JPS62206823A - 光励起プロセス装置 - Google Patents
光励起プロセス装置Info
- Publication number
- JPS62206823A JPS62206823A JP4862786A JP4862786A JPS62206823A JP S62206823 A JPS62206823 A JP S62206823A JP 4862786 A JP4862786 A JP 4862786A JP 4862786 A JP4862786 A JP 4862786A JP S62206823 A JPS62206823 A JP S62206823A
- Authority
- JP
- Japan
- Prior art keywords
- discharge tube
- light source
- light
- chamber
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005086 pumping Methods 0.000 title 1
- 238000006243 chemical reaction Methods 0.000 claims abstract description 27
- 238000005192 partition Methods 0.000 claims abstract description 21
- 239000012495 reaction gas Substances 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 239000011261 inert gas Substances 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims abstract description 8
- 230000005540 biological transmission Effects 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 8
- 230000001443 photoexcitation Effects 0.000 claims description 7
- 238000006303 photolysis reaction Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 abstract description 16
- 238000005530 etching Methods 0.000 abstract description 5
- 238000002834 transmittance Methods 0.000 abstract description 4
- 238000007599 discharging Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 5
- 230000008021 deposition Effects 0.000 description 4
- 238000010926 purge Methods 0.000 description 4
- 230000005284 excitation Effects 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 2
- 229910001634 calcium fluoride Inorganic materials 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229910007264 Si2H6 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- FMSYTQMJOCCCQS-UHFFFAOYSA-L difluoromercury Chemical compound F[Hg]F FMSYTQMJOCCCQS-UHFFFAOYSA-L 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4862786A JPS62206823A (ja) | 1986-03-07 | 1986-03-07 | 光励起プロセス装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4862786A JPS62206823A (ja) | 1986-03-07 | 1986-03-07 | 光励起プロセス装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62206823A true JPS62206823A (ja) | 1987-09-11 |
| JPH0573049B2 JPH0573049B2 (enExample) | 1993-10-13 |
Family
ID=12808628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4862786A Granted JPS62206823A (ja) | 1986-03-07 | 1986-03-07 | 光励起プロセス装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62206823A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5585148A (en) * | 1991-12-12 | 1996-12-17 | Canon Kabushiki Kaisha | Process for forming a deposited film using a light transmissive perforated diffusion plate |
| KR20180035109A (ko) * | 2016-09-28 | 2018-04-05 | 가부시키가이샤 히다치 하이테크놀로지즈 | 플라스마 처리 장치의 운전 방법 |
| WO2022059188A1 (ja) * | 2020-09-18 | 2022-03-24 | 株式会社Kokusai Electric | 基板処理装置、プラズマ発光装置、半導体装置の製造方法及びプログラム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59194425A (ja) * | 1983-04-18 | 1984-11-05 | Mitsubishi Electric Corp | 光化学気相成膜装置 |
-
1986
- 1986-03-07 JP JP4862786A patent/JPS62206823A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59194425A (ja) * | 1983-04-18 | 1984-11-05 | Mitsubishi Electric Corp | 光化学気相成膜装置 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5585148A (en) * | 1991-12-12 | 1996-12-17 | Canon Kabushiki Kaisha | Process for forming a deposited film using a light transmissive perforated diffusion plate |
| KR20180035109A (ko) * | 2016-09-28 | 2018-04-05 | 가부시키가이샤 히다치 하이테크놀로지즈 | 플라스마 처리 장치의 운전 방법 |
| WO2022059188A1 (ja) * | 2020-09-18 | 2022-03-24 | 株式会社Kokusai Electric | 基板処理装置、プラズマ発光装置、半導体装置の製造方法及びプログラム |
| JPWO2022059188A1 (enExample) * | 2020-09-18 | 2022-03-24 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0573049B2 (enExample) | 1993-10-13 |
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