JPH056643B2 - - Google Patents

Info

Publication number
JPH056643B2
JPH056643B2 JP59024484A JP2448484A JPH056643B2 JP H056643 B2 JPH056643 B2 JP H056643B2 JP 59024484 A JP59024484 A JP 59024484A JP 2448484 A JP2448484 A JP 2448484A JP H056643 B2 JPH056643 B2 JP H056643B2
Authority
JP
Japan
Prior art keywords
light
light beam
photodetector
measurement surface
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59024484A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60169706A (ja
Inventor
Masahiro Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP2448484A priority Critical patent/JPS60169706A/ja
Publication of JPS60169706A publication Critical patent/JPS60169706A/ja
Publication of JPH056643B2 publication Critical patent/JPH056643B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Automatic Focus Adjustment (AREA)
JP2448484A 1984-02-14 1984-02-14 表面形状測定装置 Granted JPS60169706A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2448484A JPS60169706A (ja) 1984-02-14 1984-02-14 表面形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2448484A JPS60169706A (ja) 1984-02-14 1984-02-14 表面形状測定装置

Publications (2)

Publication Number Publication Date
JPS60169706A JPS60169706A (ja) 1985-09-03
JPH056643B2 true JPH056643B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-27

Family

ID=12139456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2448484A Granted JPS60169706A (ja) 1984-02-14 1984-02-14 表面形状測定装置

Country Status (1)

Country Link
JP (1) JPS60169706A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0690359B2 (ja) * 1985-09-11 1994-11-14 日本電気株式会社 ターゲットアライメント装置
JPS62172208A (ja) * 1986-01-27 1987-07-29 Osaka Seimitsu Kikai Kk 光学的形状測定方法
JPS63250552A (ja) * 1987-04-08 1988-10-18 Yasunaga Tekkosho:Kk 光学式傷変位計測装置
DE8705296U1 (de) * 1987-04-09 1988-08-04 Heimann Gmbh, 6200 Wiesbaden Infrarotdetektor
JP5670664B2 (ja) * 2010-07-12 2015-02-18 Dmg森精機株式会社 変位検出装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56156937A (en) * 1980-04-30 1981-12-03 Matsushita Electric Ind Co Ltd Optical pickup device
JPS57105831A (en) * 1980-12-19 1982-07-01 Matsushita Electric Ind Co Ltd Detector for optical position
JPS57208642A (en) * 1981-06-18 1982-12-21 Toshiba Corp Focus controller
JPS5848235A (ja) * 1981-09-17 1983-03-22 Toshiba Corp 光学ヘツド
JPS58105832A (ja) * 1981-12-15 1983-06-23 Tachikawa Spring Co Ltd 車両用シ−トの組付構造
JPS58193334U (ja) * 1982-06-19 1983-12-22 赤井電機株式会社 光ピツクアツプ
JPS5979104A (ja) * 1982-10-27 1984-05-08 Matsushita Electric Ind Co Ltd 光学装置

Also Published As

Publication number Publication date
JPS60169706A (ja) 1985-09-03

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