JPH0555263B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Background of the Invention] In recent years, in various technical fields, there has been a demand for devices capable of fine displacement on the order of μm. A typical example is LSI (large scale integrated circuit),
Semiconductor manufacturing equipment such as mask aligners and electron beam lithography equipment used in the LSI manufacturing process.
These devices require fine positioning on the μm order, and as the positioning accuracy improves, the degree of integration also increases, making it possible to manufacture high-performance products. Such fine positioning is necessary not only for the semiconductor devices mentioned above, but also for various high-magnification optical devices such as electron microscopes, and by improving its accuracy, it is also necessary for cutting-edge technologies such as biotechnology and space development. This will greatly contribute to the development of the world.

Conventionally, such fine positioning devices have been described, for example, in "Mechanical Design" magazine, Vol. 27, No. 1 (January 1993 issue).
Various types have been proposed, as shown on pages 32 to 36 of . Among these, a type of fine positioning device using a parallel spring and a fine movement actuator is considered to be the most superior in that it does not require a particularly troublesome displacement reduction mechanism and has a simple configuration. This will be explained based on the diagram.

FIG. 18 is a side view of a conventional fine positioning device. In the figure, 1 is a support stand, 2a and 2b are support stands 1
plate-shaped parallel springs fixed parallel to each other above, 3
is a highly rigid fine movement table fixed on parallel springs 2a and 2b. Reference numeral 4 denotes a fine movement actuator mounted between the support base 1 and the fine movement table 3. This fine movement actuator 4 includes a piezoelectric element,
An electromagnetic solenoid or the like is used, and by exciting it, a force is applied to the fine movement table 3 in the x-axis direction of the coordinate axis shown in the figure.

Here, due to the structure of the parallel springs 2a and 2b, x
The stiffness in the axial direction is low, whereas the z-axis walking, y-axis
Because it has high rigidity in the axial direction (direction perpendicular to the paper surface),
When the fine movement actuator is excited, the fine movement table 3 is displaced almost only in the x-axis direction, and displacements in other directions can be kept small.

However, due to the fine movement actuator 4,
The fine movement table 3 displaced in the axial direction is moved by the parallel spring 2
Strictly speaking, the deflection of a and 2b also causes displacement in the z-axis direction. This will be explained with reference to FIG. In the figure, the support base 1, parallel springs 2a, 2b, and fine movement table 3 are the same as those shown in FIG.

Fine movement actuator 1 allows fine movement table 3
When a force F in the x-axis direction indicated by an arrow is applied to the parallel springs 2a and 2b, the parallel springs 2a and 2b are deformed. This deformation is analyzed using the finite element method and is shown by the broken line in the figure.
As is clear from the figure, the fine movement table 3 moves in the x-axis direction after the parallel springs 2a and 2b are deformed, and therefore the center point A and the end B on the fine movement table 3 also move to points A' and B, respectively. ’. However, a reaction force is applied to the fine movement table 3 by the parallel springs 2a, 2b, and the point of application of the reaction force is the parallel spring 2a, 2b.
2b and the fine movement table 3. On the other hand, since the point of action of external force F is shifted upward,
The fine movement table 3 has a rotational displacement δy around the y-axis.
It is also clear from the figure that a displacement εz occurs in the z-axis direction due to the deflection of the parallel springs 2a and 2b. This is illustrated using an actual numerical example as follows. That is, the parallel springs 2a and 2b have a thickness of 0.5 mm, a height of 20 mm, and a distance between the parallel springs of 50 mm.
When the force F is 5 kg, the point A' after the center point A of the fine movement table 3 is moved is in the x-axis direction with respect to the point A.
Displaced by 9μm and also -0.07μm in the z-axis direction
Displace. Also, point B' after moving is x with respect to point B
Displaced by 9μm in the axial direction and in the z-axis direction
Displaced by 0.04μm. This corresponds to approximately 5 μrad in terms of rotation angle around the y-axis.

In this way, in the conventional device shown in FIG.
In order to prevent rotational displacement around the axis, the axes of action of the external force and reaction force must be aligned, and displacement in the z-axis direction is generated, and these interference displacements can be avoided with respect to displacement in the x-axis direction. That's not true. In a fine positioning device that attempts to suppress a range of several μm with an accuracy of 0.01 μm, such interference displacement cannot be ignored, and even more so in a multidimensional fine positioning device described later. teeth,
It is clear that such interference displacement is a fatal defect.

FIG. 20 is a perspective view of another conventional fine positioning device that can be easily considered from the example disclosed in the above-mentioned reference document. In the figure, 6 is a support base, 7a and 7b are plate-shaped parallel springs fixed parallel to each other on the support base 6, 8 is a highly rigid intermediate table fixed to the parallel springs 7a and 7b, and 9a and 9b are parallel spring 7
A plate-shaped parallel spring 10 fixed to the intermediate table 8 parallel to each other in a direction perpendicular to a and 7b.
is a highly rigid fine movement table fixed on parallel springs 9a and 9b. When the coordinate axes are determined as shown in the figure, parallel springs 7a and 7b are arranged along the x-axis direction, and parallel springs 9a and 9b are arranged along the y-axis direction. This structure is basically a structure in which the uniaxial (displacement in the x-axis direction) structure shown in FIG. 18 is laminated in two stages. arrow
Fx indicates a force in the x-axis direction applied to the fine movement table 10, and arrow Fy indicates a force in the y-axis direction applied to the intermediate table 8. A fine movement actuator (not shown) that can apply forces Fx and Fy is the support base 6. and the fine movement table 10 are provided between the support base 6 and the intermediate table 8, respectively.

When force Fx is applied to the fine movement table 10, the parallel springs 9a and 9b are deformed, while the parallel spring 7
Since a and 7b have high rigidity against the force Fx in the x-axis direction, the fine movement table 10 is displaced almost only in the x-axis direction. In addition, the intermediate table 8 is
When Fy is applied, the parallel springs 7a and 7b are deformed, and the fine movement table 10 is displaced approximately only in the y-axis direction via the parallel springs 9a and 9b. Further, when both forces Fx and Fy are applied simultaneously, each parallel spring 7a, 7b, 9a, 9b is deformed simultaneously, and the fine movement table 10 is displaced two-dimensionally in response.

In this way, the device shown in FIG. 20 can perform positioning in two axial directions, whereas the device shown in FIG. 18 is a positioning device in only one axial direction.

However, the device shown in FIG.
As mentioned in the explanation of the device shown in the figure, it is obvious from its structure that it has the problem of interference displacement and errors, and it also has the following problems. There is. That is, (1) force
A fine movement actuator that generates Fx is rigidly connected between the fine movement table 10 and the support base 6. Therefore, if a force Fy is applied to the intermediate table 8 by a fine movement actuator (not shown) rigidly connected between the intermediate table 8 and the support base,
The fine movement table 10 is displaced in the y-axis direction. This displacement causes a force in a direction perpendicular to the force Fx to act on the fine movement actuator connected to the fine movement table 10, resulting in interference between the fine movement actuators. As a result, there is a problem in that the accuracy and durability of the positioning device are adversely affected. (2) At the same time, the above-mentioned phenomenon occurs when a fine movement positioning device detects actual fine movement displacement and attempts to further improve positioning accuracy based on this detected value. There is a problem in that it interferes with the displacement detection device in the direction of , reducing its detection accuracy.

As described above, conventional fine positioning devices have the undesirable problem of interference displacement, but in addition, they can only perform one-dimensional and two-dimensional positioning, as shown in the device shown in FIG. Displacement εz in the z-axis direction, x-axis, y-axis, z
There is a problem in that it is not easy to construct a device that can provide rotational displacements δx, δy, and δz around the axis, and such a fine positioning device has not yet been realized. Note that the apparatus shown in FIG. 20 uses a two-axis example in order to explain the phenomenon that the shaft drive systems interfere with each other using the simplest example. Looking at this example alone, the above
Problems (1) and (2) appear to be easily solved.
However, as mentioned above, in positioning with three or more axes, this problem becomes difficult to solve at once.

[Purpose of the invention]

The present invention has been made in view of the above circumstances, and its purpose is to solve the problems of the prior art described above, to prevent the occurrence of interference displacement, and to have extremely high accuracy. Moreover, it is an object of the present invention to provide a fine positioning device that can easily be configured with multiple axes.

[Summary of the invention]

In order to achieve the above object, the present invention connects at least two of a group of flexible beams made up of flexible beams parallel to each other in a plane symmetrical manner in a first structure, and connects these flexible beams connected in a plane symmetrical manner. The other side of the first structure in the group is connected by a second structure, and the first structure and the second structure have sufficient rigidity against a force in a direction perpendicular to the plane. , a first actuator is provided between the first structure and the second structure to apply a force to generate a relative displacement in a direction that causes bending deformation in each of the flexible beams, and these parallel flexible beam groups, the first The structure, the second structure, and the first actuator constitute a symmetrical parallel flexible beam displacement mechanism, while a small group of flexible beams consisting of flexible beams arranged radially with respect to one axis both are axially symmetrically connected by a third structure, and the other side of the third structure in the group of axially symmetrically connected flexible beams is connected by a fourth structure,
The third structure and the fourth structure have sufficient rigidity against forces perpendicular to the axis, and each of the flexible beams is provided between the third structure and the fourth structure. a group of flexible beams arranged radially, including a second actuator that applies a torque that generates a relative rotational displacement in a direction that causes bending deformation;
The third structure, the fourth structure, and the second actuator constitute a symmetric radial flexure beam displacement mechanism, and one or more of the symmetric parallel flexure beam displacement mechanisms or a symmetric radial flexure beam displacement mechanism is configured. The present invention is characterized in that the fine positioning device is configured by one or a combination of two or more beam displacement mechanisms, or an arbitrary number of combinations of symmetric parallel flexure beam displacement mechanisms and symmetric radial flexure beam displacement mechanisms.

[Embodiments of the invention]

Hereinafter, the present invention will be explained based on illustrated embodiments.

FIG. 1 is a side view of a fine positioning device according to a first embodiment of the present invention. In the figure, 15a, 15b,
Reference numerals 15c are rigid body parts located on the left, right, and center in the figure, respectively. 16a and 16a' are rigid body parts 1, respectively.
5a and 15c are flat parallel flexible beams formed integrally with these and parallel to each other, and 16b and 16b' are respectively rigid body parts 15.
It is a flat parallel flexible beam formed integrally with b and 15c and parallel to each other. 17a and 17b are parallel flexible beams 16, respectively.
16a, 16a' and parallel flexible beams 16b and 16b', and through holes formed to integrally form each rigid body part are shown. 18a is a protrusion that protrudes from the rigid body part 15a to the through hole 17a _, and _18c1 is a protrusion that protrudes from the rigid body part 15c to the through hole 17a. They overlap. Similarly, 18b is a protrusion that protrudes from the rigid body part 15b into the through hole 17b;
8c ₂ is a protrusion that protrudes from the rigid body part 15c into the through hole 17b, and these protrusions 18b and 18c ₁ are
The relationship is similar to that of the protrusions 18a and _18c1 . 19
a is a piezoelectric actuator in which piezoelectric elements fixed between a protruding part 18a and a protruding part _18c1 are laminated;
9b is the same piezoelectric actuator as the piezoelectric actuator 19a fixed between the protrusion 18b and the protrusion _18c2 . The piezoelectric actuator 19a generates a force in a direction perpendicular to the plane of the parallel flexible beams 16a, 16a', causing a bending deformation in them, and
The piezoelectric actuator 19b is a parallel flexible beam 16
A force in a direction perpendicular to the planes b and 16b' is generated, causing bending deformation in them. The magnitude of the force generated in these piezoelectric actuators 19a and 19b is
It is controlled by a voltage applied to the piezoelectric actuators 19a and 19b by a device not shown. 20a is another rigid structure that rigidly connects the rigid parts 15a and 15b to each other. Reference numeral 21 denotes a strain gauge for detecting strain in the parallel flexible beams 16a, 16a', and is provided at a connecting portion between the parallel flexible beams 16a, 16a' and the rigid body parts 15a, 15c.

In the above configuration, rigid body parts 15a, 15c,
Parallel flexible beams 16a, 16a' protrusions 18a, 18
c ₁ , the piezoelectric actuator 19a constitutes one parallel flexible beam displacement mechanism 22a, and the rigid body parts 15b, 15c, the parallel flexible beams 16b, 16b',
Projections 18b, 18c ₂ , piezoelectric actuator 19
b constitutes the other parallel deflection beam displacement mechanism 22b. And parallel deflection beam displacement mechanism 2
2b, 22a are parallel flexible beams 16a, 16a',
16b and 16' are in a plane-symmetric relationship with the parallel deflection beam displacement mechanisms 22a and 22b with respect to a plane perpendicular to the plane constituted by them. K is biparallel deflection beam displacement mechanism 2
A surface where 2a and 22b have a symmetrical relationship (reference surface)
shows. The parallel flexible beam displacement mechanisms 22a and 22b having such a plane-symmetric relationship constitute a symmetrical parallel flexible beam displacement mechanism 23.

Note that the reference axis is a line located within the reference plane K and perpendicular to each parallel flexible beam. This reference axis indicates the position and installation direction of the symmetrical parallel flexible beam displacement mechanism.

Next, the operation of this embodiment will be explained with reference to FIG. FIG. 2 is a side view of the symmetric parallel deflection beam displacement mechanism 23 shown in FIG. 1 after deformation. Here, coordinate axes are determined as shown in the figure (y-axis is perpendicular to the plane of the paper). Now, the piezoelectric actuator 19a,
A voltage is applied to 19b to generate a force f of the same magnitude in the z-axis direction. At this time, one of the parallel deflection beam displacement mechanisms, for example, the parallel deflection beam displacement mechanism 22a
Consider the displacement that occurs in By applying a voltage to the piezoelectric actuator 19a, the rigid body portion 15c is pressed in the z-axis direction by a force f. Therefore, the parallel flexible beams 16a, 16a' undergo bending deformation in the same way as the parallel springs 2a, 2b shown in FIG. 18, and the rigid body portion 15c is displaced in the z-axis direction. At this time, if the other parallel deflection beam displacement mechanism 22b does not exist, the rigid body part 15c is subjected to secondary displacement (x
axial displacement and rotational displacement about the y-axis) should also occur at the same time.

