JPH0555263B2 - - Google Patents

Info

Publication number
JPH0555263B2
JPH0555263B2 JP60046443A JP4644385A JPH0555263B2 JP H0555263 B2 JPH0555263 B2 JP H0555263B2 JP 60046443 A JP60046443 A JP 60046443A JP 4644385 A JP4644385 A JP 4644385A JP H0555263 B2 JPH0555263 B2 JP H0555263B2
Authority
JP
Japan
Prior art keywords
displacement
positioning device
fine positioning
rigid body
flexible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60046443A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61209846A (ja
Inventor
Yotaro Hatamura
Kozo Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Construction Machinery Co Ltd filed Critical Hitachi Construction Machinery Co Ltd
Priority to JP60046443A priority Critical patent/JPS61209846A/ja
Priority to US06/824,958 priority patent/US4686440A/en
Priority to DE3686895T priority patent/DE3686895T3/de
Priority to EP86200383A priority patent/EP0195479B2/en
Publication of JPS61209846A publication Critical patent/JPS61209846A/ja
Publication of JPH0555263B2 publication Critical patent/JPH0555263B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B25J17/0208—Compliance devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Machine Tool Units (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP60046443A 1985-03-11 1985-03-11 微細位置決め装置 Granted JPS61209846A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP60046443A JPS61209846A (ja) 1985-03-11 1985-03-11 微細位置決め装置
US06/824,958 US4686440A (en) 1985-03-11 1986-01-31 Fine positioning device
DE3686895T DE3686895T3 (de) 1985-03-11 1986-03-10 Vorrichtung für Feinverstellung.
EP86200383A EP0195479B2 (en) 1985-03-11 1986-03-10 Fine positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60046443A JPS61209846A (ja) 1985-03-11 1985-03-11 微細位置決め装置

Publications (2)

Publication Number Publication Date
JPS61209846A JPS61209846A (ja) 1986-09-18
JPH0555263B2 true JPH0555263B2 (cs) 1993-08-16

Family

ID=12747308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60046443A Granted JPS61209846A (ja) 1985-03-11 1985-03-11 微細位置決め装置

Country Status (1)

Country Link
JP (1) JPS61209846A (cs)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01316146A (ja) * 1988-06-13 1989-12-21 Mitsutoyo Corp 摩擦送り機構
JPH0341390A (ja) * 1989-07-07 1991-02-21 Hitachi Constr Mach Co Ltd 微動機構
JPH07104723B2 (ja) * 1993-09-10 1995-11-13 洋太郎 畑村 微細位置決め装置
CN103143732A (zh) * 2013-03-01 2013-06-12 天津大学 基于柔性机构的位移传感器式压电陶瓷驱动器
US11745363B1 (en) * 2021-02-26 2023-09-05 The United States Of America, As Represented By The Secretary Of The Navy Compact self-centering compliant joint
CN113153625B (zh) * 2021-05-31 2023-03-03 重庆大学 盒式风力发电装置及发电装置组
CN114992453B (zh) * 2022-06-07 2024-02-27 重庆大学 一种具有高负载、大行程的可控平面高精度柔性位移平台

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3786332A (en) * 1969-03-19 1974-01-15 Thomson Houston Comp Francaise Micro positioning apparatus

Also Published As

Publication number Publication date
JPS61209846A (ja) 1986-09-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term