JPH0573340B2 - - Google Patents

Info

Publication number
JPH0573340B2
JPH0573340B2 JP22593688A JP22593688A JPH0573340B2 JP H0573340 B2 JPH0573340 B2 JP H0573340B2 JP 22593688 A JP22593688 A JP 22593688A JP 22593688 A JP22593688 A JP 22593688A JP H0573340 B2 JPH0573340 B2 JP H0573340B2
Authority
JP
Japan
Prior art keywords
workpiece
processing tool
microscope
scale plate
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP22593688A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0274048A (ja
Inventor
Mitsukyo Tani
Mamoru Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP22593688A priority Critical patent/JPH0274048A/ja
Publication of JPH0274048A publication Critical patent/JPH0274048A/ja
Publication of JPH0573340B2 publication Critical patent/JPH0573340B2/ja
Granted legal-status Critical Current

Links

JP22593688A 1988-09-09 1988-09-09 微小部品位置決め装置および方法 Granted JPH0274048A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22593688A JPH0274048A (ja) 1988-09-09 1988-09-09 微小部品位置決め装置および方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22593688A JPH0274048A (ja) 1988-09-09 1988-09-09 微小部品位置決め装置および方法

Publications (2)

Publication Number Publication Date
JPH0274048A JPH0274048A (ja) 1990-03-14
JPH0573340B2 true JPH0573340B2 (zh) 1993-10-14

Family

ID=16837218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22593688A Granted JPH0274048A (ja) 1988-09-09 1988-09-09 微小部品位置決め装置および方法

Country Status (1)

Country Link
JP (1) JPH0274048A (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202008004899U1 (de) * 2008-04-09 2009-08-20 Sick Ag Frontscheibenelement und Sensor

Also Published As

Publication number Publication date
JPH0274048A (ja) 1990-03-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees