JPH0558571B2 - - Google Patents

Info

Publication number
JPH0558571B2
JPH0558571B2 JP61058627A JP5862786A JPH0558571B2 JP H0558571 B2 JPH0558571 B2 JP H0558571B2 JP 61058627 A JP61058627 A JP 61058627A JP 5862786 A JP5862786 A JP 5862786A JP H0558571 B2 JPH0558571 B2 JP H0558571B2
Authority
JP
Japan
Prior art keywords
wafer
extrusion
cassette
wafers
pushing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61058627A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62216243A (ja
Inventor
Tsutomu Mizumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP5862786A priority Critical patent/JPS62216243A/ja
Publication of JPS62216243A publication Critical patent/JPS62216243A/ja
Publication of JPH0558571B2 publication Critical patent/JPH0558571B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP5862786A 1986-03-17 1986-03-17 ウエ−ハ押し出し装置 Granted JPS62216243A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5862786A JPS62216243A (ja) 1986-03-17 1986-03-17 ウエ−ハ押し出し装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5862786A JPS62216243A (ja) 1986-03-17 1986-03-17 ウエ−ハ押し出し装置

Publications (2)

Publication Number Publication Date
JPS62216243A JPS62216243A (ja) 1987-09-22
JPH0558571B2 true JPH0558571B2 (OSRAM) 1993-08-26

Family

ID=13089816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5862786A Granted JPS62216243A (ja) 1986-03-17 1986-03-17 ウエ−ハ押し出し装置

Country Status (1)

Country Link
JP (1) JPS62216243A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4941800A (en) * 1988-10-21 1990-07-17 Tokyo Electron Limited Transfer apparatus for plate-like member
JPH03102534U (OSRAM) * 1990-02-06 1991-10-24
JP5655283B2 (ja) * 2009-06-30 2015-01-21 株式会社寺岡精工 商品供給装置
JP5992229B2 (ja) * 2012-06-29 2016-09-14 武蔵エンジニアリング株式会社 ワーク押出装置およびそれを備えるワーク供給装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6136943A (ja) * 1984-07-30 1986-02-21 Hitachi Ltd 試料搬送装置

Also Published As

Publication number Publication date
JPS62216243A (ja) 1987-09-22

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term