JPS61223626A - センサ - Google Patents
センサInfo
- Publication number
- JPS61223626A JPS61223626A JP60065357A JP6535785A JPS61223626A JP S61223626 A JPS61223626 A JP S61223626A JP 60065357 A JP60065357 A JP 60065357A JP 6535785 A JP6535785 A JP 6535785A JP S61223626 A JPS61223626 A JP S61223626A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- resistances
- resistor
- output
- moment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims abstract description 55
- 230000002093 peripheral effect Effects 0.000 claims abstract description 21
- 239000000463 material Substances 0.000 claims abstract description 13
- 230000005284 excitation Effects 0.000 claims description 7
- 238000000034 method Methods 0.000 abstract description 8
- 239000000758 substrate Substances 0.000 description 17
- 230000000694 effects Effects 0.000 description 10
- 230000008859 change Effects 0.000 description 8
- 238000004364 calculation method Methods 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 238000001514 detection method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000006023 eutectic alloy Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 235000013339 cereals Nutrition 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
- G01L5/162—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of piezoresistors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
- G01L5/1627—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of strain gauges
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Manipulator (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60065357A JPS61223626A (ja) | 1985-03-29 | 1985-03-29 | センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60065357A JPS61223626A (ja) | 1985-03-29 | 1985-03-29 | センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61223626A true JPS61223626A (ja) | 1986-10-04 |
| JPH0575055B2 JPH0575055B2 (enrdf_load_stackoverflow) | 1993-10-19 |
Family
ID=13284622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60065357A Granted JPS61223626A (ja) | 1985-03-29 | 1985-03-29 | センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61223626A (enrdf_load_stackoverflow) |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6321530A (ja) * | 1986-07-15 | 1988-01-29 | Ricoh Co Ltd | 力検出装置 |
| JPS6394690A (ja) * | 1986-10-09 | 1988-04-25 | Ricoh Co Ltd | 力検出装置 |
| JPS63266325A (ja) * | 1987-04-24 | 1988-11-02 | Nekushii Kenkyusho:Kk | 力検出装置 |
| JPS63266358A (ja) * | 1987-04-24 | 1988-11-02 | Nekushii Kenkyusho:Kk | 加速度検出装置 |
| JPS63266329A (ja) * | 1987-04-24 | 1988-11-02 | Nekushii Kenkyusho:Kk | 力検出装置 |
| WO1988008521A1 (en) * | 1987-04-24 | 1988-11-03 | Kabushiki Kaisha Nexy Kenkyusho | Force and moment detector using resistor |
| WO1988008522A1 (en) * | 1987-04-24 | 1988-11-03 | Kabushiki Kaisha Nexy Kenkyusho | Detector for force, acceleration and magnetism using resistor element |
| JPS6463831A (en) * | 1987-09-03 | 1989-03-09 | Ricoh Kk | Force detecting apparatus |
| JPS6475930A (en) * | 1987-09-18 | 1989-03-22 | Nexy Kenkyusho Kk | Force/moment detector |
| JPS6475929A (en) * | 1987-09-18 | 1989-03-22 | Nexy Kenkyusho Kk | Force detector |
| WO1989002587A1 (en) * | 1987-09-18 | 1989-03-23 | Kazuhiro Okada | Force detection apparatus using resistance element and its application |