Moreover, when considering the displacement that occurs in the other parallel flexible beam displacement mechanism 22b when the parallel flexible beam displacement mechanism 22a does not exist, the parallel flexible beam displacement mechanism 22b is plane symmetrical with the parallel flexible beam displacement mechanism 22a with respect to the reference plane K. Since the rigid body part 15c receives a plane-symmetrical force f with respect to the reference plane K, a secondary displacement occurs in the rigid body part 15c at the same time as the displacement in the z-axis direction, and the magnitude and direction of the displacement are as follows. It has plane symmetry with respect to the reference plane K with that of the parallel deflection beam displacement mechanism 22a. That is, looking at the secondary displacement, the secondary displacement that occurs in the parallel deflection beam displacement mechanism 22a is a displacement in the x-axis direction to the left in the figure, and a rotational displacement around the y-axis to the counterclockwise in the figure. , while the parallel deflection beam displacement mechanism 22b
The secondary displacement that occurs in the x-axis direction occurs rightward in the figure, and the rotational displacement around the y-axis occurs clockwise in the figure. The magnitude of each displacement in the z-axis direction and the magnitude of rotational displacement around the y-axis are equal. Therefore, the secondary displacements occurring in both are mutually canceled. As a result, the force f is applied to each parallel flexible beam 16a, 1
6a', 16b, and 16b' due to their longitudinal extension, the rigid body portion 15c produces a displacement (principal displacement) ε only in the z-axis direction.

Moreover, as mentioned above, the parallel flexible beams 16a, 16
When a' is expanded and bent, compressive strain and expansion strain are generated in each strain gauge 21 depending on its placement position. Therefore, by configuring a so-called feedback control system that detects this strain with the strain gauge 21 and suppresses the voltage applied to the piezoelectric actuators 19a and 19b based on this detected value, it is possible to obtain an even more accurate main displacement ε. , that is,
Each of the strain gauges 21 is incorporated into an appropriate electric circuit such as a bridge circuit, and the detected strain is extracted as an electric signal (the principal displacement ε is exactly proportional to the strain).
This is compared with a signal corresponding to the target displacement in the comparison calculation section to calculate a difference signal between the two, and based on this difference signal, the piezoelectric actuators 19a and 19b are controlled so that the signal becomes 0. As described above, the feedback control system that compares the detected value with the target value and controls the difference so that it becomes 0 is well known, and in this embodiment, this well-known feedback control system is simply applied as is. Only the strain gauge 21, which is a detection section in the feedback control system, is shown, and illustrations and detailed explanations of other components are omitted. Note that the detection of strain by the strain gauge 21 is performed using the parallel flexible beams 16, 16.
The explanation has been given using an example in which the strain gauge 21 is provided at the connecting portion of a' with the rigid body parts 15a and 15c, but it is also possible to provide the strain gauge on the flexible beams 16b and 16b' of the other parallel flexible beam displacement mechanism 22b. It is obvious that they may be provided at predetermined positions on both sides. This relationship is exactly the same in the following examples.

When the voltage applied to piezoelectric actuators 19a, 19b is removed, each parallel flexible beam 16
a, 16a', 16b, and 16b' return to the state before deformation, and the symmetrical parallel deflection beam displacement mechanism 23 returns to the state shown in FIG. 1, and the displacement ε becomes zero.

The configuration and operation of this embodiment have been described above. In this explanation, the rigid body part 15
A, 15b, 15c, and 20 are rigid bodies in the original sense, that is, objects that have high rigidity against all kinds of loads (forces in all directions and torques around the axis in all directions). . It is most desirable that the rigid body parts 15a, 15b, 15c, and 20 be rigid bodies in the original sense. However, each of these rigid body parts does not necessarily have to be such a rigid body. The reason for this is explained below.

In the symmetrical parallel deflection beam displacement mechanism 23 of this embodiment, in order to mutually cancel the secondary displacements of the rigid body portion 15c moving in the left and right direction as shown in FIG. The parallel flexible beams 16a, 16a', 16b, 16b' need to extend slightly. Therefore, the rigid body portion 15a,
A force in a direction perpendicular to the reference plane K acts on 15b, 15c, and 20. If even one of the above-mentioned rigid body parts deforms in response to this force, it will not be possible to perform highly accurate displacement without causing secondary displacements in directions other than the z-axis direction. On the contrary, as long as it has high rigidity against the force in the above direction, the deformation shown in FIG. 2 can be obtained and a highly accurate displacement ε only in the z-axis direction can be obtained. Therefore, it is ideal that each rigid body part in this embodiment is rigid against all loads, but even if not, it is at least rigid against forces in the direction perpendicular to the reference plane K. is necessary. The same applies to the rigid body portions in each embodiment using a symmetrical parallel deflection beam displacement mechanism, which will be described later.

In this way, in this embodiment, since the parallel flexible beam structure is arranged plane-symmetrically to the reference plane, the interference displacement can be canceled, and the positioning accuracy can be dramatically improved. , a symmetrical flexible beam displacement mechanism laminated in multiple axes, which will be described later, can be easily constructed. Furthermore, since the piezoelectric actuator that generates the force is housed in the area formed by the rigid part of each parallel deflection beam displacement mechanism and the parallel deflection beam, the structure has a simple shape with no parts protruding to the outside. I can do it. This feature causes the flow of force generated by the piezoelectric actuator to pass in close proximity to each parallel flexible beam. That is, the flow of force generated by the actuators 19 and 19a flows through the rigid body parts 15a and 15b and the flexible beam 16.
When stacking such devices, the actuator described in the conventional example is Since the problem of interference is also solved, the symmetrical flexible beam displacement mechanism laminated on multiple axes described above can be constructed even more easily. Furthermore, when stacked on multiple axes, the output displacement of each axis of the multi-axis positioning mechanism can be accurately detected by the distortion of the parallel flexible beam, which is a part that is completely unaffected by other axes, and this detected value Since the force generated in the piezoelectric actuator is controlled based on be able to.

FIG. 3 is a side view of a fine positioning device according to a second embodiment of the present invention. In the figure, 25a, 25
In the figure, b and 25c are rigid body parts located on the left, right, and center, respectively. 26a and 26a' are plate-shaped radial deflection beams formed integrally with the rigid body parts 25a and 25c, respectively, and arranged radially from a fixed point O, and 26b and 26' are respectively formed integrally with the rigid body parts 25b . Reference numerals 27a and 27b are through holes formed to integrally form the radial bending beams 26a and 26a' and the radial bending beams 26b and 26b' with each rigid body portion, respectively. 28a is a protruding portion that protrudes from the rigid body portion 25a into the through hole 27a;
C ₁ is a protrusion that protrudes from the rigid body portion 25c into the through hole 27a, and these protrusions 28a and 28c ₁ overlap each other with a gap in the vertical direction of the figure. Similarly, 28b is the through hole 27 from the rigid body part 25b.
A protruding portion 28c ₂ protruding from the rigid body portion 25c to the through hole 27b is a protruding portion 28c 2 that protrudes from the rigid body portion 25c, and these protruding portions 28b and 28c ₂ have the same relationship as the protruding portions 28a and 28c ₁ . 29a is a piezoelectric actuator fixed between the protrusion 28a and the protrusion _28c1 ;
29b is a piezoelectric actuator fixed between the protrusion 28b and the protrusion _28c2 . When the piezoelectric actuators 29a and 29b draw a circle passing through the piezoelectric actuators 29a and 29b with the point O as the center, the piezoelectric actuators 29a and 29b generate a force f in the tangential direction of the circle (corresponding to the torque with respect to the point O) to each radial deflection beam. Causes bending deformation. The magnitude of these forces is controlled by the voltages applied to the piezoelectric actuators 29a, 29b.

Reference numeral 30 denotes a rigid structure that rigidly connects the rigid parts 25a and 25b to each other. 31 is a radial deflection beam 26
It is a strain gauge that detects the strain of the radial deflection beams 26a, 26a' and the rigid body part 25.
It is provided at the connecting portion with a and 25c.

In the above configuration, the rigid body parts 25a, 25c,
Radial deflection beams 26a, 26a', protrusions 28a, 2
8c ₁ , the piezoelectric actuator 29a constitutes one radial flexure beam displacement mechanism 32a, and the rigid body portions 25b, 25c and the radial flexure beams 26b, 26
b′, protrusions 28b, 28c ₂ , and the other radial deflection beam displacement mechanism 32b by the piezoelectric actuator 29b.
is configured. The radial deflection beam displacement mechanisms 32b, 32a move the radial deflection beams 26a, 26
It is in an axially symmetrical relationship with the radial deflection beam displacement mechanisms 32a, 32b with respect to the straight line where the planes constituted by a', 26b, and 26b' intersect. In this embodiment, this straight line is a line passing through point O and perpendicular to the plane of the paper. The radial deflection beam displacement mechanism 32a, which has such a line-symmetrical relationship,
32b constitutes a symmetrical radial deflection beam displacement mechanism 33. The straight line also serves as a reference axis indicating the position and installation direction of the symmetrical radial beam displacement mechanism 33.

Next, the operation of this embodiment will be explained with reference to FIGS. 4 and 5. FIG. 4 is a side view of the symmetrical radial flexure beam displacement mechanism shown in FIG. 3 after deformation. Now, by applying a voltage to the piezoelectric actuators 29a and 29b, the force f in the tangential direction of the same magnitude is applied.
to occur. Then, the protrusion 28c ₁ is pushed upward along the tangent line by the force generated in the piezoelectric actuator 29a, and the protrusion 28c ₂ is pushed downward along the tangent line by the force generated in the piezoelectric actuator 29b. The rigid body part 25c has radial deflection beams 26a, 2 on both rigid body parts 25a, 25b.
6a', 26b, and 26b', as a result of receiving the above force, the radial deflection beam 2
6a, 26a', 26b, 26b' rigid body parts 25a,
Straight lines L ₁ and L ₂ extend radially from point O to the portion connected to rigid body portion 25b, and straight lines L 1 _′ extend radially from point O to the portion connected to rigid body portion 25c.
A slight displacement occurs in which L ₂ ' is slightly shifted. Therefore, the rigid body portion 25c rotates by a minute angle δ in the clockwise direction in the figure. The magnitude of this rotational displacement δ is determined by the bending rigidity of the radial deflection beams 26a, 26a', 26b, and 26b', so if the force f is accurately controlled, the rotational displacement δ can also be controlled with the same precision. . In the past, various devices for moving the fine movement table in parallel have been proposed, as shown in FIGS. No such device has yet been proposed. This embodiment has various features similar to those of the first embodiment regarding rotational movement, and allows fine adjustment by rotational displacement.

By the way, in the symmetrical radial flexure beam displacement mechanism of this embodiment, as well as the single parallel flexure beam displacement mechanism in the symmetric parallel flexure beam displacement mechanism of the previous embodiment, only the radial flexure beam displacement mechanism 32a as a single unit is used. Rotational displacement is considered. Therefore, when a voltage is applied to the piezoelectric actuator 29a of this single radial flexure beam displacement mechanism 32a, this piezoelectric actuator 29a generates an upward force along the tangential direction, and the radial flexure beams 26a, 26a' are deflected, and the rigid body portion 25c rotates around point O. This deformed state is shown by the broken line in FIG. In FIG. 5, the protrusion 27
28a, the piezoelectric actuator 29a, and the rigid body portion 25a are omitted from illustration, and their deformations are exaggerated. As is clear from the figure, a single radial deflection beam displacement mechanism 32
A rotational displacement positioning device can also be obtained in case a, but in this case, the point O of the rigid body portion 25c is shifted to the point O', which is a secondary displacement.
However, a single radial deflection beam displacement mechanism 32a
is subjected to a force f by the piezoelectric actuator 29a, causing bending deformation in the radial deflection beams 26a, 26a', the rigid body portion 25c rotates around the reference axis passing through the point O, but at the same time, the secondary axis as shown in FIG. It also causes physical displacement. However, when a force f is applied to another single radial deflection beam displacement mechanism 32b located at a position axially symmetrical with respect to the reference axis in a direction axially symmetrical with respect to the reference axis, the displacement is still a rotational displacement around point O. is produced as the main displacement, but the secondary displacement that occurs at that time is axially symmetrical with the aforementioned secondary displacement with respect to the reference axis. Therefore, the secondary displacement in the radial flexure beam displacement mechanism 32a is canceled with the auxiliary displacement of equal magnitude and opposite direction occurring in the radial flexure beam displacement mechanism 32b, and in the symmetric radial flexure beam displacement mechanism 33, The secondary displacement does not appear. Therefore, the symmetrical radial flexure beam displacement mechanism 33 can obtain a more accurate rotational displacement δ compared to a single radial flexure beam displacement mechanism.

The rotational displacement δ is controlled by the feedback control system using the strain gauge 31 in accordance with the previous embodiment. Even in this case,
The strain gauge 31 is connected to the radial deflection beams 26a, 26
By being provided at the connecting portion between a' and the rigid body parts 25a and 25c, when the radial deflection beam displacement mechanism is combined in multiple axes, it is possible to accurately detect strain without being influenced by each other. This is the same as the previous example.

In addition, in the description of the second embodiment above, a symmetrical radial flexure beam displacement mechanism in which two sets of radial flexure beam displacement mechanisms are provided symmetrically was explained, but such a symmetrical arrangement is not necessarily required. It is obvious from the above explanation that the essential condition is that the shape is axially symmetrical with respect to the reference axis, and that the same function can be achieved even if the shape is not symmetrical. .

When the voltage applied to the piezoelectric actuators 29a, 29b is removed, each radiating deflection beam 26
a, 26a', 26b, and 26' return to the state before deformation, the symmetrical radial deflection beam displacement mechanism 33 returns to the state shown in FIG. 3, and the rotational displacement δ becomes zero.

Here, the rigid body parts 25a, 25b, 2 of this embodiment
5c and 30 are also similar to each rigid body part of the previous embodiment. That is, in order to produce a deformation that cancels out the secondary displacements of the flexible beams in the direction of contraction, as shown in FIG. Because it needs to stretch, a radial force (internal stress) perpendicular to the reference axis acts on each rigid body part. If even one of each rigid body portion deforms in response to this force, highly accurate rotational displacement cannot be obtained. Therefore, each rigid body part in this embodiment is "ideally rigid against all load components, but even if not, at least rigid against forces acting radially perpendicular to the reference axis." It is necessary. below,
The same applies to the rigid body portion in each embodiment using a symmetrical radial deflection beam displacement mechanism, which will be described later.

In this way, in this embodiment, since the radial deflection beam displacement mechanism is arranged axially symmetrically about the reference axis, it is possible to obtain rotational displacement with high precision, which could not be obtained conventionally. Moreover, it is therefore possible to easily construct a symmetrical flexible beam displacement mechanism laminated in multiple axes, which will be described later. Furthermore, since the piezoelectric actuator that generates force is housed in the area formed by the rigid body part of each radial flexure beam displacement mechanism and the radial flexure beam, the structure has a simple shape without any parts protruding to the outside. I can do it. This feature is because the flow of force generated by the piezoelectric actuator passes very close to each radial deflection beam displacement mechanism, so when stacking such devices, the actuators mentioned in the conventional example may interfere with each other. Since this also solves the problem, the symmetrical flexible beam displacement mechanism laminated on multiple axes described above can be constructed even more easily. Furthermore, when stacking multiple axes, the output displacement is accurately detected by the strain of the radial flexure beam, which is a part that is completely unaffected by other axes, and the force generated in the piezoelectric actuator is determined based on this detected value. Since this is controlled, together with the effect of eliminating interference displacement that the symmetrical radial flexure beam structure itself has, the positioning accuracy by the multi-axis laminate can be further improved.

FIG. 6 is a side view of a fine positioning device according to a third embodiment of the present invention. In the figure, parts that are the same as those shown in FIG. 3 are given the same reference numerals, and explanations thereof will be omitted. While the embodiment shown in Fig. 3 uses a piezoelectric actuator that generates a tangential force as the drive mechanism for generating rotational displacement, this embodiment uses the interaction between a permanent magnet and an electromagnet to move the actuator around the reference axis. This uses a torque generating mechanism that generates torque. 35 is a rigid body part corresponding to the rigid body part 25c shown in FIG. 3, 36 is a notch formed on one side of the rigid body part 35, and 36a is a circular arc shape centered on the reference axis in the center of the notch 36. It is a huge part. 37a and 37b are rigid body parts 25a and 2, respectively.
5b into the notch 36.
Reference numeral 38 indicates a torque generating mechanism, which is composed of an excitation section 38a and a cylindrical body 38b. The excitation part 38a is composed of one or more excitation windings (not shown) arranged at predetermined positions on the rigid body part 35 along the circular arc of the enlarged part 36a of the notch 36. Further, the cylindrical body 38b has the enlarged portion 36a inside thereof.
The magnet has one or more permanent magnets (not shown) arranged in a predetermined positional relationship with the excitation winding arranged in the excitation part 38a, in the part facing the excitation part 38a. 39 shows a symmetrical radial flexure beam displacement mechanism.

When a predetermined current is supplied to the excitation winding in the excitation part 38a, a torque is generated between the excitation part 38a and the permanent magnet arranged in the cylindrical body 38b due to an attractive force or a repulsive force according to the supplied current. . As a result, the rigid body part 35 rotates around the reference axis, and each radial flexure beam 26a, 26a', 26b, 26b' is moved as shown in FIG. 4 for the same reason as in the symmetrical radial flexure beam displacement mechanism shown in FIG. This results in deformation as shown in . That is, the rigid body part 35 is the rigid body part 25a, 25b.
Generates rotational displacement with respect to.

Note that a through hole may be formed in place of the notch, or a through hole may be formed orthogonal to the through hole from the side, and a torque generating mechanism may be provided at the orthogonal portion of each through hole. Further, the torque generating mechanism is not limited to a combination of a permanent magnet and an electromagnet, and any other suitable non-contact torque generating mechanism such as a combination of an electromagnet and an electromagnet can be used. Also, regarding the rigid body part, the second
This is the same as the rigid body part in the embodiment.

In this way, in this embodiment, the torque generating mechanism is provided at the center of the central rigid body part as a symmetrical radial deflection beam displacement mechanism, so that the same effect as in the second embodiment is achieved.

The functions of the symmetrical parallel flexural beam displacement mechanism and the symmetrical radial flexural beam displacement mechanism have been described above in detail.
This is a device that generates displacement in the directions of two coordinate axes and rotational displacement around one coordinate axis. By combining multiple symmetrical parallel deflection beam displacement mechanisms with their reference axes coincident or not parallel, fine positioning in two or three coordinate axes can be performed with one device. By combining multiple beam displacement mechanisms with their reference axes coincident or not parallel, fine positioning regarding rotational displacement around two or three coordinate axes can be performed with one device. It is clear that fine positioning with respect to displacements and rotational displacements about one to three coordinate axes can be performed with one device by appropriately combining them and a symmetrical radial deflection beam displacement mechanism.

By the way, when considering such combinations, with conventional devices, the limit is to obtain displacements about two coordinate axes as shown in Figure 20 with one device, and it is difficult to combine more than that. Even if it were possible, the structure would be complicated and would be impractical. Further, no device has been proposed that can obtain simple rotational displacement comparable to the structure shown in FIG. On the other hand, if the symmetrical parallel flexural beam displacement mechanism and the symmetrical radial flexural beam displacement mechanism of this embodiment are used, the above combination can be easily implemented as described earlier, and in addition, each Axial symmetrical parallel flexural beam displacement mechanism, symmetrical radial flexural beam displacement mechanism, displacement between each other,
It has the great feature of not causing interference with rotational displacement.

An example of the above-mentioned combination structure will be described below. The parallel flexure beams, radial flexure beams, protrusions protruding from each rigid body part shown in FIGS. 1 and 3, and piezoelectric actuators fixed between these protrusions Regarding the actuator, it seems easier to understand and less troublesome to consider it as one driving section. Therefore, in the following embodiment, the above-mentioned drive section of the symmetrical parallel deflection beam displacement mechanism is replaced with the linear drive section 5.
0, and the symbol of the coordinate axis in the direction of displacement by the linear drive unit 50 is attached to it.The drive unit of the symmetrical radial deflection beam displacement mechanism is also called the rotation drive unit 60, and the rotation The coordinate axes that are rotational axes of rotational displacement by the drive unit 60 are designated by reference numerals. Further, the illustrations of the linear drive unit 50 and the rotary drive unit 60 will be abbreviated in accordance with the above idea, and the abbreviations will be approximately S-shaped or approximately inverted S-shaped, as shown in FIGS. 7a and 7b. do. Note that this S-shape or inverted S-shape is a shape that matches the protrusion direction of the protrusion of the related rigid body part. Examples of the above combinations will be described below.

FIG. 8 is a partially cutaway perspective view of a fine positioning device according to a fourth embodiment of the present invention. The device of this embodiment has three axes x, when the coordinate axes are set as shown in the figure.
This is a device that generates displacement in y and z. In the figure, 70 is a rigid cross-shaped column formed in a cross shape, and 71
is a rigid body portion connected to the cross-shaped column 70, and 72 is a rigid body portion connected to the cross-shaped column 70, which are integrally formed from one rigid block.

73 is a first column forming the cross-shaped column 70, 74 is a second column forming the cross-shaped column 70, and the first column 73 and the second column 74 are orthogonal to each other. are doing. The first column body 73 is a rigid body part 73
It consists of a ₁ , 73a ₂ , 73b ₁ , 73b ₂ , 70c and linear drive parts 50x, 50z, and includes two symmetrical parallel flexible beam displacement mechanisms. The second columnar body 74 includes rigid body parts 74a, 74b, 70c and linear drive part 5.
0y, one symmetrical parallel deflection beam displacement mechanism is constructed. The rigid body part 70c has both pillar bodies 73, 7
4 is the central rigid body part shared by the two. The rigid part 71 is connected to rigid parts 73a ₁ and 73b ₁ at both ends of the first column 73 (separated from the second column 74), and the rigid part 72 is connected to both ends of the second column 74. (separated from the first column 73). In the first columnar body 73, one side of the linear drive section 50z constituting the symmetrical parallel deflection beam displacement mechanism is the rigid section 73a ₁ , 73
a ₂ , and the other is formed between rigid body parts 73b ₁ and 73b ₂ . Moreover, one side of the linear drive part 50x is formed between the rigid body parts 73a ₂ and 70c, and the other side is formed between the rigid body parts 73b ₂ and 70c. Furthermore, in the second column 74, the linear drive section 50y constituting the symmetrical parallel deflection beam displacement mechanism has one side between the rigid body parts 74a and 70c, and the other side between the rigid body parts 74a and 70c.
It is formed between b and 70c.

All reference axes of the symmetrical parallel deflection beam displacement mechanism constructed within the cross-shaped column 70 are the central rigid body section 7.
Passes through the center of 0c. The reference axis of the symmetrical parallel flexible beam displacement mechanism composed of the linear drive unit 50x coincides with the x-axis, and the reference axis of the symmetrical parallel flexible beam displacement mechanism composed of the linear drive unit 50y coincides with the y-axis, The reference axis of the symmetrical parallel flexible beam displacement mechanism composed of the linear drive unit 50z coincides with the z-axis. As a result, the reference axes of the three symmetric parallel deflection beam displacement mechanisms constructed within the cross-shaped column 70 are orthogonal to each other.

Note that the paired linear drive units 50x, 50
As shown in Fig. 1, strain gauges are arranged on the parallel deflection beam at y, 50z, but if they are written in the drawing, the drawing becomes difficult to read, so the drawing will be omitted (see the example below). (The same applies to

Next, the operation of this embodiment will be explained. First, consider the case where two linear drive units 50z are driven (voltage is applied to the piezoelectric actuators). _In this case, as described in _the explanation of the embodiment shown in _FIG .
A relative displacement ε _z occurs between b ₂ respectively. here,
The rigid body parts 73a ₁ and 73b ₁ are integrally configured with the rigid body part 71, and the rigid body parts 73a ₂ and 73b ₂ are connected to each linear drive part 50x, which has sufficient rigidity against the force in the z-axis direction, and the central rigid body part 70c. , each linear drive section 50y and rigid body sections 74a and 74b that are sufficiently rigid to withstand the force in the z-axis direction.
It is connected to the rigid body part 72 via. That is, z
Regarding the force in the axial direction, the rigid body parts 73a ₁ and 73b ₁ on one side of the linear drive section 50z are rigidly connected to the rigid body part 71, and the rigid body parts 73a ₂ and 73b ₂ on the other side are rigidly connected to the rigid body part 71.
is rigidly connected to the rigid body portion 72.
Therefore, when the linear drive section 50z is driven, a relative displacement εz in the z-axis direction is applied between the rigid body section 71 and the rigid body section 72.

Similarly, when the linear drive section 50x is driven, the rigid section 73a ₂ on one side of the linear drive section 50z, which is sufficiently rigid to withstand the force in the x-axis direction, the rigid section 73a ₁ ,
Rigidly connected to the rigid body part 71 via _73b1 , and
The rigid body part 70c on the other side includes a linear drive part 50y that is sufficiently rigid to withstand the force in the x-axis direction, a rigid body part 74a,
Since it is rigidly connected to the rigid body part 72 via the rigid body part 74b, a relative displacement εx in the x-axis direction is eventually applied between the rigid body part 71 and the rigid body part 72.

Furthermore, when the linear drive section 50y is driven, the rigid body section 70c on one side is divided into the linear drive section 50x, which is sufficiently rigid against the force in the y-axis direction, the rigid body section 73a ₂ ,
73b ₂ , a linear drive part 50z that is sufficiently rigid to withstand the force in the y-axis direction, is rigidly connected to the rigid body part 71 via the rigid body parts 73a ₁ and 73b ₁ , and is connected to the rigid body part 7 on the other side.
4a and 74b are connected to the rigid body part 72, so in the end, between the rigid body part 71 and the rigid body part 72,
A relative displacement εy in the y-axis direction is given.

Therefore, for example, the rigid body part 72 is fixed to a support stand shown in FIG. When the fine movement table is fixed, a three-dimensional fine positioning mechanism is constructed.

As can be seen from the explanation of the first embodiment, the flow of force generated in the linear drive section only passes through the vicinity of the linear drive section, and does not pass through other symmetrical parallel deflection beam displacement mechanisms. . Therefore, it is originally characterized in that displacement in each axial direction can be generated independently without affecting the others. However, even in special cases where a heavy object is placed on the fine movement table or a resistance force is generated during fine movement, each symmetrical parallel flexible beam structure has its reference axes orthogonal to each other, as is clear from the explanation of the operation above. The parallel flexible beams of the linear drive part of each symmetrical parallel flexible beam structure have sufficiently high rigidity against forces in other axial directions, so that the displacement in each axial direction is can occur independently without affecting others,
Moreover, its accuracy is extremely high. Furthermore, for the same reason, strain gauges (not shown) are used to detect strain in each drive section without being affected by other axes, so that the accuracy of detecting the output displacement of the displacement mechanism is extremely high.

