JPH0572979B2 - - Google Patents

Info

Publication number
JPH0572979B2
JPH0572979B2 JP61079256A JP7925686A JPH0572979B2 JP H0572979 B2 JPH0572979 B2 JP H0572979B2 JP 61079256 A JP61079256 A JP 61079256A JP 7925686 A JP7925686 A JP 7925686A JP H0572979 B2 JPH0572979 B2 JP H0572979B2
Authority
JP
Japan
Prior art keywords
gas sensor
sensor
source
type gas
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61079256A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62237347A (ja
Inventor
Hiroshi Kato
Nobuhiro Sakuta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuyama Corp
Original Assignee
Tokuyama Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuyama Corp filed Critical Tokuyama Corp
Priority to JP7925686A priority Critical patent/JPS62237347A/ja
Publication of JPS62237347A publication Critical patent/JPS62237347A/ja
Publication of JPH0572979B2 publication Critical patent/JPH0572979B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP7925686A 1986-04-08 1986-04-08 電界効果トランジスタ型ガスセンサ− Granted JPS62237347A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7925686A JPS62237347A (ja) 1986-04-08 1986-04-08 電界効果トランジスタ型ガスセンサ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7925686A JPS62237347A (ja) 1986-04-08 1986-04-08 電界効果トランジスタ型ガスセンサ−

Publications (2)

Publication Number Publication Date
JPS62237347A JPS62237347A (ja) 1987-10-17
JPH0572979B2 true JPH0572979B2 (enrdf_load_html_response) 1993-10-13

Family

ID=13684770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7925686A Granted JPS62237347A (ja) 1986-04-08 1986-04-08 電界効果トランジスタ型ガスセンサ−

Country Status (1)

Country Link
JP (1) JPS62237347A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005079342A (ja) * 2003-08-29 2005-03-24 Japan Science & Technology Agency 電界効果トランジスタ及び単一電子トランジスタ並びにそれを用いたセンサ
JP2010066234A (ja) * 2008-09-12 2010-03-25 Okayama Univ ガスセンサ

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62250352A (ja) * 1986-04-23 1987-10-31 Seitai Kinou Riyou Kagakuhin Shinseizou Gijutsu Kenkyu Kumiai 電界効果トランジスタ型酸素ガスセンサ
JPH01127943A (ja) * 1987-11-12 1989-05-19 Daikin Ind Ltd 可燃性ガスセンサ
DE10163557B4 (de) * 2001-12-21 2007-12-06 Forschungszentrum Jülich GmbH Transistorbasierter Sensor mit besonders ausgestalteter Gateelektrode zur hochempfindlichen Detektion von Analyten
US7901553B2 (en) * 2004-01-27 2011-03-08 H2Scan Corporation Method and system for sensing gas incorporating an integrated reference element
DE102004019639A1 (de) * 2004-04-22 2005-11-17 Siemens Ag FET-basierter Gassensor
WO2009011164A1 (ja) * 2007-07-19 2009-01-22 Renesas Technology Corp. 半導体装置およびその製造方法
US8610180B2 (en) * 2010-06-11 2013-12-17 Semiconductor Energy Laboratory Co., Ltd. Gas sensor and method for manufacturing the gas sensor
DE102012213625A1 (de) * 2012-08-02 2014-02-06 Robert Bosch Gmbh Gassensor zur Bestimmung von in einem Gasgemisch enthaltenen Substanzen und Verfahren zum Herstellen eines solchen

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4020830A (en) * 1975-03-12 1977-05-03 The University Of Utah Selective chemical sensitive FET transducers
JPS57119253A (en) * 1981-01-16 1982-07-24 Seiko Epson Corp Gas sensor element
JPS62174643A (ja) * 1986-01-28 1987-07-31 Daikin Ind Ltd 可燃性ガスセンサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005079342A (ja) * 2003-08-29 2005-03-24 Japan Science & Technology Agency 電界効果トランジスタ及び単一電子トランジスタ並びにそれを用いたセンサ
JP2010066234A (ja) * 2008-09-12 2010-03-25 Okayama Univ ガスセンサ

Also Published As

Publication number Publication date
JPS62237347A (ja) 1987-10-17

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