驱动件连接。
应变梁6和承载梁7分别连接内圈5和外圈4，应变检测组件设置在应变梁6上，且应变梁6的横截面积小于承载梁7的横截面积。
与现有技术相比，本申请实施例所提供的力矩传感器实际使用时，弹性体1的外圈4固定在基座上，内圈5通过驱动件的加载受到扭矩之后，使承载梁7和应变梁6产生应变，因应变梁6的横截面积小于承载梁7的横截面积，因此，应变梁6变形相对于承载梁7的变形要大，因此，通过设置在应变梁6上的应变检测组件实现力矩的检测时，能够避免变形误差造成的检测精度损失，提高力矩传感器的检测精度，满足高精度检测要求。
具体地，本实施例中，弹性体1的内圈5为环状结构，弹性体1的外圈4也为环状结构，其中，外圈4和内圈5同轴设置，且外圈4套设在内圈5的周向上。应变梁6的一端与弹性体1的内圈5的外侧壁固定连接，另一端与外圈4的内侧壁固定连接；承载梁7的一端与弹性体1的内圈5的外侧壁固定连接，另一端与外圈4的内侧壁固定连接。优选地，上述的外圈4、内圈5、应变梁6和承载梁7可以一体成型。
本实施例提供的力矩传感器用于力控机械臂关节，并设置在低速侧，通过对关节输出力矩测量、雅克比变换实现末端六维力的测量，使机械臂整机表现出理想的阻抗或柔性。
为了实现应变梁6的横截面积小于承载梁7的横截面积，本实施例中，可以在应变梁6的底部设有凹槽62，用于减少应变梁6的在弹性体1轴向上的厚度，从而使应变梁6的厚度小于承载梁7的厚度，当驱动件转动时，弹性体1的内圈5受到扭矩之后驱动与弹性体1的外圈4连接的应变梁6和承载梁7产生一定的应变，从而引起敏感电阻3发生变化实现力矩的检测。
作为另一种结构形式，为了实现应变梁6的横截面积小于承载梁7的横截面积，还可以将应变梁6设置为中空结构，而承载梁7设置为实心结构。承载梁7为实心结构用于分担大部分扭矩作用，保证应变梁6所受应力在合适范围，应变梁6为空心结构，其保证应变梁6的上顶面能够产生足够合适的应变，方便检测。
本实施例中，应变检测组件包括敏感电阻3，敏感电阻3设置在应变梁6的顶面。
溅射镀膜工艺对于弹性体1要求极高，比如感应面61必须位于最顶层，以方便抛光研磨、放置光刻晶圆，应变梁6尽量减小装配、工作时的其它方向寄生载荷的影响。
具体地，本实施例中，应变梁6和承载梁7的顶面与弹性体1的顶面处于同一水平面内，即，应变梁6的顶面形成弹性体1的敏感面61，且处于弹性体1的最顶层，这样设置的好处是，能够保证溅射薄膜制作敏感电阻3工序的稳步实施，本实施例提供的力矩传感器的弹性体1将敏感面61布置在顶层，方便对敏感面61研磨抛光，也保证在该面甩胶的均匀性，进而使光刻晶圆定位固定更加可靠。
本实施例中，应变检测组件还包括电路板2和连接柱21。
