JPH0570156B2 - - Google Patents
Info
- Publication number
- JPH0570156B2 JPH0570156B2 JP59173849A JP17384984A JPH0570156B2 JP H0570156 B2 JPH0570156 B2 JP H0570156B2 JP 59173849 A JP59173849 A JP 59173849A JP 17384984 A JP17384984 A JP 17384984A JP H0570156 B2 JPH0570156 B2 JP H0570156B2
- Authority
- JP
- Japan
- Prior art keywords
- drain electrode
- electrode
- thin film
- semiconductor thin
- pixel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 claims description 25
- 239000010409 thin film Substances 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 9
- 239000011159 matrix material Substances 0.000 claims description 8
- 229910021417 amorphous silicon Inorganic materials 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910001188 F alloy Inorganic materials 0.000 description 1
- 229910000878 H alloy Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59173849A JPS6151188A (ja) | 1984-08-21 | 1984-08-21 | アクテイブ・マトリクス表示装置用基板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59173849A JPS6151188A (ja) | 1984-08-21 | 1984-08-21 | アクテイブ・マトリクス表示装置用基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6151188A JPS6151188A (ja) | 1986-03-13 |
| JPH0570156B2 true JPH0570156B2 (xx) | 1993-10-04 |
Family
ID=15968292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59173849A Granted JPS6151188A (ja) | 1984-08-21 | 1984-08-21 | アクテイブ・マトリクス表示装置用基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6151188A (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8222098B2 (en) | 2005-10-14 | 2012-07-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having first and second source and drain electrodes sandwiched between an island-shaped semiconductor film |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63216091A (ja) * | 1987-03-04 | 1988-09-08 | 三菱電機株式会社 | マトリクス型表示装置 |
| JPH01219825A (ja) * | 1988-02-29 | 1989-09-01 | Seikosha Co Ltd | 非晶質シリコン薄膜トランジスタ |
| JP2550692B2 (ja) * | 1989-02-11 | 1996-11-06 | 日本電気株式会社 | 薄膜トランジスタアレイの製造方法 |
| JPH07113729B2 (ja) * | 1989-08-25 | 1995-12-06 | 日本電気株式会社 | 薄膜トランジスタ |
| JP3104356B2 (ja) * | 1991-12-13 | 2000-10-30 | カシオ計算機株式会社 | 薄膜トランジスタパネルおよびその製造方法 |
| JP5427340B2 (ja) * | 2005-10-14 | 2014-02-26 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| US20100224880A1 (en) * | 2009-03-05 | 2010-09-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| JP6103854B2 (ja) * | 2012-08-10 | 2017-03-29 | 三菱電機株式会社 | 薄膜トランジスタ基板 |
| CN105161544A (zh) * | 2015-10-16 | 2015-12-16 | 深圳市华星光电技术有限公司 | 薄膜场效应晶体管及其制作方法、液晶显示器 |
-
1984
- 1984-08-21 JP JP59173849A patent/JPS6151188A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8222098B2 (en) | 2005-10-14 | 2012-07-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having first and second source and drain electrodes sandwiched between an island-shaped semiconductor film |
| US9312393B2 (en) | 2005-10-14 | 2016-04-12 | Semiconductor Energy Laboratory Co., Ltd. | Transistor having tapered gate electrode |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6151188A (ja) | 1986-03-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |