JPH0569188B2 - - Google Patents
Info
- Publication number
- JPH0569188B2 JPH0569188B2 JP11277785A JP11277785A JPH0569188B2 JP H0569188 B2 JPH0569188 B2 JP H0569188B2 JP 11277785 A JP11277785 A JP 11277785A JP 11277785 A JP11277785 A JP 11277785A JP H0569188 B2 JPH0569188 B2 JP H0569188B2
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- measured
- prober
- contact
- probe card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 27
- 239000000523 sample Substances 0.000 claims description 25
- 230000001681 protective effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229910000906 Bronze Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Electronic Switches (AREA)
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11277785A JPS61270672A (ja) | 1985-05-24 | 1985-05-24 | プロ−バ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11277785A JPS61270672A (ja) | 1985-05-24 | 1985-05-24 | プロ−バ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61270672A JPS61270672A (ja) | 1986-11-29 |
| JPH0569188B2 true JPH0569188B2 (de) | 1993-09-30 |
Family
ID=14595236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11277785A Granted JPS61270672A (ja) | 1985-05-24 | 1985-05-24 | プロ−バ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61270672A (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160057145A (ko) * | 2014-11-13 | 2016-05-23 | 충북대학교 산학협력단 | 국제 표준 농기계 제어규격과 호환을 위한 입력 신호 변환 장치 및 방법 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH078212Y2 (ja) * | 1987-05-15 | 1995-03-01 | 沖電気工業株式会社 | Ｌｅｄアレイプリントヘツド |
-
1985
- 1985-05-24 JP JP11277785A patent/JPS61270672A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160057145A (ko) * | 2014-11-13 | 2016-05-23 | 충북대학교 산학협력단 | 국제 표준 농기계 제어규격과 호환을 위한 입력 신호 변환 장치 및 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61270672A (ja) | 1986-11-29 |
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