JPH0557555B2 - - Google Patents
Info
- Publication number
- JPH0557555B2 JPH0557555B2 JP62213376A JP21337687A JPH0557555B2 JP H0557555 B2 JPH0557555 B2 JP H0557555B2 JP 62213376 A JP62213376 A JP 62213376A JP 21337687 A JP21337687 A JP 21337687A JP H0557555 B2 JPH0557555 B2 JP H0557555B2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- mask
- tilting
- hinge
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62213376A JPS6454392A (en) | 1987-08-26 | 1987-08-26 | Flap stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62213376A JPS6454392A (en) | 1987-08-26 | 1987-08-26 | Flap stage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6454392A JPS6454392A (en) | 1989-03-01 |
| JPH0557555B2 true JPH0557555B2 (enrdf_load_stackoverflow) | 1993-08-24 |
Family
ID=16638166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62213376A Granted JPS6454392A (en) | 1987-08-26 | 1987-08-26 | Flap stage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6454392A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7738193B2 (en) | 2004-06-29 | 2010-06-15 | Carl Zeiss Smt Ag | Positioning unit and alignment device for an optical element |
| KR101962487B1 (ko) | 2011-02-22 | 2019-07-17 | 가부시키가이샤 니콘 | 유지 장치, 노광 장치, 및 디바이스의 제조 방법 |
| KR102034941B1 (ko) | 2015-06-15 | 2019-10-21 | 가부시키가이샤 데라오카 세이사쿠쇼 | 점착제 조성물 및 점착 테이프 |
-
1987
- 1987-08-26 JP JP62213376A patent/JPS6454392A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6454392A (en) | 1989-03-01 |
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