JPH0555940B2 - - Google Patents

Info

Publication number
JPH0555940B2
JPH0555940B2 JP26413284A JP26413284A JPH0555940B2 JP H0555940 B2 JPH0555940 B2 JP H0555940B2 JP 26413284 A JP26413284 A JP 26413284A JP 26413284 A JP26413284 A JP 26413284A JP H0555940 B2 JPH0555940 B2 JP H0555940B2
Authority
JP
Japan
Prior art keywords
film
tellurium
substrate
gas
frequency power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP26413284A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61142550A (ja
Inventor
Koichi Saito
Hideki Kobayashi
Yoichi Murayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuraray Co Ltd
Original Assignee
Kuraray Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co Ltd filed Critical Kuraray Co Ltd
Priority to JP26413284A priority Critical patent/JPS61142550A/ja
Priority to EP85309089A priority patent/EP0188100B1/en
Priority to DE8585309089T priority patent/DE3582149D1/de
Publication of JPS61142550A publication Critical patent/JPS61142550A/ja
Priority to US07/082,909 priority patent/US4786538A/en
Publication of JPH0555940B2 publication Critical patent/JPH0555940B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manufacturing Optical Record Carriers (AREA)
JP26413284A 1984-12-13 1984-12-13 カルコゲナイド系酸化物からなる光記録媒体の製造方法 Granted JPS61142550A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP26413284A JPS61142550A (ja) 1984-12-13 1984-12-13 カルコゲナイド系酸化物からなる光記録媒体の製造方法
EP85309089A EP0188100B1 (en) 1984-12-13 1985-12-13 Optical recording medium formed of chalcogen oxide and method for producing same
DE8585309089T DE3582149D1 (de) 1984-12-13 1985-12-13 Aus chalkogenoxid gebildetes optisches aufzeichnungsmedium und verfahren zu dessen herstellung.
US07/082,909 US4786538A (en) 1984-12-13 1987-08-10 Optical recording medium formed of chalcogenide oxide and method for producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26413284A JPS61142550A (ja) 1984-12-13 1984-12-13 カルコゲナイド系酸化物からなる光記録媒体の製造方法

Publications (2)

Publication Number Publication Date
JPS61142550A JPS61142550A (ja) 1986-06-30
JPH0555940B2 true JPH0555940B2 (enrdf_load_stackoverflow) 1993-08-18

Family

ID=17398903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26413284A Granted JPS61142550A (ja) 1984-12-13 1984-12-13 カルコゲナイド系酸化物からなる光記録媒体の製造方法

Country Status (1)

Country Link
JP (1) JPS61142550A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS61142550A (ja) 1986-06-30

Similar Documents

Publication Publication Date Title
US4786538A (en) Optical recording medium formed of chalcogenide oxide and method for producing the same
JPS6135401A (ja) 反射鏡
US4640860A (en) Optical recording coating
JPH0444812B2 (enrdf_load_stackoverflow)
JPH0555940B2 (enrdf_load_stackoverflow)
JPH0530195B2 (enrdf_load_stackoverflow)
JPH0555939B2 (enrdf_load_stackoverflow)
EP0158479B1 (en) Method for producing an optical recording medium by a chalcogenide suboxide
JPH0444814B2 (enrdf_load_stackoverflow)
JPH05210884A (ja) 光磁気記録媒体の製造方法
JP3255682B2 (ja) アルミニウム膜被着物
JPS61141592A (ja) 光記録媒体及びその製造方法
JPH0314906B2 (enrdf_load_stackoverflow)
JPS61142548A (ja) カルコゲナイド系低酸化物による光記録媒体の製造法
JPS62170047A (ja) 光記録媒体の製造方法
JPS61294714A (ja) 透明電導性金属酸化物膜の形成方法
JPH10183332A (ja) 光学薄膜の製造方法及び製造装置
JPH0462556B2 (enrdf_load_stackoverflow)
JPS62154241A (ja) 光学的記録用媒体
JPH03137017A (ja) 光学薄膜及びその製造方法
JPH02171290A (ja) 情報記録媒体
JPS61115317A (ja) 磁気光学記録再生用薄膜材料の製造方法
JPS62154247A (ja) 記録材料の製造方法
JPS6143595A (ja) 光学的記録用媒体
JPH0522590B2 (enrdf_load_stackoverflow)

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term