JPH0566978B2 - - Google Patents

Info

Publication number
JPH0566978B2
JPH0566978B2 JP60221351A JP22135185A JPH0566978B2 JP H0566978 B2 JPH0566978 B2 JP H0566978B2 JP 60221351 A JP60221351 A JP 60221351A JP 22135185 A JP22135185 A JP 22135185A JP H0566978 B2 JPH0566978 B2 JP H0566978B2
Authority
JP
Japan
Prior art keywords
pressure
silicon
based insulating
layer
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60221351A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6281539A (ja
Inventor
Kyoichi Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP22135185A priority Critical patent/JPS6281539A/ja
Publication of JPS6281539A publication Critical patent/JPS6281539A/ja
Publication of JPH0566978B2 publication Critical patent/JPH0566978B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP22135185A 1985-10-04 1985-10-04 圧力測定装置の製造方法 Granted JPS6281539A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22135185A JPS6281539A (ja) 1985-10-04 1985-10-04 圧力測定装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22135185A JPS6281539A (ja) 1985-10-04 1985-10-04 圧力測定装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6281539A JPS6281539A (ja) 1987-04-15
JPH0566978B2 true JPH0566978B2 (enrdf_load_stackoverflow) 1993-09-22

Family

ID=16765437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22135185A Granted JPS6281539A (ja) 1985-10-04 1985-10-04 圧力測定装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6281539A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014033099A (ja) * 2012-08-03 2014-02-20 Azbil Corp シリコンチューブの製造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6421330A (en) * 1987-07-16 1989-01-24 Teijin Ltd Pressure detector
JP4882369B2 (ja) * 2005-12-27 2012-02-22 横浜ゴム株式会社 空気圧検知システム
DE102013102206B4 (de) * 2013-03-06 2016-04-07 Epcos Ag Bauelement mit gestapelten funktionalen Strukturen und Verfahren zur Herstellung

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3008572C2 (de) * 1980-03-06 1982-05-27 Robert Bosch Gmbh, 7000 Stuttgart Druckmeßdose

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014033099A (ja) * 2012-08-03 2014-02-20 Azbil Corp シリコンチューブの製造方法

Also Published As

Publication number Publication date
JPS6281539A (ja) 1987-04-15

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