In this way, in this example, the three symmetrical parallel deflection beam displacement mechanisms are arranged in a cross-shaped structure with their reference axes perpendicular to each other, so that highly accurate three-dimensional fine positioning can be performed. Moreover, since there is no mutual interference with other axes, the device can be easily configured. Furthermore, since the output displacement of the displacement mechanism is obtained by the strain gauge, it is also possible to further improve the positioning accuracy of each axis through feedback control. Furthermore, since the linear drive section is incorporated into the symmetrical parallel deflection beam displacement mechanism and there is no protruding part, it is possible to easily construct a three-dimensional fine positioning mechanism using a cross-shaped column in a very compact form. can. Furthermore, since the device of this embodiment can be manufactured as a single piece using a cylindrical rigid block as a material by simply machining, processing costs and number of parts can be reduced, downsizing, and linearity due to the absence of backlash or sliding parts. This makes it possible to improve performance and eliminate hysteresis.

9a and 9b are a plan view and a side view of a fine positioning device according to a fifth embodiment of the present invention. The device of this embodiment is a device that generates rotational displacement in two axes (y-axis, z-axis) when the coordinate axes are set as shown. In the figure, 75a and 75b are rigid parts, and 76
a and 76b are rigid body parts with small thickness, and 75c is a central rigid body part. A rotary drive unit 60z is connected between the rigid body parts 75c and 76a and between the rigid body parts 75c and 76b, and the rigid body parts 76a and 75a are connected to each other.
A rotation drive unit 60y is connected between the rigid body parts 76b and 75b. Rigid body part 75
The other ends of a and 75b are connected to each other by a rigid structure (not shown). Each rigid body part 75
a, 75b, 75c, 76a, 76b and each rotary drive section 60y, 60z are integrally formed from one rigid block.

Lines L ₁ and L ₂ extending through the center of each radial deflection beam of each rotation drive unit 60z intersect at an angle θ ₂ on the reference axis of the rotation drive unit 60z, which passes through point O of the rigid body portion 75c perpendicularly to the plane of the paper. In addition, each rotation drive unit 60y
A line L ₃ extending through the center of each radial deflection beam in ,
L ₄ is an angle θ ₁ on the reference axis of the rotary drive unit 60y
Intersect at Therefore, the device of this embodiment is a device that integrally combines a symmetrical radial beam displacement mechanism that generates rotational displacement around the y-axis and a symmetrical radial beam displacement mechanism that generates rotational displacement around the z-axis. Become.

Next, the operation of this embodiment will be explained. When the two rotary drive units 60z are driven, as described in the explanation of the embodiment shown in FIG.
A relative rotational displacement δz about the z-axis with respect to 6a and 76b occurs. Here, rigid body parts 76a, 76b
Even if the thickness is small, the rotary drive portion 60y immediately adjacent thereto has sufficiently high rigidity against the torque around the z-axis, so it has sufficiently high rigidity against the torque around the z-axis. That is, when looking at the torque around the z-axis, the rotational drive unit 60z
One side (the side opposite to the rigid body part 75c) is rigidly connected to the rigid body parts 75a, 75b despite the presence of the thin rigid body parts 76a, 76b and the rotation drive part 60y. Therefore, when the rotation drive section 60z is driven, the central rigid body section 7
A relative rotational displacement δz around the z-axis is applied between the rigid body portions 5c and the rigid body portions 75a and 75b.

Similarly, when the rotary drive section 60y is driven, the rotation drive section 60y and the central rigid body section 7
5c is rigidly connected to the central rigid body part 75c and the rigid body parts 75a and 75b.
The relative rotational displacement δy around the axis will be given.

By the way, as can be seen from the explanation of the second embodiment, the flow of force that acts to generate torque in the rotary drive section only passes through the vicinity of the rotation drive section, and does not apply to other symmetrical radial deflection beam displacement mechanisms. It is in a form that does not pass through. Therefore, as with the fourth embodiment, there is a feature that changes around each axis can be generated independently without affecting the others, and there is also a feature that a heavy object can be placed on the fine movement table. As is clear from the above explanation of the operation, each symmetrical radial flexure beam displacement mechanism is arranged so that each reference axis is orthogonal to each other, and each radial flexure beam Since the radial deflection beam of the rotational drive part of the displacement mechanism has sufficiently high rigidity against torques about other axes, rotational displacements about each axis occur independently without affecting each other. The accuracy is extremely high. For the same reason, correction by detecting strain using a strain gauge (not shown) is effective.

It is clear that by adding another set of rotary drive units that provide rotational displacement around the x-axis to the structure of this embodiment, it is possible to configure a device that provides three-dimensional rotational displacement.

In this way, in this embodiment, two symmetrical radial flexure beam structures are combined so that their reference axes are perpendicular to each other, so it is possible to generate two-dimensional rotational displacement with high precision. Since there is no mutual interference with other axes, the device can be configured easily. The effects of the feedback control using a strain gauge, the incorporation of the rotary drive section into the symmetrical radial deflection beam displacement mechanism, and the integral structure of the device are the same as those of the fourth embodiment.

10a and 10b are perspective views of a fine positioning device according to a sixth embodiment of the present invention. The device of this embodiment is a device that generates displacement in three axes x, y, and z when the coordinate axes are set as shown, and in this respect it is the same as the fourth embodiment shown in FIG. ,
The arrangement structure of the linear drive unit 50z in the z-axis direction is different. In FIG. 10a, 80 is a cross-shaped column formed in a substantially cross shape, 81 is a first column forming the cross-shaped column 80, and 82 is a second column forming the cross-shaped column 80. The first column body 81 and the second column body 81 are
The pillar bodies 82 are orthogonal to each other. The first column 81 constitutes a symmetrical parallel deflection beam displacement mechanism with the x-axis as the reference axis, and its two linear drive parts 50x are shown. In addition, the second column 82
constitutes a symmetrical parallel flexible beam displacement mechanism with the y-axis as the reference axis, and its two linear drive sections 50y are shown. 83a, 83b, 83
c and 83d are intermediate portions of rigid bodies formed between the first column 81 and the second column 82, respectively.
Reference numeral 84 denotes a central through hole formed in the z-axis direction with an appropriate diameter centered on the intersection of the center lines of the first column 81 and the second column 82. 85a, 85b, 85
Reference numerals c and 85d designate side through holes that pass through each of the intermediate portions 83a, 83b, 83c, and 83d from the outer surface of each intermediate portion toward the center through hole. Each side through hole 85a,
85b, 85c, and 85d are formed in directions orthogonal to each other. In this way, each side through hole 85
By forming the intermediate portions 83, 83b, 83c, and 83d, vertically parallel flexible beams are formed in the intermediate portions 83, 83b, 83c, and 83d. In such a side through-hole, a linear drive section 50z is provided in parallel to the z-axis direction. In addition, the fourth
As in the embodiment, both ends of the rigid column 81 and both ends of the rigid column 82 are connected by other rigid structures.

