JPS6454392A - Flap stage - Google Patents

Flap stage

Info

Publication number
JPS6454392A
JPS6454392A JP62213376A JP21337687A JPS6454392A JP S6454392 A JPS6454392 A JP S6454392A JP 62213376 A JP62213376 A JP 62213376A JP 21337687 A JP21337687 A JP 21337687A JP S6454392 A JPS6454392 A JP S6454392A
Authority
JP
Japan
Prior art keywords
displacement
swinging
plate
hinges
hinge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62213376A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0557555B2 (enrdf_load_stackoverflow
Inventor
Joji Iwata
Ryoji Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62213376A priority Critical patent/JPS6454392A/ja
Publication of JPS6454392A publication Critical patent/JPS6454392A/ja
Publication of JPH0557555B2 publication Critical patent/JPH0557555B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP62213376A 1987-08-26 1987-08-26 Flap stage Granted JPS6454392A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62213376A JPS6454392A (en) 1987-08-26 1987-08-26 Flap stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62213376A JPS6454392A (en) 1987-08-26 1987-08-26 Flap stage

Publications (2)

Publication Number Publication Date
JPS6454392A true JPS6454392A (en) 1989-03-01
JPH0557555B2 JPH0557555B2 (enrdf_load_stackoverflow) 1993-08-24

Family

ID=16638166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62213376A Granted JPS6454392A (en) 1987-08-26 1987-08-26 Flap stage

Country Status (1)

Country Link
JP (1) JPS6454392A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008504579A (ja) * 2004-06-29 2008-02-14 カール・ツァイス・エスエムティー・アーゲー 光学素子のための位置決めユニット及び調節デバイス
WO2012115002A1 (ja) * 2011-02-22 2012-08-30 株式会社ニコン 保持装置、露光装置、及びデバイスの製造方法
KR20170129900A (ko) 2015-06-15 2017-11-27 가부시키가이샤 데라오카 세이사쿠쇼 점착제 조성물 및 점착 테이프

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8493674B2 (en) 2004-06-29 2013-07-23 Carl Zeiss Smt Gmbh Positioning unit and alignment device for an optical element
US7738193B2 (en) 2004-06-29 2010-06-15 Carl Zeiss Smt Ag Positioning unit and alignment device for an optical element
JP2010183097A (ja) * 2004-06-29 2010-08-19 Carl Zeiss Smt Ag 光学素子の位置決めユニット
US8035903B2 (en) 2004-06-29 2011-10-11 Carl Zeiss Smt Gmbh Positioning unit and alignment device for an optical element
JP2008504579A (ja) * 2004-06-29 2008-02-14 カール・ツァイス・エスエムティー・アーゲー 光学素子のための位置決めユニット及び調節デバイス
US8416515B2 (en) 2004-06-29 2013-04-09 Carl Zeiss Smt Gmbh Positioning unit and alignment device for an optical element
US8760777B2 (en) 2004-06-29 2014-06-24 Carl Zeiss Smt Gmbh Positioning unit and apparatus for adjustment of an optical element
US10133021B2 (en) 2004-06-29 2018-11-20 Carl Zeiss Smt Gmbh Positioning unit and apparatus for adjustment of an optical element
WO2012115002A1 (ja) * 2011-02-22 2012-08-30 株式会社ニコン 保持装置、露光装置、及びデバイスの製造方法
JP2017010061A (ja) * 2011-02-22 2017-01-12 株式会社ニコン 保持装置、露光装置、及びデバイスの製造方法
US9746787B2 (en) 2011-02-22 2017-08-29 Nikon Corporation Holding apparatus, exposure apparatus and manufacturing method of device
JPWO2012115002A1 (ja) * 2011-02-22 2014-07-07 株式会社ニコン 保持装置、露光装置、及びデバイスの製造方法
US10416573B2 (en) 2011-02-22 2019-09-17 Nikon Corporation Holding apparatus, exposure apparatus and manufacturing method of device
KR20170129900A (ko) 2015-06-15 2017-11-27 가부시키가이샤 데라오카 세이사쿠쇼 점착제 조성물 및 점착 테이프

Also Published As

Publication number Publication date
JPH0557555B2 (enrdf_load_stackoverflow) 1993-08-24

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