JPH0556675B2 - - Google Patents

Info

Publication number
JPH0556675B2
JPH0556675B2 JP59161717A JP16171784A JPH0556675B2 JP H0556675 B2 JPH0556675 B2 JP H0556675B2 JP 59161717 A JP59161717 A JP 59161717A JP 16171784 A JP16171784 A JP 16171784A JP H0556675 B2 JPH0556675 B2 JP H0556675B2
Authority
JP
Japan
Prior art keywords
layer
etching
gaas
cavity surface
semiconductor laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59161717A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6140078A (ja
Inventor
Masaru Wada
Juichi Shimizu
Takao Shibuya
Kunio Ito
Takeshi Hamada
Itsuki Teramoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59161717A priority Critical patent/JPS6140078A/ja
Priority to CA000487734A priority patent/CA1247947A/en
Priority to US06/761,023 priority patent/US4675074A/en
Publication of JPS6140078A publication Critical patent/JPS6140078A/ja
Publication of JPH0556675B2 publication Critical patent/JPH0556675B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Semiconductor Lasers (AREA)
JP59161717A 1984-07-31 1984-07-31 半導体レ−ザ装置の製造方法 Granted JPS6140078A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP59161717A JPS6140078A (ja) 1984-07-31 1984-07-31 半導体レ−ザ装置の製造方法
CA000487734A CA1247947A (en) 1984-07-31 1985-07-30 Method of manufacturing semiconductor device
US06/761,023 US4675074A (en) 1984-07-31 1985-07-31 Method of manufacturing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59161717A JPS6140078A (ja) 1984-07-31 1984-07-31 半導体レ−ザ装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6140078A JPS6140078A (ja) 1986-02-26
JPH0556675B2 true JPH0556675B2 (enrdf_load_stackoverflow) 1993-08-20

Family

ID=15740538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59161717A Granted JPS6140078A (ja) 1984-07-31 1984-07-31 半導体レ−ザ装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6140078A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6140078A (ja) 1986-02-26

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