JPS6454393A - Flap stage - Google Patents

Flap stage

Info

Publication number
JPS6454393A
JPS6454393A JP62213377A JP21337787A JPS6454393A JP S6454393 A JPS6454393 A JP S6454393A JP 62213377 A JP62213377 A JP 62213377A JP 21337787 A JP21337787 A JP 21337787A JP S6454393 A JPS6454393 A JP S6454393A
Authority
JP
Japan
Prior art keywords
sections
cantilevers
swinging
displacement
hinges
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62213377A
Other languages
Japanese (ja)
Other versions
JPH0557556B2 (en
Inventor
Joji Iwata
Hidekazu Kono
Ryoji Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62213377A priority Critical patent/JPS6454393A/en
Publication of JPS6454393A publication Critical patent/JPS6454393A/en
Publication of JPH0557556B2 publication Critical patent/JPH0557556B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To obtain swinging displacement with high resolution and high accuracy by providing radially arranged cantilevers and fixing a swinging plate to the front end sections of the cantilevers and a piezoelectric element to a supporting section, and then, fixing the element to the cantilevers by means of connecting sections. CONSTITUTION: A swinging stage is composed of supporting sections formed of hinges 1 and 2, intermediate sections 4, cantilevers 6 having the intermediate sections 4 and front end sections 5, a swinging plate 7 fixed to the front end sections 5 of the cantilevers 6, piezoelectric elements 8 fixed to the supporting sections 3 of the cantilevers 6, and connecting sections 10 which is fitted to the mobile sections of the elements 8 and fixed to the intermediate sections 4 of the cantilevers 6 through hinges 9. When a voltage is applied across the element 8, linear forward displacement (s) is generated and converted into angular displacement (t) around the hinge 1 by means of a link mechanism constituted of the supporting sections 3, hinges 1, intermediate sections 4, and the hinges 9 of the sections 10. The intermediate sections 4 transmit the displacement (t) to the front end sections 5 through the hinges 2 and make the plate 7 to generate swinging displacement. Since the swinging stage does not contain any joint section, the stage can be formed with high dimensional accuracy and swinging displacement can be obtained with high resolution and high accuracy.
JP62213377A 1987-08-26 1987-08-26 Flap stage Granted JPS6454393A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62213377A JPS6454393A (en) 1987-08-26 1987-08-26 Flap stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62213377A JPS6454393A (en) 1987-08-26 1987-08-26 Flap stage

Publications (2)

Publication Number Publication Date
JPS6454393A true JPS6454393A (en) 1989-03-01
JPH0557556B2 JPH0557556B2 (en) 1993-08-24

Family

ID=16638184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62213377A Granted JPS6454393A (en) 1987-08-26 1987-08-26 Flap stage

Country Status (1)

Country Link
JP (1) JPS6454393A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006235019A (en) * 2005-02-23 2006-09-07 Hitachi High-Technologies Corp Exposure device, exposure method, and manufacturing method of panel substrate for display

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993249A (en) * 1982-10-19 1984-05-29 バリアン・アソシエイツ・インコ−ポレイテツド Clearance controller for partial vacuum treatment
JPS6069593A (en) * 1983-09-26 1985-04-20 オムロン株式会社 Minutely movable stage mechanism

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993249A (en) * 1982-10-19 1984-05-29 バリアン・アソシエイツ・インコ−ポレイテツド Clearance controller for partial vacuum treatment
JPS6069593A (en) * 1983-09-26 1985-04-20 オムロン株式会社 Minutely movable stage mechanism

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006235019A (en) * 2005-02-23 2006-09-07 Hitachi High-Technologies Corp Exposure device, exposure method, and manufacturing method of panel substrate for display

Also Published As

Publication number Publication date
JPH0557556B2 (en) 1993-08-24

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