JPH0565020B2 - - Google Patents

Info

Publication number
JPH0565020B2
JPH0565020B2 JP61180956A JP18095686A JPH0565020B2 JP H0565020 B2 JPH0565020 B2 JP H0565020B2 JP 61180956 A JP61180956 A JP 61180956A JP 18095686 A JP18095686 A JP 18095686A JP H0565020 B2 JPH0565020 B2 JP H0565020B2
Authority
JP
Japan
Prior art keywords
laser beam
axis
light
liquid
ellipse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61180956A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6337235A (ja
Inventor
Hozumi Yamamoto
Kazuya Tsukada
Yukio Kawakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP61180956A priority Critical patent/JPS6337235A/ja
Publication of JPS6337235A publication Critical patent/JPS6337235A/ja
Publication of JPH0565020B2 publication Critical patent/JPH0565020B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
JP61180956A 1986-07-31 1986-07-31 液中の微粒子検出装置 Granted JPS6337235A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61180956A JPS6337235A (ja) 1986-07-31 1986-07-31 液中の微粒子検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61180956A JPS6337235A (ja) 1986-07-31 1986-07-31 液中の微粒子検出装置

Publications (2)

Publication Number Publication Date
JPS6337235A JPS6337235A (ja) 1988-02-17
JPH0565020B2 true JPH0565020B2 (en, 2012) 1993-09-16

Family

ID=16092213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61180956A Granted JPS6337235A (ja) 1986-07-31 1986-07-31 液中の微粒子検出装置

Country Status (1)

Country Link
JP (1) JPS6337235A (en, 2012)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5509375A (en) * 1992-06-22 1996-04-23 Vlsi Technology, Inc. Apparatus and method for detecting contaminants carried by a fluid
CN1287140C (zh) 2000-09-25 2006-11-29 松下电器产业株式会社 色层分析定量测量装置
JP4797233B2 (ja) * 2000-09-25 2011-10-19 パナソニック株式会社 小型試料濃度測定装置
WO2009073649A1 (en) * 2007-12-04 2009-06-11 Particle Measuring Systems, Inc. Non-orthogonal particle detection systems and methods
WO2013161007A1 (ja) * 2012-04-24 2013-10-31 パイオニア株式会社 濃度算出装置及び方法
CN106053311B (zh) * 2016-08-16 2019-04-30 广东美的制冷设备有限公司 一种粉尘传感器

Also Published As

Publication number Publication date
JPS6337235A (ja) 1988-02-17

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees