JPH0557556B2 - - Google Patents

Info

Publication number
JPH0557556B2
JPH0557556B2 JP62213377A JP21337787A JPH0557556B2 JP H0557556 B2 JPH0557556 B2 JP H0557556B2 JP 62213377 A JP62213377 A JP 62213377A JP 21337787 A JP21337787 A JP 21337787A JP H0557556 B2 JPH0557556 B2 JP H0557556B2
Authority
JP
Japan
Prior art keywords
mask
stage
fixed
tilting
hinge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62213377A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6454393A (en
Inventor
Joji Iwata
Hidekazu Kono
Ryoji Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP62213377A priority Critical patent/JPS6454393A/ja
Publication of JPS6454393A publication Critical patent/JPS6454393A/ja
Publication of JPH0557556B2 publication Critical patent/JPH0557556B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP62213377A 1987-08-26 1987-08-26 Flap stage Granted JPS6454393A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62213377A JPS6454393A (en) 1987-08-26 1987-08-26 Flap stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62213377A JPS6454393A (en) 1987-08-26 1987-08-26 Flap stage

Publications (2)

Publication Number Publication Date
JPS6454393A JPS6454393A (en) 1989-03-01
JPH0557556B2 true JPH0557556B2 (enrdf_load_stackoverflow) 1993-08-24

Family

ID=16638184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62213377A Granted JPS6454393A (en) 1987-08-26 1987-08-26 Flap stage

Country Status (1)

Country Link
JP (1) JPS6454393A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4679172B2 (ja) * 2005-02-23 2011-04-27 株式会社日立ハイテクノロジーズ 表示用パネル基板の露光装置、表示用パネル基板の露光方法、及び表示用パネル基板の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4528451A (en) * 1982-10-19 1985-07-09 Varian Associates, Inc. Gap control system for localized vacuum processing
JPS6069593A (ja) * 1983-09-26 1985-04-20 オムロン株式会社 微動ステ−ジ機構

Also Published As

Publication number Publication date
JPS6454393A (en) 1989-03-01

Similar Documents

Publication Publication Date Title
JP4384664B2 (ja) 試料検査および処理用の高精度動的位置合わせ機構
JP2868406B2 (ja) 磁気的に取り付けられた揺動要素を含む力検出システム
US6872958B2 (en) Platform positioning system
JP2974535B2 (ja) 位置決め装置
KR101129119B1 (ko) 광학 요소의 조작을 위한 장치
EP2201421B1 (en) Mems scanning micromirror with reduced dynamic deformation
JPH07218857A (ja) 変位検出機能を備えたプレーナー型ガルバノミラー及びその製造方法
KR102705224B1 (ko) 광의 빔들을 스캐닝하기 위한 디바이스 및 방법
JPH0744857B2 (ja) 圧電回転装置
JP2690510B2 (ja) あおりステージ
JP2002090282A (ja) 無限軌道並進回転ステージ
JPH0240594A (ja) あおりステージ
JPH0557556B2 (enrdf_load_stackoverflow)
JP2780817B2 (ja) 精密ステージ装置
JPH0557555B2 (enrdf_load_stackoverflow)
JPH0527034Y2 (enrdf_load_stackoverflow)
JPH06795Y2 (ja) 微動回転ステージ
JPH07128467A (ja) 微動駆動担体
JP4606956B2 (ja) ステージ装置
JP2002328317A (ja) 光偏向器
JPH11356065A (ja) マイクロアクチュエ―タ
KR102778682B1 (ko) 광학 스캐닝 장치
KR100430493B1 (ko) 3차원으로위치설정가능한마스크홀더를가진리소그래피장치
JP2677294B2 (ja) 圧電アクチュエータおよびそれを用いたステージ装置
JPH0543439Y2 (enrdf_load_stackoverflow)