JPS645371A - Positioning mechanism - Google Patents
Positioning mechanismInfo
- Publication number
- JPS645371A JPS645371A JP62159657A JP15965787A JPS645371A JP S645371 A JPS645371 A JP S645371A JP 62159657 A JP62159657 A JP 62159657A JP 15965787 A JP15965787 A JP 15965787A JP S645371 A JPS645371 A JP S645371A
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- displaced
- signal
- arrow
- computed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Control Of Position Or Direction (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
PURPOSE:To conduct positioning on the order of less than mum with a high accuracy by reducing and transmitting a displacement of actuator to a positioned body via an elastic member. CONSTITUTION:When a voltage is applied from a driving source 20 to piezoelectric elements 11 of a displacement part 1, holding members 13 are displaced in the direction of the arrow 10 and parallel members 12 of the displacement part 1 are transformed and curved outward. This indicates the fact that when a spring body 9 is displaced by x in the direction of the arrow 10, the displacement of a piezoelectric element 11 can be reduced if said body 9 is displaced by y in the direction of the arrow 3. A displacement quantity x is computed from the distortion signal SH of a distortion gauge 15 by a first computer 16 and a displacement quantity y is computed from the signal SA of the displacement quantity x by a second computer 18. A control signal output part 19 gives a driving source 20 a signal SD for accurately positioning a positioned body 7 from the signal SC of the displacement quantity y. A voltage corresponding to said control signal SD is applied to the piezoelectric element 11, the spring body 9 is displaced by a given quantity in the direction of the arrows 3, 10, and the positioned body 7 is reduced to a final target position.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62159657A JPS645371A (en) | 1987-06-29 | 1987-06-29 | Positioning mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62159657A JPS645371A (en) | 1987-06-29 | 1987-06-29 | Positioning mechanism |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS645371A true JPS645371A (en) | 1989-01-10 |
Family
ID=15698492
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62159657A Pending JPS645371A (en) | 1987-06-29 | 1987-06-29 | Positioning mechanism |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS645371A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02292607A (en) * | 1989-04-05 | 1990-12-04 | Fisher Controls Internatl Inc | Movement controller for magnetostrictive transducer |
US5128923A (en) * | 1990-01-19 | 1992-07-07 | Sony Corporation | Disc cartridge for cleaning an objective lens |
WO2011058874A1 (en) * | 2009-11-12 | 2011-05-19 | コニカミノルタホールディングス株式会社 | Parallel movement mechanism, interferometer, and spectroscope |
-
1987
- 1987-06-29 JP JP62159657A patent/JPS645371A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02292607A (en) * | 1989-04-05 | 1990-12-04 | Fisher Controls Internatl Inc | Movement controller for magnetostrictive transducer |
US5128923A (en) * | 1990-01-19 | 1992-07-07 | Sony Corporation | Disc cartridge for cleaning an objective lens |
WO2011058874A1 (en) * | 2009-11-12 | 2011-05-19 | コニカミノルタホールディングス株式会社 | Parallel movement mechanism, interferometer, and spectroscope |
JP4973811B2 (en) * | 2009-11-12 | 2012-07-11 | コニカミノルタホールディングス株式会社 | Translation mechanism, interferometer and spectrometer |
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