JPH0574220B2 - - Google Patents

Info

Publication number
JPH0574220B2
JPH0574220B2 JP1279863A JP27986389A JPH0574220B2 JP H0574220 B2 JPH0574220 B2 JP H0574220B2 JP 1279863 A JP1279863 A JP 1279863A JP 27986389 A JP27986389 A JP 27986389A JP H0574220 B2 JPH0574220 B2 JP H0574220B2
Authority
JP
Japan
Prior art keywords
groove
film
semiconductor layer
material film
patterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1279863A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02177330A (ja
Inventor
Shuichi Kameyama
Satoshi Shinozaki
Hiroshi Iwai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP27986389A priority Critical patent/JPH02177330A/ja
Publication of JPH02177330A publication Critical patent/JPH02177330A/ja
Publication of JPH0574220B2 publication Critical patent/JPH0574220B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Local Oxidation Of Silicon (AREA)
JP27986389A 1989-10-30 1989-10-30 半導体装置の製造方法 Granted JPH02177330A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27986389A JPH02177330A (ja) 1989-10-30 1989-10-30 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27986389A JPH02177330A (ja) 1989-10-30 1989-10-30 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP56212459A Division JPS58112342A (ja) 1981-08-21 1981-12-25 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPH02177330A JPH02177330A (ja) 1990-07-10
JPH0574220B2 true JPH0574220B2 (enExample) 1993-10-18

Family

ID=17616995

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27986389A Granted JPH02177330A (ja) 1989-10-30 1989-10-30 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPH02177330A (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495283A (enExample) * 1972-04-28 1974-01-17
JPS5858266B2 (ja) * 1978-08-26 1983-12-24 井関農機株式会社 無限軌道
JPS56137653A (en) * 1980-03-29 1981-10-27 Chiyou Lsi Gijutsu Kenkyu Kumiai Semiconductor integrated circuit

Also Published As

Publication number Publication date
JPH02177330A (ja) 1990-07-10

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