JPH0561784B2 - - Google Patents

Info

Publication number
JPH0561784B2
JPH0561784B2 JP62275416A JP27541687A JPH0561784B2 JP H0561784 B2 JPH0561784 B2 JP H0561784B2 JP 62275416 A JP62275416 A JP 62275416A JP 27541687 A JP27541687 A JP 27541687A JP H0561784 B2 JPH0561784 B2 JP H0561784B2
Authority
JP
Japan
Prior art keywords
superconducting wiring
wiring layer
channel
semiconductor device
superconducting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62275416A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01117361A (ja
Inventor
Hirosuke Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP62275416A priority Critical patent/JPH01117361A/ja
Publication of JPH01117361A publication Critical patent/JPH01117361A/ja
Publication of JPH0561784B2 publication Critical patent/JPH0561784B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Containers, Films, And Cooling For Superconductive Devices (AREA)
JP62275416A 1987-10-30 1987-10-30 半導体装置 Granted JPH01117361A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62275416A JPH01117361A (ja) 1987-10-30 1987-10-30 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62275416A JPH01117361A (ja) 1987-10-30 1987-10-30 半導体装置

Publications (2)

Publication Number Publication Date
JPH01117361A JPH01117361A (ja) 1989-05-10
JPH0561784B2 true JPH0561784B2 (enExample) 1993-09-07

Family

ID=17555199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62275416A Granted JPH01117361A (ja) 1987-10-30 1987-10-30 半導体装置

Country Status (1)

Country Link
JP (1) JPH01117361A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5626534B2 (ja) * 2011-09-30 2014-11-19 トヨタ自動車株式会社 半導体装置

Also Published As

Publication number Publication date
JPH01117361A (ja) 1989-05-10

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees