ATE293242T1 - Positioniermechanismus - Google Patents

Positioniermechanismus

Info

Publication number
ATE293242T1
ATE293242T1 AT99301102T AT99301102T ATE293242T1 AT E293242 T1 ATE293242 T1 AT E293242T1 AT 99301102 T AT99301102 T AT 99301102T AT 99301102 T AT99301102 T AT 99301102T AT E293242 T1 ATE293242 T1 AT E293242T1
Authority
AT
Austria
Prior art keywords
flexure
axis
movable part
actuation forces
axes
Prior art date
Application number
AT99301102T
Other languages
English (en)
Inventor
Philip Andrew Davies
Original Assignee
Thorlabs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thorlabs Inc filed Critical Thorlabs Inc
Application granted granted Critical
Publication of ATE293242T1 publication Critical patent/ATE293242T1/de

Links

Classifications

    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/004—Manual alignment, e.g. micromanipulators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Transmission Devices (AREA)
  • Body Structure For Vehicles (AREA)
  • Mechanical Control Devices (AREA)
  • Vehicle Body Suspensions (AREA)
  • Wire Bonding (AREA)
  • Eye Examination Apparatus (AREA)
  • Die Bonding (AREA)
AT99301102T 1998-02-20 1999-02-16 Positioniermechanismus ATE293242T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9803716A GB2334593B (en) 1998-02-20 1998-02-20 Positioning mechanism

Publications (1)

Publication Number Publication Date
ATE293242T1 true ATE293242T1 (de) 2005-04-15

Family

ID=10827395

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99301102T ATE293242T1 (de) 1998-02-20 1999-02-16 Positioniermechanismus

Country Status (5)

Country Link
US (2) US6193226B1 (de)
EP (1) EP0937961B1 (de)
AT (1) ATE293242T1 (de)
DE (1) DE69924659T2 (de)
GB (1) GB2334593B (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6712154B2 (en) 1998-11-16 2004-03-30 Enventure Global Technology Isolation of subterranean zones
DE19962247A1 (de) 1999-12-22 2001-09-20 Agie Sa Bewegungsübertragungsvorrichtung
DE10004661B4 (de) * 2000-02-03 2008-10-16 Leica Microsystems Cms Gmbh Vorrichtung zum Schwenken eines Lichtstrahls
US6606444B2 (en) 2000-09-28 2003-08-12 Murray R. Harman Positioning device especially for assembling optical components
WO2002055201A2 (en) * 2001-01-12 2002-07-18 Scient Generics Ltd Sample processing apparatus
US6688183B2 (en) 2001-01-19 2004-02-10 Massachusetts Institute Of Technology Apparatus having motion with pre-determined degrees of freedom
US6480651B1 (en) 2001-07-13 2002-11-12 Jds Uniphase Inc. Method and apparatus for aligning optical components
US7068891B1 (en) * 2002-03-12 2006-06-27 Palomar Technologies, Inc. System and method for positioning optical fibers
EP1402992A1 (de) 2002-09-27 2004-03-31 Sysmelec SA Vorrichtung mit höher Präzision zum Vorgeben oder zum Messen einer Position oder Kraft
GB0301937D0 (en) * 2003-01-28 2003-02-26 Melles Griot Ltd Mult-axis positioner
GB2411288B (en) 2004-02-20 2006-01-04 Melles Griot Ltd Positioner device
DE102004052953A1 (de) * 2004-10-29 2006-05-04 Leica Microsystems Cms Gmbh Vorrichtung zur Justage einer optischen Faser oder eines optischen Faserbündels
JP4679572B2 (ja) * 2005-03-16 2011-04-27 平田機工株式会社 精密位置決め装置
CN100483564C (zh) * 2005-09-22 2009-04-29 同方威视技术股份有限公司 一种用于调整x射线束流的准直器
US8116017B2 (en) * 2006-03-14 2012-02-14 Abet Technologies, Inc. Reduced vibration optical system with inexpensive precision positioning assembly
EP2101964B1 (de) * 2006-10-31 2012-07-04 Force Dimension Technologies Sàrl Parallele kinematische struktur
US8072120B2 (en) * 2008-11-26 2011-12-06 Shorya Awtar Multiple degrees of freedom motion system
DE202010002684U1 (de) 2010-02-23 2011-09-12 Deutsche Mechatronics Gmbh Mikropositionierer
CN102221734B (zh) * 2011-06-14 2012-11-07 中南大学 一种光电子器件封装对准的单自由度微动平台
CN104777581B (zh) * 2015-04-21 2017-03-01 中国科学院长春光学精密机械与物理研究所 一种结构紧凑的空间相机装调用三维调整装置
DE102017107282B4 (de) 2017-04-05 2021-02-25 Precitec Gmbh & Co. Kg Kartesische Positioniervorrichtung und Laserbearbeitungskopf mit derselben
CN108088342A (zh) * 2017-12-21 2018-05-29 北京理工大学 一种微小型定位调距装置
CN109465652B (zh) * 2018-11-30 2023-09-22 广东工业大学 接触式刚度切换装置及使用其的刚柔耦合运动平台和方法
JP6727676B1 (ja) 2019-09-09 2020-07-22 マイスターバイオ株式会社 ガン予防及び／又は治療用組成物
EP4425783A1 (de) * 2023-03-03 2024-09-04 Thorlabs Inc. Mehrachsige nanopositionier-biegebühne mit grob- und feinanpassung

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH263705A (fr) * 1940-11-21 1949-09-15 Monchablon Jacques Micromanipulateur.
GB1252667A (de) * 1969-01-17 1971-11-10
DE2218156A1 (de) * 1971-06-18 1972-12-21 Bausch & Lomb Objekttragerfinger fur Mikroskop
JPS5345865A (en) * 1976-10-05 1978-04-25 Nippon Telegr & Teleph Corp <Ntt> Micromanipulator
SE420131B (sv) * 1980-01-22 1981-09-14 Leon Carlson Anordning for forflyttning av ett bord i tva godtyckliga riktningar i ett och samma plan
US4523383A (en) * 1982-07-28 1985-06-18 Renishaw Electrical Limited Position sensing apparatus
GB2129955B (en) * 1982-11-02 1986-07-09 Martock Design Ltd Adjustable mountings
NL8402765A (nl) * 1984-09-11 1986-04-01 Philips Nv Manipulator met zes vrijheidsgraden.
GB2185323B (en) * 1984-10-12 1988-01-06 Vickers Plc Microscope having an improved stage
NL8500615A (nl) * 1985-03-05 1986-10-01 Nederlanden Staat Fijninstelmechanisme voor het nauwkeurig positioneren van een instelelement.
CH672089A5 (de) 1985-12-16 1989-10-31 Sogeva Sa
FR2606890B1 (fr) * 1986-11-18 1989-06-30 Lyonnaise Transmiss Optiques Dispositif de deplacement de l'extremite d'une fibre optique suivant deux axes orthogonaux
DE3905952A1 (de) * 1989-02-25 1990-08-30 Kugelfischer G Schaefer & Co Mehrkoordinatenmesstaster
US5140470A (en) * 1991-01-07 1992-08-18 New Focus, Inc. Optical mounting apparatus
US5412503A (en) * 1992-08-27 1995-05-02 U.S. Philips Corporation Specimen holder for a particle beam optical apparatus
US5357366A (en) * 1992-12-08 1994-10-18 Marchlenski Stanley P Mechanical stage adjustment mechanism
JPH07218749A (ja) * 1993-12-07 1995-08-18 Furukawa Electric Co Ltd:The 多軸微動ステージ
DE19742802C1 (de) * 1997-09-27 1998-10-22 Leica Mikroskopie & Syst Mikroskopstativ für ein Waferinspektionsmikroskop
US6252705B1 (en) * 1999-05-25 2001-06-26 Schlumberger Technologies, Inc. Stage for charged particle microscopy system

Also Published As

Publication number Publication date
GB2334593A (en) 1999-08-25
GB2334593B (en) 2002-07-17
GB9803716D0 (en) 1998-04-15
EP0937961A3 (de) 2001-05-23
DE69924659T2 (de) 2006-01-12
EP0937961A2 (de) 1999-08-25
DE69924659D1 (de) 2005-05-19
US6467762B1 (en) 2002-10-22
EP0937961B1 (de) 2005-04-13
US6193226B1 (en) 2001-02-27

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