JPH0564851B2 - - Google Patents
Info
- Publication number
- JPH0564851B2 JPH0564851B2 JP60293541A JP29354185A JPH0564851B2 JP H0564851 B2 JPH0564851 B2 JP H0564851B2 JP 60293541 A JP60293541 A JP 60293541A JP 29354185 A JP29354185 A JP 29354185A JP H0564851 B2 JPH0564851 B2 JP H0564851B2
- Authority
- JP
- Japan
- Prior art keywords
- buried layer
- type
- region
- pnp
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 13
- 230000003071 parasitic effect Effects 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 238000002955 isolation Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- 101150003852 pnp2 gene Proteins 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 101100299614 Homo sapiens PTPN13 gene Proteins 0.000 description 2
- 101100352663 Mus musculus Pnp gene Proteins 0.000 description 2
- 101150069896 PNP1 gene Proteins 0.000 description 2
- 102100033014 Tyrosine-protein phosphatase non-receptor type 13 Human genes 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 229910015844 BCl3 Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
Landscapes
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60293541A JPS62156866A (ja) | 1985-12-28 | 1985-12-28 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60293541A JPS62156866A (ja) | 1985-12-28 | 1985-12-28 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62156866A JPS62156866A (ja) | 1987-07-11 |
| JPH0564851B2 true JPH0564851B2 (fr) | 1993-09-16 |
Family
ID=17796079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60293541A Granted JPS62156866A (ja) | 1985-12-28 | 1985-12-28 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62156866A (fr) |
-
1985
- 1985-12-28 JP JP60293541A patent/JPS62156866A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62156866A (ja) | 1987-07-11 |
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