JPH0557352B2 - - Google Patents

Info

Publication number
JPH0557352B2
JPH0557352B2 JP29084087A JP29084087A JPH0557352B2 JP H0557352 B2 JPH0557352 B2 JP H0557352B2 JP 29084087 A JP29084087 A JP 29084087A JP 29084087 A JP29084087 A JP 29084087A JP H0557352 B2 JPH0557352 B2 JP H0557352B2
Authority
JP
Japan
Prior art keywords
substrate
cap
opening
board
periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP29084087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01132766A (ja
Inventor
Shinichi Yamabe
Shiro Takigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinmaywa Industries Ltd
Original Assignee
Shin Meiva Industry Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Meiva Industry Ltd filed Critical Shin Meiva Industry Ltd
Priority to JP29084087A priority Critical patent/JPH01132766A/ja
Publication of JPH01132766A publication Critical patent/JPH01132766A/ja
Publication of JPH0557352B2 publication Critical patent/JPH0557352B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP29084087A 1987-11-18 1987-11-18 基板着脱装置 Granted JPH01132766A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29084087A JPH01132766A (ja) 1987-11-18 1987-11-18 基板着脱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29084087A JPH01132766A (ja) 1987-11-18 1987-11-18 基板着脱装置

Publications (2)

Publication Number Publication Date
JPH01132766A JPH01132766A (ja) 1989-05-25
JPH0557352B2 true JPH0557352B2 (enrdf_load_stackoverflow) 1993-08-23

Family

ID=17761166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29084087A Granted JPH01132766A (ja) 1987-11-18 1987-11-18 基板着脱装置

Country Status (1)

Country Link
JP (1) JPH01132766A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0563230B1 (en) * 1990-12-19 2000-02-16 Mobile Storage Technology Inc. Miniature hard disk drive for portable computer
WO2001064391A2 (en) * 2000-02-29 2001-09-07 Applied Materials, Inc. Planarization system with a wafer transfer corridor and multiple polishing modules

Also Published As

Publication number Publication date
JPH01132766A (ja) 1989-05-25

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