JPS6454393A - Flap stage - Google Patents

Flap stage

Info

Publication number
JPS6454393A
JPS6454393A JP62213377A JP21337787A JPS6454393A JP S6454393 A JPS6454393 A JP S6454393A JP 62213377 A JP62213377 A JP 62213377A JP 21337787 A JP21337787 A JP 21337787A JP S6454393 A JPS6454393 A JP S6454393A
Authority
JP
Japan
Prior art keywords
sections
cantilevers
swinging
displacement
hinges
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62213377A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0557556B2 (enrdf_load_stackoverflow
Inventor
Joji Iwata
Hidekazu Kono
Ryoji Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62213377A priority Critical patent/JPS6454393A/ja
Publication of JPS6454393A publication Critical patent/JPS6454393A/ja
Publication of JPH0557556B2 publication Critical patent/JPH0557556B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP62213377A 1987-08-26 1987-08-26 Flap stage Granted JPS6454393A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62213377A JPS6454393A (en) 1987-08-26 1987-08-26 Flap stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62213377A JPS6454393A (en) 1987-08-26 1987-08-26 Flap stage

Publications (2)

Publication Number Publication Date
JPS6454393A true JPS6454393A (en) 1989-03-01
JPH0557556B2 JPH0557556B2 (enrdf_load_stackoverflow) 1993-08-24

Family

ID=16638184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62213377A Granted JPS6454393A (en) 1987-08-26 1987-08-26 Flap stage

Country Status (1)

Country Link
JP (1) JPS6454393A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006235019A (ja) * 2005-02-23 2006-09-07 Hitachi High-Technologies Corp 露光装置、露光方法、及び表示用パネル基板の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993249A (ja) * 1982-10-19 1984-05-29 バリアン・アソシエイツ・インコ−ポレイテツド 局部的真空処理のための間隙制御装置
JPS6069593A (ja) * 1983-09-26 1985-04-20 オムロン株式会社 微動ステ−ジ機構

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993249A (ja) * 1982-10-19 1984-05-29 バリアン・アソシエイツ・インコ−ポレイテツド 局部的真空処理のための間隙制御装置
JPS6069593A (ja) * 1983-09-26 1985-04-20 オムロン株式会社 微動ステ−ジ機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006235019A (ja) * 2005-02-23 2006-09-07 Hitachi High-Technologies Corp 露光装置、露光方法、及び表示用パネル基板の製造方法

Also Published As

Publication number Publication date
JPH0557556B2 (enrdf_load_stackoverflow) 1993-08-24

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