电路板2设置在弹性体1的上方，电路板2通过连接柱21与弹性体1连接，且电路板2与弹性体1之间具有间隙。
具体地，电路板2位于弹性体1的上方，且与弹性体1的顶面之间具有间隙，即电路板2在高度方向和敏感电阻3有一定的距离，保证敏感电阻3不被电路板2划伤。优选地，可以在弹性体1的内圈5上设置安装孔51，电路板2与连接柱21的上端固定连接，连接柱21的下端固定连接在该安装孔51内。本实施例中，安装孔51可以为多个，且沿内圈5的周向间隔设置，连接柱21的数量与安装孔51相同，且一一对应。需要说明的是，还可以在电路板2和弹性体1之间设置垫片，从而使电路板2和弹性体1的应变梁6的顶面之间形成间隙，避免划伤应变梁6上设置的敏感电阻3。
优选地，连接柱21为铜柱。
应变检测组件可以包括电阻应变计，电阻应变计粘贴在应变梁6上。
当应变检测组件包括敏感电阻3时，敏感电阻3通过溅射镀膜工艺设置在应变梁6上。
溅射镀膜工艺制作的电阻应变计相比于传统粘贴式电阻应变计具有精度高、一致性好、蠕变小、适应温度范围广的优点，在航空、航天、军工、电力、冶金、医药、物联网等领域逐步得到运用。
本实施例中，弹性体1根据机械臂关节轻量化设计要求做成扁平法兰形状；中心的内圈5的圆孔方便走线；敏感电阻3包含绝缘层、敏感层、引线层、保护层等均采用溅射镀膜工艺在弹性体1的应变梁6的敏感面61上直接制作完成；敏感电阻3的引线层和电路板2采用金丝球焊技术完成电气连接，该过程替代了传统的锡焊工艺，且全部由自动化设备完成，极大提高了传感器制作的一致性；电路板2负责组桥、放大、AD转换、通信等任务，保证传感器直接输出数字信号，方便机械臂的使用。
本实施例中，应变梁6和承载梁7的数量均为多个，且依次交错设置。
如图4所示，应变梁6的数量为四个，且沿内圈5的周向均布；承载梁7的数量为四 个，沿内圈5的周向均布，且每个应变梁6处于两个相邻的承载梁7之间。
本实施例中，相邻的应变梁6和承载梁7在靠近内圈5的相接处采用弧形结构8过渡连接，应变梁6与内圈5的相接处设置有卸荷槽63。
为尽量减小弹性体1的应变梁6和承载梁7与内圈5相接处的应力集中现象，防止某处局部塑性变形造成传感器蠕变、滞后，本实施例中，弹性体1在承载梁7和应变梁6之间采用较大的弧形结构8过渡，且过渡圆角较大，这造成了等承载梁7和应变梁6沿宽度方向的刚度的变化，严重降低了敏感面61的应变均匀度，因此在应变梁6与内圈5相接的根部设置卸荷槽63，通过该卸荷槽63能够补偿过渡结构引起的敏感面61应变不均匀度。优选地，卸荷槽63为通孔，因此应变梁6由卸荷槽63两侧对称的细梁连接至内圈5，这对于传感器实际受到的除绕法向中心轴旋转的力矩之外的其它方向作用力有一定的卸荷作用，降低了诸如安装误差、谐波柔轮变形等原因造成的精度损失。
