JPH057238Y2 - - Google Patents

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Publication number
JPH057238Y2
JPH057238Y2 JP1987060742U JP6074287U JPH057238Y2 JP H057238 Y2 JPH057238 Y2 JP H057238Y2 JP 1987060742 U JP1987060742 U JP 1987060742U JP 6074287 U JP6074287 U JP 6074287U JP H057238 Y2 JPH057238 Y2 JP H057238Y2
Authority
JP
Japan
Prior art keywords
substrate
bias voltage
constant
processed
evaporated particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987060742U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63170458U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987060742U priority Critical patent/JPH057238Y2/ja
Publication of JPS63170458U publication Critical patent/JPS63170458U/ja
Application granted granted Critical
Publication of JPH057238Y2 publication Critical patent/JPH057238Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
JP1987060742U 1987-04-23 1987-04-23 Expired - Lifetime JPH057238Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987060742U JPH057238Y2 (OSRAM) 1987-04-23 1987-04-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987060742U JPH057238Y2 (OSRAM) 1987-04-23 1987-04-23

Publications (2)

Publication Number Publication Date
JPS63170458U JPS63170458U (OSRAM) 1988-11-07
JPH057238Y2 true JPH057238Y2 (OSRAM) 1993-02-24

Family

ID=30893430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987060742U Expired - Lifetime JPH057238Y2 (OSRAM) 1987-04-23 1987-04-23

Country Status (1)

Country Link
JP (1) JPH057238Y2 (OSRAM)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5270149U (OSRAM) * 1975-11-21 1977-05-25
JPS5969964U (ja) * 1982-10-28 1984-05-12 日本電子株式会社 成膜装置
JPS5995157U (ja) * 1982-12-20 1984-06-28 株式会社日立製作所 イオンプレ−テイング装置
US4485759A (en) * 1983-01-19 1984-12-04 Multi-Arc Vacuum Systems Inc. Planetary substrate support apparatus for vapor vacuum deposition coating
JPS6210266A (ja) * 1985-07-06 1987-01-19 Kobe Steel Ltd 蒸着装置

Also Published As

Publication number Publication date
JPS63170458U (OSRAM) 1988-11-07

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