JPH01132766A - 基板着脱装置 - Google Patents

基板着脱装置

Info

Publication number
JPH01132766A
JPH01132766A JP29084087A JP29084087A JPH01132766A JP H01132766 A JPH01132766 A JP H01132766A JP 29084087 A JP29084087 A JP 29084087A JP 29084087 A JP29084087 A JP 29084087A JP H01132766 A JPH01132766 A JP H01132766A
Authority
JP
Japan
Prior art keywords
substrate
cap
opening
peripheral edge
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29084087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0557352B2 (enrdf_load_stackoverflow
Inventor
Shinichi Yamabe
真一 山辺
Shiro Takigawa
滝川　志朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinmaywa Industries Ltd
Original Assignee
Shin Meiva Industry Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Meiva Industry Ltd filed Critical Shin Meiva Industry Ltd
Priority to JP29084087A priority Critical patent/JPH01132766A/ja
Publication of JPH01132766A publication Critical patent/JPH01132766A/ja
Publication of JPH0557352B2 publication Critical patent/JPH0557352B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP29084087A 1987-11-18 1987-11-18 基板着脱装置 Granted JPH01132766A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29084087A JPH01132766A (ja) 1987-11-18 1987-11-18 基板着脱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29084087A JPH01132766A (ja) 1987-11-18 1987-11-18 基板着脱装置

Publications (2)

Publication Number Publication Date
JPH01132766A true JPH01132766A (ja) 1989-05-25
JPH0557352B2 JPH0557352B2 (enrdf_load_stackoverflow) 1993-08-23

Family

ID=17761166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29084087A Granted JPH01132766A (ja) 1987-11-18 1987-11-18 基板着脱装置

Country Status (1)

Country Link
JP (1) JPH01132766A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5486964A (en) * 1990-12-19 1996-01-23 Integral Peripherals, Inc. Miniature disk drive with dynamic head loading with skewed lifting tab
US6562184B2 (en) * 2000-02-29 2003-05-13 Applied Materials, Inc. Planarization system with multiple polishing pads

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5486964A (en) * 1990-12-19 1996-01-23 Integral Peripherals, Inc. Miniature disk drive with dynamic head loading with skewed lifting tab
US6562184B2 (en) * 2000-02-29 2003-05-13 Applied Materials, Inc. Planarization system with multiple polishing pads

Also Published As

Publication number Publication date
JPH0557352B2 (enrdf_load_stackoverflow) 1993-08-23

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