JPH0558649B2 - - Google Patents

Info

Publication number
JPH0558649B2
JPH0558649B2 JP62169245A JP16924587A JPH0558649B2 JP H0558649 B2 JPH0558649 B2 JP H0558649B2 JP 62169245 A JP62169245 A JP 62169245A JP 16924587 A JP16924587 A JP 16924587A JP H0558649 B2 JPH0558649 B2 JP H0558649B2
Authority
JP
Japan
Prior art keywords
resist
semiconductor substrate
developer
semiconductor device
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62169245A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6412528A (en
Inventor
Shigeki Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP62169245A priority Critical patent/JPS6412528A/ja
Publication of JPS6412528A publication Critical patent/JPS6412528A/ja
Publication of JPH0558649B2 publication Critical patent/JPH0558649B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP62169245A 1987-07-06 1987-07-06 Resist development device Granted JPS6412528A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62169245A JPS6412528A (en) 1987-07-06 1987-07-06 Resist development device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62169245A JPS6412528A (en) 1987-07-06 1987-07-06 Resist development device

Publications (2)

Publication Number Publication Date
JPS6412528A JPS6412528A (en) 1989-01-17
JPH0558649B2 true JPH0558649B2 (show.php) 1993-08-27

Family

ID=15882932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62169245A Granted JPS6412528A (en) 1987-07-06 1987-07-06 Resist development device

Country Status (1)

Country Link
JP (1) JPS6412528A (show.php)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2017719C (en) * 1990-05-29 1999-01-19 Zarlink Semiconductor Inc. Moisture-free sog process

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62142321A (ja) * 1985-12-17 1987-06-25 Matsushita Electronics Corp ウエハ−処理装置

Also Published As

Publication number Publication date
JPS6412528A (en) 1989-01-17

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