| JPH0197827A (ja) * | 1987-07-08 | 1989-04-17 | Ricoh Co Ltd | 半導体拡散型力覚センサ |
| JPH05180714A (ja) * | 1992-01-07 | 1993-07-23 | Bando Chem Ind Ltd | 張力測定用プーリ装置 |
| EP1327870A3 (en) * | 2002-01-11 | 2007-07-04 | Honda Giken Kogyo Kabushiki Kaisha | Six-axis force sensor |
| EP1688725A4 (en) * | 2003-09-30 | 2007-08-15 | Nitta Corp | MULTI-RANGE SENSOR AND YOU USING THE MULTI-RANGE SENSOR |
| JP2007255899A (ja) * | 2006-03-20 | 2007-10-04 | Nissan Motor Co Ltd | サスペンション車体間入力荷重測定装置 |
| JP2008051625A (ja) * | 2006-08-24 | 2008-03-06 | Honda Motor Co Ltd | 力覚センサ |
| EP3588041B1 (en) * | 2017-02-24 | 2023-03-29 | Nidec Copal Electronics Corporation | Elastic body and force sensor provided with said elastic body |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008096230A (ja) * | 2006-10-11 | 2008-04-24 | Nitta Ind Corp | 歪みゲージ式センサ |
-
1985
- 1985-03-29 JP JP60065357A patent/JPS61223626A/ja active Granted
Cited By (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6321530A (ja) * | 1986-07-15 | 1988-01-29 | Ricoh Co Ltd | 力検出装置 |
| JPS6394690A (ja) * | 1986-10-09 | 1988-04-25 | Ricoh Co Ltd | 力検出装置 |
| EP0625701A1 (en) * | 1987-04-24 | 1994-11-23 | Enplas Laboratories, Inc. | Force detector using piezoresistive elements |
| JPS63266358A (ja) * | 1987-04-24 | 1988-11-02 | Nekushii Kenkyusho:Kk | 加速度検出装置 |
| JPS63266329A (ja) * | 1987-04-24 | 1988-11-02 | Nekushii Kenkyusho:Kk | 力検出装置 |
| WO1988008521A1 (en) * | 1987-04-24 | 1988-11-03 | Kabushiki Kaisha Nexy Kenkyusho | Force and moment detector using resistor |
| WO1988008522A1 (en) * | 1987-04-24 | 1988-11-03 | Kabushiki Kaisha Nexy Kenkyusho | Detector for force, acceleration and magnetism using resistor element |
| JPS63266325A (ja) * | 1987-04-24 | 1988-11-02 | Nekushii Kenkyusho:Kk | 力検出装置 |
| US4905523A (en) * | 1987-04-24 | 1990-03-06 | Wacoh Corporation | Force detector and moment detector using resistance element |
| JPH0197827A (ja) * | 1987-07-08 | 1989-04-17 | Ricoh Co Ltd | 半導体拡散型力覚センサ |
| JPS6463831A (en) * | 1987-09-03 | 1989-03-09 | Ricoh Kk | Force detecting apparatus |
| WO1989002587A1 (en) * | 1987-09-18 | 1989-03-23 | Kazuhiro Okada | Force detection apparatus using resistance element and its application |
| JPS6475929A (en) * | 1987-09-18 | 1989-03-22 | Nexy Kenkyusho Kk | Force detector |
| JPS6475930A (en) * | 1987-09-18 | 1989-03-22 | Nexy Kenkyusho Kk | Force/moment detector |
| US5092645A (en) * | 1987-09-18 | 1992-03-03 | Wacoh Corporation | Robotic gripper having strain sensors formed on a semiconductor substrate |
| JPH05180714A (ja) * | 1992-01-07 | 1993-07-23 | Bando Chem Ind Ltd | 張力測定用プーリ装置 |
| EP1327870A3 (en) * | 2002-01-11 | 2007-07-04 | Honda Giken Kogyo Kabushiki Kaisha | Six-axis force sensor |
| EP1688725A4 (en) * | 2003-09-30 | 2007-08-15 | Nitta Corp | MULTI-RANGE SENSOR AND YOU USING THE MULTI-RANGE SENSOR |
| JP2007255899A (ja) * | 2006-03-20 | 2007-10-04 | Nissan Motor Co Ltd | サスペンション車体間入力荷重測定装置 |
| JP2008051625A (ja) * | 2006-08-24 | 2008-03-06 | Honda Motor Co Ltd | 力覚センサ |
| EP3588041B1 (en) * | 2017-02-24 | 2023-03-29 | Nidec Copal Electronics Corporation | Elastic body and force sensor provided with said elastic body |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0575055B2 (enrdf_load_stackoverflow) | 1993-10-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |