JPS6454392A - Flap stage - Google Patents

Flap stage

Info

Publication number
JPS6454392A
JPS6454392A JP62213376A JP21337687A JPS6454392A JP S6454392 A JPS6454392 A JP S6454392A JP 62213376 A JP62213376 A JP 62213376A JP 21337687 A JP21337687 A JP 21337687A JP S6454392 A JPS6454392 A JP S6454392A
Authority
JP
Japan
Prior art keywords
displacement
swinging
plate
hinges
hinge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62213376A
Other languages
Japanese (ja)
Other versions
JPH0557555B2 (en
Inventor
Joji Iwata
Ryoji Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62213376A priority Critical patent/JPS6454392A/en
Publication of JPS6454392A publication Critical patent/JPS6454392A/en
Publication of JPH0557555B2 publication Critical patent/JPH0557555B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To provide a swinging stage which has no joint section, is formed with high dimensional accuracy, and has high resolution and high accuracy by providing integrally formed three four-node links instead of a hollow disk or columnar elastic springs for supporting a swinging plate. CONSTITUTION: A swinging stage is provided with three four-node links 6 each of which has four. hinges 2, 3, 4, and 5 and a base 1 as a fixed section, a piezoelectric element 8 fixed to the fourth hinge 5 and base 1 on both sides, and a swinging plate 13 which is fixed to an output section 10 held between the second and third hinges 3 and 4 through a fifth hinge 12. When a voltage is applied across the element 8, straight forward displacement (s) causes a fine displacement link mechanism constituted of the link of the hinges 2, 3, 4, and 5, intermediate sections 9 and 11, and the output section 10 to generate the displacement (t) of the output sections 10 and the displacement (t) is transmitted to the plate 13 as swinging displacement through a hinge 12. Therefore, the fine displacement of the element 8 can be transmitted stably to the plate 13 without slipping nor backlash.
JP62213376A 1987-08-26 1987-08-26 Flap stage Granted JPS6454392A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62213376A JPS6454392A (en) 1987-08-26 1987-08-26 Flap stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62213376A JPS6454392A (en) 1987-08-26 1987-08-26 Flap stage

Publications (2)

Publication Number Publication Date
JPS6454392A true JPS6454392A (en) 1989-03-01
JPH0557555B2 JPH0557555B2 (en) 1993-08-24

Family

ID=16638166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62213376A Granted JPS6454392A (en) 1987-08-26 1987-08-26 Flap stage

Country Status (1)

Country Link
JP (1) JPS6454392A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008504579A (en) * 2004-06-29 2008-02-14 カール・ツァイス・エスエムティー・アーゲー Positioning unit and adjusting device for optical elements
WO2012115002A1 (en) * 2011-02-22 2012-08-30 株式会社ニコン Holding device, exposure device and production method for device
KR20170129900A (en) 2015-06-15 2017-11-27 가부시키가이샤 데라오카 세이사쿠쇼 Pressure-sensitive adhesive composition and pressure-sensitive adhesive tape

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8493674B2 (en) 2004-06-29 2013-07-23 Carl Zeiss Smt Gmbh Positioning unit and alignment device for an optical element
US10133021B2 (en) 2004-06-29 2018-11-20 Carl Zeiss Smt Gmbh Positioning unit and apparatus for adjustment of an optical element
JP2010183097A (en) * 2004-06-29 2010-08-19 Carl Zeiss Smt Ag Positioning unit for optical element
US8035903B2 (en) 2004-06-29 2011-10-11 Carl Zeiss Smt Gmbh Positioning unit and alignment device for an optical element
US8760777B2 (en) 2004-06-29 2014-06-24 Carl Zeiss Smt Gmbh Positioning unit and apparatus for adjustment of an optical element
US8416515B2 (en) 2004-06-29 2013-04-09 Carl Zeiss Smt Gmbh Positioning unit and alignment device for an optical element
US7738193B2 (en) 2004-06-29 2010-06-15 Carl Zeiss Smt Ag Positioning unit and alignment device for an optical element
JP2008504579A (en) * 2004-06-29 2008-02-14 カール・ツァイス・エスエムティー・アーゲー Positioning unit and adjusting device for optical elements
WO2012115002A1 (en) * 2011-02-22 2012-08-30 株式会社ニコン Holding device, exposure device and production method for device
JP2017010061A (en) * 2011-02-22 2017-01-12 株式会社ニコン Holding apparatus, exposure apparatus, and method for manufacturing device
JPWO2012115002A1 (en) * 2011-02-22 2014-07-07 株式会社ニコン Holding apparatus, exposure apparatus, and device manufacturing method
US9746787B2 (en) 2011-02-22 2017-08-29 Nikon Corporation Holding apparatus, exposure apparatus and manufacturing method of device
US10416573B2 (en) 2011-02-22 2019-09-17 Nikon Corporation Holding apparatus, exposure apparatus and manufacturing method of device
KR20170129900A (en) 2015-06-15 2017-11-27 가부시키가이샤 데라오카 세이사쿠쇼 Pressure-sensitive adhesive composition and pressure-sensitive adhesive tape

Also Published As

Publication number Publication date
JPH0557555B2 (en) 1993-08-24

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