本实施例提供了一种机械臂关节使用的基于溅射镀膜工艺制作的力矩传感器，通过溅射镀膜、光刻等工艺在应变梁6的敏感面61上直接生成电阻应变计，取代了传统的电阻应变片粘贴工艺，具有一致性好、精度高、抗过载能力强的优点，适合大批量、标准化、自动化生产，为机械臂的力控性能提供了核心硬件支撑。
可选的，每个应变梁6上设有两个应变栅格敏感电阻3，栅格的延伸方向与应变梁6的延伸方向之间的夹角为45°。
具体地，溅射镀膜工艺制作敏感电阻3工序主要如下：首先将弹性体1的应变梁6的敏感面61的上表面整面抛光，并研磨至合适平面度与粗糙度，然后使用溅射机依次在该面整面均匀溅射SiO2绝缘层、敏感电阻3材料；随后使用甩胶固定光刻板进行显影造型，刻蚀出剪切式应变栅格敏感电阻R1～R8，应变栅格敏感电阻的中轴线与应变梁6的宽度方向的中轴线重合，且栅格与应变梁6的宽度方向的中轴线呈45°，能够最大限度的检测敏感面61的剪切应变；最后焊接引线，封装，组桥，测试。
如图5所示，本实施例提供的力矩传感器，共包含8个敏感电阻3，完成两个全桥方式组成方式如下：对侧R1～R4和R5～R8分别组桥，以上两个桥路共用一个输入电压Ui，输出电压U01和U02相减滤除电源共模噪声的同时提高传感器的灵敏度两倍。
综上所述，本申请提供的力矩传感器，包括弹性体1和应变检测组件；弹性体1包括外圈4、内圈5、应变梁6和承载梁7；内圈5和外圈4均为环状结构且同轴设置，外圈4配置成与基座连接，内圈5配置成与输入扭矩的驱动件连接；应变梁6和承载梁7分别连接内圈5和外圈4，应变检测组件设置在应变梁6上，且应变梁6的横截面积小于承载梁7的横截面积。本申请提供的力矩传感器实际使用时，弹性体1的外圈4固定在基座上，内圈5通过驱动件的加载受到扭矩之后，使承载梁7和应变梁6产生应变，因应变梁6的横 截面积小于承载梁7的横截面积，因此，应变梁6变形相对于承载梁7的变形要大，因此，通过设置在应变梁6上的应变检测组件实现力矩的检测时，能够避免变形误差造成的检测精度损失，提高力矩传感器的检测精度，满足高精度检测要求。
最后应说明的是：以上各实施例仅用以说明本申请的技术方案，而非对其限制；尽管参照前述各实施例对本申请进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分或者全部技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本申请各实施例技术方案的范围。
工业实用性
本实施例提供的力矩传感器，其中，应变梁变形相对于承载梁的变形要大，因此，通过设置在应变梁上的应变检测组件实现力矩的检测时，能够避免变形误差造成的检测精度损失，提高力矩传感器的检测精度，满足高精度检测要求。

