JPH055632B2 - - Google Patents
Info
- Publication number
- JPH055632B2 JPH055632B2 JP61288023A JP28802386A JPH055632B2 JP H055632 B2 JPH055632 B2 JP H055632B2 JP 61288023 A JP61288023 A JP 61288023A JP 28802386 A JP28802386 A JP 28802386A JP H055632 B2 JPH055632 B2 JP H055632B2
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- workpiece
- wrapping
- support
- support arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000000007 visual effect Effects 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 10
- 230000008054 signal transmission Effects 0.000 claims description 2
- 239000012530 fluid Substances 0.000 description 7
- 238000003754 machining Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61288023A JPS63144956A (ja) | 1986-12-03 | 1986-12-03 | 平面ラツピング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61288023A JPS63144956A (ja) | 1986-12-03 | 1986-12-03 | 平面ラツピング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63144956A JPS63144956A (ja) | 1988-06-17 |
JPH055632B2 true JPH055632B2 (zh) | 1993-01-22 |
Family
ID=17724811
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61288023A Granted JPS63144956A (ja) | 1986-12-03 | 1986-12-03 | 平面ラツピング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63144956A (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5525792B2 (ja) * | 2009-10-15 | 2014-06-18 | 株式会社 ハリーズ | 研削装置 |
TWI476854B (zh) * | 2012-03-08 | 2015-03-11 | Lg Cns Co Ltd | Led晶圓的提供裝置及方法 |
US9045827B2 (en) | 2012-03-09 | 2015-06-02 | Lg Cns Co., Ltd. | Apparatus and method for supplying light-emitting diode (LED) wafer |
JP6150283B2 (ja) * | 2013-07-03 | 2017-06-21 | 浜井産業株式会社 | ワーク嵌合装置および嵌合方法 |
CN104924197A (zh) * | 2015-05-28 | 2015-09-23 | 海宁奇晟轴承有限公司 | 一种自动双盘研磨机 |
CN115870868A (zh) * | 2022-12-27 | 2023-03-31 | 西安奕斯伟材料科技有限公司 | 装卸装置、方法及硅片双面抛光设备 |
-
1986
- 1986-12-03 JP JP61288023A patent/JPS63144956A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS63144956A (ja) | 1988-06-17 |
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