JPH0556020B2 - - Google Patents

Info

Publication number
JPH0556020B2
JPH0556020B2 JP61194541A JP19454186A JPH0556020B2 JP H0556020 B2 JPH0556020 B2 JP H0556020B2 JP 61194541 A JP61194541 A JP 61194541A JP 19454186 A JP19454186 A JP 19454186A JP H0556020 B2 JPH0556020 B2 JP H0556020B2
Authority
JP
Japan
Prior art keywords
resistance
polycrystalline silicon
low
region
integrated circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61194541A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6350054A (ja
Inventor
Haruji Futami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP19454186A priority Critical patent/JPS6350054A/ja
Publication of JPS6350054A publication Critical patent/JPS6350054A/ja
Publication of JPH0556020B2 publication Critical patent/JPH0556020B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP19454186A 1986-08-19 1986-08-19 半導体集積回路装置 Granted JPS6350054A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19454186A JPS6350054A (ja) 1986-08-19 1986-08-19 半導体集積回路装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19454186A JPS6350054A (ja) 1986-08-19 1986-08-19 半導体集積回路装置

Publications (2)

Publication Number Publication Date
JPS6350054A JPS6350054A (ja) 1988-03-02
JPH0556020B2 true JPH0556020B2 (enExample) 1993-08-18

Family

ID=16326247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19454186A Granted JPS6350054A (ja) 1986-08-19 1986-08-19 半導体集積回路装置

Country Status (1)

Country Link
JP (1) JPS6350054A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5172211A (en) * 1990-01-12 1992-12-15 Paradigm Technology, Inc. High resistance polysilicon load resistor
JP3124473B2 (ja) * 1994-08-19 2001-01-15 セイコーインスツルメンツ株式会社 半導体装置とその製造方法
US6885280B2 (en) * 2003-01-31 2005-04-26 Fairchild Semiconductor Corporation High value split poly p-resistor with low standard deviation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58122769A (ja) * 1982-01-18 1983-07-21 Seiko Epson Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6350054A (ja) 1988-03-02

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