JPS6454392A - Flap stage - Google Patents
Flap stageInfo
- Publication number
- JPS6454392A JPS6454392A JP62213376A JP21337687A JPS6454392A JP S6454392 A JPS6454392 A JP S6454392A JP 62213376 A JP62213376 A JP 62213376A JP 21337687 A JP21337687 A JP 21337687A JP S6454392 A JPS6454392 A JP S6454392A
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- swinging
- plate
- hinges
- hinge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To provide a swinging stage which has no joint section, is formed with high dimensional accuracy, and has high resolution and high accuracy by providing integrally formed three four-node links instead of a hollow disk or columnar elastic springs for supporting a swinging plate. CONSTITUTION: A swinging stage is provided with three four-node links 6 each of which has four. hinges 2, 3, 4, and 5 and a base 1 as a fixed section, a piezoelectric element 8 fixed to the fourth hinge 5 and base 1 on both sides, and a swinging plate 13 which is fixed to an output section 10 held between the second and third hinges 3 and 4 through a fifth hinge 12. When a voltage is applied across the element 8, straight forward displacement (s) causes a fine displacement link mechanism constituted of the link of the hinges 2, 3, 4, and 5, intermediate sections 9 and 11, and the output section 10 to generate the displacement (t) of the output sections 10 and the displacement (t) is transmitted to the plate 13 as swinging displacement through a hinge 12. Therefore, the fine displacement of the element 8 can be transmitted stably to the plate 13 without slipping nor backlash.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62213376A JPS6454392A (en) | 1987-08-26 | 1987-08-26 | Flap stage |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62213376A JPS6454392A (en) | 1987-08-26 | 1987-08-26 | Flap stage |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6454392A true JPS6454392A (en) | 1989-03-01 |
JPH0557555B2 JPH0557555B2 (en) | 1993-08-24 |
Family
ID=16638166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62213376A Granted JPS6454392A (en) | 1987-08-26 | 1987-08-26 | Flap stage |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6454392A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008504579A (en) * | 2004-06-29 | 2008-02-14 | カール・ツァイス・エスエムティー・アーゲー | Positioning unit and adjusting device for optical elements |
WO2012115002A1 (en) * | 2011-02-22 | 2012-08-30 | 株式会社ニコン | Holding device, exposure device and production method for device |
KR20170129900A (en) | 2015-06-15 | 2017-11-27 | 가부시키가이샤 데라오카 세이사쿠쇼 | Pressure-sensitive adhesive composition and pressure-sensitive adhesive tape |
-
1987
- 1987-08-26 JP JP62213376A patent/JPS6454392A/en active Granted
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8493674B2 (en) | 2004-06-29 | 2013-07-23 | Carl Zeiss Smt Gmbh | Positioning unit and alignment device for an optical element |
US10133021B2 (en) | 2004-06-29 | 2018-11-20 | Carl Zeiss Smt Gmbh | Positioning unit and apparatus for adjustment of an optical element |
JP2010183097A (en) * | 2004-06-29 | 2010-08-19 | Carl Zeiss Smt Ag | Positioning unit for optical element |
US8035903B2 (en) | 2004-06-29 | 2011-10-11 | Carl Zeiss Smt Gmbh | Positioning unit and alignment device for an optical element |
US8760777B2 (en) | 2004-06-29 | 2014-06-24 | Carl Zeiss Smt Gmbh | Positioning unit and apparatus for adjustment of an optical element |
US8416515B2 (en) | 2004-06-29 | 2013-04-09 | Carl Zeiss Smt Gmbh | Positioning unit and alignment device for an optical element |
US7738193B2 (en) | 2004-06-29 | 2010-06-15 | Carl Zeiss Smt Ag | Positioning unit and alignment device for an optical element |
JP2008504579A (en) * | 2004-06-29 | 2008-02-14 | カール・ツァイス・エスエムティー・アーゲー | Positioning unit and adjusting device for optical elements |
WO2012115002A1 (en) * | 2011-02-22 | 2012-08-30 | 株式会社ニコン | Holding device, exposure device and production method for device |
JP2017010061A (en) * | 2011-02-22 | 2017-01-12 | 株式会社ニコン | Holding apparatus, exposure apparatus, and method for manufacturing device |
JPWO2012115002A1 (en) * | 2011-02-22 | 2014-07-07 | 株式会社ニコン | Holding apparatus, exposure apparatus, and device manufacturing method |
US9746787B2 (en) | 2011-02-22 | 2017-08-29 | Nikon Corporation | Holding apparatus, exposure apparatus and manufacturing method of device |
US10416573B2 (en) | 2011-02-22 | 2019-09-17 | Nikon Corporation | Holding apparatus, exposure apparatus and manufacturing method of device |
KR20170129900A (en) | 2015-06-15 | 2017-11-27 | 가부시키가이샤 데라오카 세이사쿠쇼 | Pressure-sensitive adhesive composition and pressure-sensitive adhesive tape |
Also Published As
Publication number | Publication date |
---|---|
JPH0557555B2 (en) | 1993-08-24 |
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