JPH057238Y2 - - Google Patents
Info
- Publication number
- JPH057238Y2 JPH057238Y2 JP1987060742U JP6074287U JPH057238Y2 JP H057238 Y2 JPH057238 Y2 JP H057238Y2 JP 1987060742 U JP1987060742 U JP 1987060742U JP 6074287 U JP6074287 U JP 6074287U JP H057238 Y2 JPH057238 Y2 JP H057238Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- bias voltage
- constant
- processed
- evaporated particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 35
- 238000007733 ion plating Methods 0.000 claims description 12
- 239000002245 particle Substances 0.000 description 21
- 239000000463 material Substances 0.000 description 6
- 230000001133 acceleration Effects 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- FFRBMBIXVSCUFS-UHFFFAOYSA-N 2,4-dinitro-1-naphthol Chemical compound C1=CC=C2C(O)=C([N+]([O-])=O)C=C([N+]([O-])=O)C2=C1 FFRBMBIXVSCUFS-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987060742U JPH057238Y2 (es) | 1987-04-23 | 1987-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987060742U JPH057238Y2 (es) | 1987-04-23 | 1987-04-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63170458U JPS63170458U (es) | 1988-11-07 |
| JPH057238Y2 true JPH057238Y2 (es) | 1993-02-24 |
Family
ID=30893430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987060742U Expired - Lifetime JPH057238Y2 (es) | 1987-04-23 | 1987-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057238Y2 (es) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59190359A (ja) * | 1983-01-19 | 1984-10-29 | マルチ−ア−ク・バキユ−ム・システムズ・インコ−ポレ−テツド | 真空蒸着装置の基体保持装置 |
| JPS6210266A (ja) * | 1985-07-06 | 1987-01-19 | Kobe Steel Ltd | 蒸着装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5270149U (es) * | 1975-11-21 | 1977-05-25 | ||
| JPS5969964U (ja) * | 1982-10-28 | 1984-05-12 | 日本電子株式会社 | 成膜装置 |
| JPS5995157U (ja) * | 1982-12-20 | 1984-06-28 | 株式会社日立製作所 | イオンプレ−テイング装置 |
-
1987
- 1987-04-23 JP JP1987060742U patent/JPH057238Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59190359A (ja) * | 1983-01-19 | 1984-10-29 | マルチ−ア−ク・バキユ−ム・システムズ・インコ−ポレ−テツド | 真空蒸着装置の基体保持装置 |
| JPS6210266A (ja) * | 1985-07-06 | 1987-01-19 | Kobe Steel Ltd | 蒸着装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63170458U (es) | 1988-11-07 |
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