Claims (17)

  1. 一种力矩传感器，其特征在于，包括弹性体(1)和应变检测组件；
    所述弹性体(1)包括外圈(4)、内圈(5)、应变梁(6)和承载梁(7)；所述内圈(5)和所述外圈(4)均为环状结构且同轴设置，所述外圈(4)配置成与基座连接，所述内圈(5)配置成与输入扭矩的驱动件连接；
    所述应变梁(6)和所述承载梁(7)分别连接所述内圈(5)和所述外圈(4)，所述应变检测组件设置在所述应变梁(6)上，且所述应变梁(6)的横截面积小于所述承载梁(7)的横截面积。
  2. 根据权利要求1所述的力矩传感器，其特征在于，所述应变梁(6)的底部设有凹槽(62)，所述应变梁(6)的厚度小于所述承载梁(7)的厚度。
  3. 根据权利要求1所述的力矩传感器，其特征在于，所述应变梁(6)为中空结构，所述承载梁(7)为实心结构。
  4. 根据权利要求1所述的力矩传感器，其特征在于，所述应变检测组件包括敏感电阻(3)，所述敏感电阻(3)设置在所述应变梁(6)的顶面。
  5. 根据权利要求4所述的力矩传感器，其特征在于，所述应变梁的顶面和所述承载梁的顶面均与所述弹性体的顶面处于同一水平面内。
  6. 根据权利要求1所述的力矩传感器，其特征在于，所述应变检测组件还包括电路板(2)和连接柱(21)；
    所述电路板(2)设置在所述弹性体(1)的上方，所述电路板(2)通过所述连接柱(21)与所述弹性体(1)连接，且所述电路板(2)与所述弹性体(1)之间具有间隙。
  7. 根据权利要求6所述的力矩传感器，其特征在于，所述弹性体的内圈设置有安装孔，所述电路板与所述连接柱的上端固定连接，所述连接柱的下端固定连接在所述安装孔内。
  8. 根据权利要求7所述的力矩传感器，其特征在于，所述安装孔为多个，且多个所述安装孔沿所述内圈的周向间隔设置；所述连接柱的数量与所述安装孔的数量相同，且所述连接柱与所述安装孔一一对应。
  9. 根据权利要求8所述的力矩传感器，其特征在于，所述电路板与所述弹性体之间设置有垫片，所述垫片配置成使所述电路板和所述应变梁的顶面之间形成间隙。
  10. 根据权利要求4所述的力矩传感器，其特征在于，所述敏感电阻(3)通过溅射镀膜工艺设置在所述应变梁(6)上。
  11. 根据权利要求1所述的力矩传感器，其特征在于，所述应变检测组件包括电阻应变计，所述电阻应变计粘贴在所述应变梁(6)上。
  12. 根据权利要求1-11任一项所述的力矩传感器，其特征在于，所述应变梁(6)和所述承载梁(7)的数量均为多个，且依次交错设置。
  13. 根据权利要求12所述的力矩传感器，其特征在于，相邻的所述应变梁(6)和所述承载梁(7)在靠近所述内圈(5)的相接处采用弧形结构(8)过渡连接，所述应变梁(6)与所述内圈(5)的相接处设置有卸荷槽(63)。
  14. 根据权利要求13所述的力矩传感器，其特征在于，所述卸荷槽为通孔。
  15. 根据权利要求12所述的力矩传感器，其特征在于，所述应变梁(6)的数量为四个，且沿所述内圈(5)的周向均布；
    所述承载梁(7)的数量为四个，沿所述内圈(5)的周向均布，且每个所述应变梁(6)处于两个相邻的所述承载梁(7)之间。
  16. 根据权利要求1所述的力矩传感器，其特征在于，每个所述应变梁(6)上设有两个应变栅格敏感电阻(3)，栅格的延伸方向与所述应变梁(6)的延伸方向之间的夹角为45°。
  17. 根据权利要求1所述的力矩传感器，其特征在于，所述外圈、所述内圈、所述应变梁和所述承载梁一体成型。
PCT/CN2022/097523 2021-06-10 2022-06-08 力矩传感器 WO2022257947A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202110650814.X 2021-06-10
CN202110650814.XA CN113465802B (zh) 2021-06-10 2021-06-10 力矩传感器

