JPH0565043B2 - - Google Patents

Info

Publication number
JPH0565043B2
JPH0565043B2 JP61229130A JP22913086A JPH0565043B2 JP H0565043 B2 JPH0565043 B2 JP H0565043B2 JP 61229130 A JP61229130 A JP 61229130A JP 22913086 A JP22913086 A JP 22913086A JP H0565043 B2 JPH0565043 B2 JP H0565043B2
Authority
JP
Japan
Prior art keywords
film
substrate
perpendicularly magnetized
sputtering
magnetized film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61229130A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6384005A (ja
Inventor
Shinji Yamashita
Mitsuaki Ikeda
Kenji Hara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP22913086A priority Critical patent/JPS6384005A/ja
Publication of JPS6384005A publication Critical patent/JPS6384005A/ja
Publication of JPH0565043B2 publication Critical patent/JPH0565043B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP22913086A 1986-09-26 1986-09-26 垂直磁化膜の形成方法 Granted JPS6384005A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22913086A JPS6384005A (ja) 1986-09-26 1986-09-26 垂直磁化膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22913086A JPS6384005A (ja) 1986-09-26 1986-09-26 垂直磁化膜の形成方法

Publications (2)

Publication Number Publication Date
JPS6384005A JPS6384005A (ja) 1988-04-14
JPH0565043B2 true JPH0565043B2 (enExample) 1993-09-16

Family

ID=16887221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22913086A Granted JPS6384005A (ja) 1986-09-26 1986-09-26 垂直磁化膜の形成方法

Country Status (1)

Country Link
JP (1) JPS6384005A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2629505B2 (ja) * 1991-11-14 1997-07-09 日本ビクター株式会社 垂直磁気記録媒体及びその製造方法
JP5769059B2 (ja) * 2011-03-30 2015-08-26 日立金属株式会社 永久磁石薄膜用スパッタリングターゲット及びその製造方法
JPWO2014038022A1 (ja) * 2012-09-05 2016-08-08 株式会社日立製作所 Ｎｄ−Ｆｅ−Ｂ薄膜磁石およびその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60128606A (ja) * 1983-12-15 1985-07-09 Seiko Instr & Electronics Ltd 光磁気記録媒体

Also Published As

Publication number Publication date
JPS6384005A (ja) 1988-04-14

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