JPH0562816B2 - - Google Patents

Info

Publication number
JPH0562816B2
JPH0562816B2 JP18629085A JP18629085A JPH0562816B2 JP H0562816 B2 JPH0562816 B2 JP H0562816B2 JP 18629085 A JP18629085 A JP 18629085A JP 18629085 A JP18629085 A JP 18629085A JP H0562816 B2 JPH0562816 B2 JP H0562816B2
Authority
JP
Japan
Prior art keywords
etching
metal layer
wafer
end point
etched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP18629085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6246531A (ja
Inventor
Masato Moriwake
Yasuhisa Oomachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP18629085A priority Critical patent/JPS6246531A/ja
Publication of JPS6246531A publication Critical patent/JPS6246531A/ja
Publication of JPH0562816B2 publication Critical patent/JPH0562816B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP18629085A 1985-08-23 1985-08-23 金属層のエツチング終点の検出方法 Granted JPS6246531A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18629085A JPS6246531A (ja) 1985-08-23 1985-08-23 金属層のエツチング終点の検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18629085A JPS6246531A (ja) 1985-08-23 1985-08-23 金属層のエツチング終点の検出方法

Publications (2)

Publication Number Publication Date
JPS6246531A JPS6246531A (ja) 1987-02-28
JPH0562816B2 true JPH0562816B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-09

Family

ID=16185722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18629085A Granted JPS6246531A (ja) 1985-08-23 1985-08-23 金属層のエツチング終点の検出方法

Country Status (1)

Country Link
JP (1) JPS6246531A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108292567B (zh) * 2015-11-30 2020-04-21 松下知识产权经营株式会社 电极箔的制造方法和电容器的制造方法

Also Published As

Publication number Publication date
JPS6246531A (ja) 1987-02-28

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