Publications (1)

Publication Number Publication Date
WO2022257947A1 true WO2022257947A1 (zh) 2022-12-15

Family

ID=77869641

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2022/097523 WO2022257947A1 (zh) 2021-06-10 2022-06-08 力矩传感器

Country Status (2)

Country Link
CN (1) CN113465802B (zh)
WO (1) WO2022257947A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116086549A (zh) * 2023-03-23 2023-05-09 常州爱塞尔科技有限公司 一种新能源汽车压装设备测试装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113465802B (zh) * 2021-06-10 2022-12-02 北京思灵机器人科技有限责任公司 力矩传感器
CN114720028A (zh) * 2022-03-03 2022-07-08 陕西电器研究所 一种基于薄膜溅射技术的一体式多维力传感器

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN208043297U (zh) * 2018-04-26 2018-11-02 常州瑞尔特测控系统有限公司 一种新型机器人关节扭矩传感器
CN109813475A (zh) * 2019-03-29 2019-05-28 溱者(上海)智能科技有限公司 一种扭矩测量装置的结构件与过载保护机构
US20200284667A1 (en) * 2019-03-10 2020-09-10 Ati Industrial Automation, Inc. Force/Torque Sensor Having Serpentine or Coiled Deformable Beams and Overload Beams
JP2021001757A (ja) * 2019-06-20 2021-01-07 ユニパルス株式会社 荷重変換器
CN112665765A (zh) * 2020-12-01 2021-04-16 哈尔滨工业大学 一种基于并联分载原理的机器人高刚度关节力矩传感器
CN113465802A (zh) * 2021-06-10 2021-10-01 北京思灵机器人科技有限责任公司 力矩传感器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001272290A (ja) * 2000-03-23 2001-10-05 Autogard Japan:Kk トルク測定装置
DE112009004288T5 (de) * 2009-02-06 2012-11-08 Abb Ag Satz von mehrachsigen Kraft- und Drehmoment-Sensoren und Montageverfahren
CN103693614B (zh) * 2013-12-30 2015-12-30 中国电子科技集团公司第四十九研究所 圆弧应力匀散结构抗过载微压传感器的制造方法
CN106286582B (zh) * 2016-08-31 2019-01-01 瓦房店正达冶金轧机轴承有限公司 一种轧机用圆柱滚子轴承
CN107031784A (zh) * 2017-05-04 2017-08-11 深圳哥智行科技有限公司 自行车的牙盘式力矩传感装置
CN206968592U (zh) * 2017-06-20 2018-02-06 浙江吉利控股集团有限公司 紧固加强结构
CN207747669U (zh) * 2017-12-28 2018-08-21 广州镁业金属科技有限公司 一种一体车轮
CN112611489A (zh) * 2020-12-21 2021-04-06 陕西电器研究所 一种基于薄膜溅射的抗过载扭矩传感器

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN208043297U (zh) * 2018-04-26 2018-11-02 常州瑞尔特测控系统有限公司 一种新型机器人关节扭矩传感器
US20200284667A1 (en) * 2019-03-10 2020-09-10 Ati Industrial Automation, Inc. Force/Torque Sensor Having Serpentine or Coiled Deformable Beams and Overload Beams
CN109813475A (zh) * 2019-03-29 2019-05-28 溱者(上海)智能科技有限公司 一种扭矩测量装置的结构件与过载保护机构
JP2021001757A (ja) * 2019-06-20 2021-01-07 ユニパルス株式会社 荷重変換器
CN112665765A (zh) * 2020-12-01 2021-04-16 哈尔滨工业大学 一种基于并联分载原理的机器人高刚度关节力矩传感器
CN113465802A (zh) * 2021-06-10 2021-10-01 北京思灵机器人科技有限责任公司 力矩传感器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116086549A (zh) * 2023-03-23 2023-05-09 常州爱塞尔科技有限公司 一种新能源汽车压装设备测试装置

Also Published As

Publication number Publication date
CN113465802B (zh) 2022-12-02
CN113465802A (zh) 2021-10-01

Similar Documents

Publication Publication Date Title
WO2022257947A1 (zh) 力矩传感器
US20180209860A1 (en) Torque sensor
JP5243704B2 (ja) 力覚センサ
CN1033469C (zh) 多功能压差传感器
JP5687384B1 (ja) 力覚センサ
US8776616B2 (en) Multiaxial force-torque sensors
JP5295388B2 (ja) フォースセンサ及びその製造方法
US20130167661A1 (en) Torque sensor
US8033009B2 (en) Method for producing a force sensor
CN209043232U (zh) 一种用于扭矩传感器的集成箔式电阻应变计
US20220299389A1 (en) Anti-overload torque sensor based on thin film sputtering
CN113567030B (zh) 平面串联无耦合型六维腕力传感器
JP2007163405A (ja) 多軸力ロードセル
WO2021082613A1 (zh) 一种小量程三维传感器及其测试方法
CN206756350U (zh) 薄膜应变式扭矩传感器
CN115901040A (zh) 一种纳米薄膜轴销力传感器及其制备方法与应用
CN109781329B (zh) 一种六梁结构的六维力传感器
CN206725134U (zh) 基于溅射薄膜技术的高性能扭矩传感器
CN114459641A (zh) 一种力矩传感器及其有效信号的检测方法
CN104406724B (zh) 测力传感器
JPH0821721B2 (ja) 力検出装置
JP6767559B2 (ja) ひずみゲージ及び多軸力センサ
WO2021240389A1 (en) Torque and force transducer
JPS6321531A (ja) 力検出装置
CN113237421A (zh) 一种轴销形应变式传感器

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 22819544

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE