JPH0573046B2 - - Google Patents

Info

Publication number
JPH0573046B2
JPH0573046B2 JP60186823A JP18682385A JPH0573046B2 JP H0573046 B2 JPH0573046 B2 JP H0573046B2 JP 60186823 A JP60186823 A JP 60186823A JP 18682385 A JP18682385 A JP 18682385A JP H0573046 B2 JPH0573046 B2 JP H0573046B2
Authority
JP
Japan
Prior art keywords
chamber
light
shielding plate
light source
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60186823A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6246515A (ja
Inventor
Shunpei Yamazaki
Mamoru Tashiro
Shinji Imato
Kazuo Urata
Juji Misemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP60186823A priority Critical patent/JPS6246515A/ja
Publication of JPS6246515A publication Critical patent/JPS6246515A/ja
Publication of JPH0573046B2 publication Critical patent/JPH0573046B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Drying Of Semiconductors (AREA)
  • Photovoltaic Devices (AREA)
JP60186823A 1985-08-26 1985-08-26 薄膜形成方法及びその装置 Granted JPS6246515A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60186823A JPS6246515A (ja) 1985-08-26 1985-08-26 薄膜形成方法及びその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60186823A JPS6246515A (ja) 1985-08-26 1985-08-26 薄膜形成方法及びその装置

Publications (2)

Publication Number Publication Date
JPS6246515A JPS6246515A (ja) 1987-02-28
JPH0573046B2 true JPH0573046B2 (enrdf_load_stackoverflow) 1993-10-13

Family

ID=16195230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60186823A Granted JPS6246515A (ja) 1985-08-26 1985-08-26 薄膜形成方法及びその装置

Country Status (1)

Country Link
JP (1) JPS6246515A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63314828A (ja) * 1987-06-18 1988-12-22 Matsushita Electric Ind Co Ltd 光ｃｖｄ装置
JP3531398B2 (ja) * 1997-02-19 2004-05-31 富士電機ホールディングス株式会社 薄膜太陽電池の製造装置および製造方法

Also Published As

Publication number Publication date
JPS6246515A (ja) 1987-02-28

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