JPH057240Y2 - - Google Patents
Info
- Publication number
- JPH057240Y2 JPH057240Y2 JP1987099171U JP9917187U JPH057240Y2 JP H057240 Y2 JPH057240 Y2 JP H057240Y2 JP 1987099171 U JP1987099171 U JP 1987099171U JP 9917187 U JP9917187 U JP 9917187U JP H057240 Y2 JPH057240 Y2 JP H057240Y2
- Authority
- JP
- Japan
- Prior art keywords
- holder
- boat
- quartz
- reaction tube
- support rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010453 quartz Substances 0.000 claims description 38
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 38
- 239000012528 membrane Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 11
- 239000010408 film Substances 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 4
- 239000010409 thin film Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987099171U JPH057240Y2 (US20100223739A1-20100909-C00005.png) | 1987-06-26 | 1987-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987099171U JPH057240Y2 (US20100223739A1-20100909-C00005.png) | 1987-06-26 | 1987-06-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS647263U JPS647263U (US20100223739A1-20100909-C00005.png) | 1989-01-17 |
| JPH057240Y2 true JPH057240Y2 (US20100223739A1-20100909-C00005.png) | 1993-02-24 |
Family
ID=31326079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987099171U Expired - Lifetime JPH057240Y2 (US20100223739A1-20100909-C00005.png) | 1987-06-26 | 1987-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057240Y2 (US20100223739A1-20100909-C00005.png) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60107843A (ja) * | 1983-11-16 | 1985-06-13 | Tekunisuko:Kk | 組立式支持具 |
| JPS61247048A (ja) * | 1985-04-24 | 1986-11-04 | Nec Corp | 縦型拡散炉用ボ−ト |
| JPS6299476A (ja) * | 1985-10-28 | 1987-05-08 | Agency Of Ind Science & Technol | プラズマｃｖｄ装置の放電電極 |
-
1987
- 1987-06-26 JP JP1987099171U patent/JPH057240Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60107843A (ja) * | 1983-11-16 | 1985-06-13 | Tekunisuko:Kk | 組立式支持具 |
| JPS61247048A (ja) * | 1985-04-24 | 1986-11-04 | Nec Corp | 縦型拡散炉用ボ−ト |
| JPS6299476A (ja) * | 1985-10-28 | 1987-05-08 | Agency Of Ind Science & Technol | プラズマｃｖｄ装置の放電電極 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS647263U (US20100223739A1-20100909-C00005.png) | 1989-01-17 |
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