JPH0573049B2 - - Google Patents

Info

Publication number
JPH0573049B2
JPH0573049B2 JP61048627A JP4862786A JPH0573049B2 JP H0573049 B2 JPH0573049 B2 JP H0573049B2 JP 61048627 A JP61048627 A JP 61048627A JP 4862786 A JP4862786 A JP 4862786A JP H0573049 B2 JPH0573049 B2 JP H0573049B2
Authority
JP
Japan
Prior art keywords
light
discharge tube
light source
tube unit
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61048627A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62206823A (ja
Inventor
Koichi Tamagawa
Toshio Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP4862786A priority Critical patent/JPS62206823A/ja
Publication of JPS62206823A publication Critical patent/JPS62206823A/ja
Publication of JPH0573049B2 publication Critical patent/JPH0573049B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP4862786A 1986-03-07 1986-03-07 光励起プロセス装置 Granted JPS62206823A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4862786A JPS62206823A (ja) 1986-03-07 1986-03-07 光励起プロセス装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4862786A JPS62206823A (ja) 1986-03-07 1986-03-07 光励起プロセス装置

Publications (2)

Publication Number Publication Date
JPS62206823A JPS62206823A (ja) 1987-09-11
JPH0573049B2 true JPH0573049B2 (enExample) 1993-10-13

Family

ID=12808628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4862786A Granted JPS62206823A (ja) 1986-03-07 1986-03-07 光励起プロセス装置

Country Status (1)

Country Link
JP (1) JPS62206823A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2989063B2 (ja) * 1991-12-12 1999-12-13 キヤノン株式会社 薄膜形成装置および薄膜形成方法
JP6827287B2 (ja) * 2016-09-28 2021-02-10 株式会社日立ハイテク プラズマ処理装置の運転方法
CN116114051A (zh) * 2020-09-18 2023-05-12 株式会社国际电气 基板处理装置、等离子体发光装置、半导体装置的制造方法以及程序

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59194425A (ja) * 1983-04-18 1984-11-05 Mitsubishi Electric Corp 光化学気相成膜装置

Also Published As

Publication number Publication date
JPS62206823A (ja) 1987-09-11

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