Next, the operation of this embodiment will be explained with reference to FIG. 10b. When the linear drive unit 50x is driven,
A relative displacement occurs in the x-axis direction between the rigid portion of the linear drive portion 50x on the side of the central through hole 84 and the outer rigid portion on the opposite side. Here, each linear drive unit 5
0y and each linear drive section 50z have sufficiently high rigidity to withstand the force in the x-axis direction, and this portion can also be regarded as rigid. Furthermore, when the linear drive section 50y is driven, a relative displacement occurs in the y-axis direction between the rigid section of the linear drive section 50y on the central through hole 84 side and the outer rigid section on the opposite side. Also in this case, each linear drive section 50x and each linear drive section 50
Since z has sufficiently high rigidity to withstand the force in the y-axis direction, this portion can be regarded as a rigid body.

Furthermore, when each linear drive unit 50z is driven, the space between the first column 81 and the rigid body portion of each intermediate portion continuous thereto, and the second column 82 and the rigid body portion of each intermediate portion continuous thereto. z as shown in Figure 10b.
This results in a relative displacement εz in the axial direction. In addition, Figure 10b
Now, for ease of understanding, the shape before deformation shown in FIG.
It is shown in a deformed state as indicated by the small arrow. In this way, even when the relative displacement εz in the z-axis direction occurs, the linear drive parts 50x and 50y have high rigidity against the force in the z-axis direction, so this portion can be regarded as a rigid body.

In this embodiment, the central portion of the cross-shaped columnar body 80, that is, the portion connected to the linear drive sections 50x and 50y, is rigid against all loads because the linear drive section 50z is configured. I can't say that there is. However, as is clear from the above description, with respect to the force in the direction of displacement of the linear drive parts 50x, 50y, these can be considered to be rigid parts, and the desired displacement can be generated. Therefore, this part can be called a semi-rigid structure.

Here, a comparison will be made between this embodiment and the fourth embodiment shown in FIG. In the fourth embodiment, two sets of linear drive units 50x and 50z are incorporated into a first column 73 extending in the y-axis direction. Considering this from the viewpoint of stacking the drive members as densely as possible, the second column 74 has only one set of linear drive parts 50y built in compared to the first column 73. Therefore, space is wasted. Furthermore, considering from the viewpoint of axial symmetry with respect to the z-axis, the first column 73 and the second column 74 have different rigid bodies (in the x-axis direction and the y-axis direction), and the rigid bodies are different from each other in the x-axis direction and the y-axis direction, and the This results in very slight but undesirable effects. In contrast, in this example, the space is used effectively and
It has complete axis symmetry with respect to the z-axis, which eliminates the above-mentioned adverse effects and contributes to improved accuracy.

Next, let us consider the arrangement and effects of the parallel deflection beam displacement mechanism that constitutes the linear drive section 50z in the z-axis direction in FIG. 10a. As is clear from the figure, the four parallel deflection beam displacement mechanisms are symmetrical with respect to each of the xz plane and the yz plane. For this reason, the linear drive section 50
When the flexible beam undergoes bending deformation due to the force exerted by the piezoelectric actuator in z, the secondary displacements that would have occurred in the case of a single parallel flexible beam displacement mechanism are as follows: The parallel flexure beam displacement mechanism completely cancels each other. Therefore, it has the same effect as described in the first embodiment. The reference axis of this symmetrical parallel deflection beam displacement mechanism is the z-axis in the figure.

As described above, in this embodiment, three symmetrical parallel flexible beam displacement mechanisms are arranged in a substantially cross-shaped column so that their reference axes are perpendicular to each other, and each parallel flexible beam displacement mechanism is arranged in a plane-symmetrical manner. Since the structure has the same characteristics as the fourth embodiment, not only can it achieve the same effect as that of the fourth embodiment, but it can also be expected to achieve fine positioning with even higher precision. It can be configured to be small.

11 to 14 are diagrams showing a fine positioning device according to a seventh embodiment of the present invention, and FIG.
The figure is a perspective view, Figure 12 is a partially sectional plan view, and Figure 13 is a partially sectional plan view.
The figure is a partially sectional side view taken along the line - shown in Fig. 12, and Fig. 14 is a side view taken along the line - shown in Fig. 12.
FIG. The device of this embodiment has three axes x, when the coordinate axes are set as shown in the figure.
This is a device that generates displacement and rotational displacement in y and z, and has a structure in which the structures shown in FIGS. 8, 9a and 9b, and 10a are appropriately combined. In each figure, 90 is a rigid cross-shaped column formed in a substantially cross shape, 91 is a rigid body part connected to the cross-shaped column 90, 72 is a rigid body part connected to the cross-shaped column 90, These are integrally formed from one rigid block.

Reference numeral 93 denotes a first column that constitutes the cross-shaped column 90 and extends in the y-axis direction, and 74 denotes a second column that constitutes the cross-shaped column 90 and extends in the x-axis direction. These are quasi-rigid structures 90c that are rigid except for forces in the z-axis direction.
are shared. The first column body 93 is a rigid body part 93
a ₁ , 93a ₂ , 93a ₃ , 93b ₁ , 93b ₂ , 93b ₃ ,
It consists of a semi-rigid structure 90c, a linear drive section 50x, and a rotational drive section 60x, 60z, including one symmetric parallel flexure beam displacement mechanism and two symmetric radial flexure beam displacement mechanisms. The second columnar body 94 includes rigid parts 94a ₁ , 94a ₂ , 94b ₁ , 94b ₂ and a semi-rigid structure 9
0c, linear drive section 50y and rotation drive section 60y
and includes one symmetric parallel flexure beam displacement mechanism and one symmetric radial flexure beam displacement mechanism.
The rigid body portions 91 are the rigid body portions 93 at both ends of the first column body 93.
a ₁ , 93b ₁ (separated from the second column 94), the rigid portion 92 is connected to the second column 9
₄ (separated from the first column ₉₃ ).

Here, the arrangement of the linear drive section and the rotation drive section in the first column body 93 and the second column body 94 will be explained. In the first column 93, the linear drive section 50x constituting the symmetrical parallel deflection beam displacement mechanism has one side between the rigid body parts 93a ₁ and 93a ₂ and the other side between the rigid body parts 93a 1 and 93a 2 .
b ₁ , 93b ₂ and constitutes a symmetrical radial deflection beam structure, one side is between the rigid body parts 93a ₂ , 93a ₃ and the other side is between the rigid body parts 93b ₂ , 93
b ₃ and which constitutes a symmetrical radial deflection beam displacement mechanism, one side is connected to the rigid body part 93.
a ₃ and 93c, the other is formed between the rigid body part 93b ₃ and the semi-rigid body structure 90c. Also, the second column 9
4, the linear drive section 50y constituting the symmetrical parallel deflection beam displacement mechanism has one side rigid body section 94a ₁ ,
94a ₂ and the other between rigid body parts 94b ₁ and 94b ₂ , and constitutes _a symmetrical radial deflection beam displacement mechanism.
between c, the other is the rigid body part 94b ₂ and the semi-rigid body structure 94c
is formed between.

Next, the configuration of the semi-rigid structure 90c will be explained. Reference numeral 95 indicates four intermediate portions existing between the first column 93 and the second column 94. Reference numeral 96 denotes a central through hole of an appropriate diameter that is opened in the z-axis direction at the center of the semi-rigid structure 90c. Reference numeral 97 (FIG. 12) denotes a side through-hole formed from the outside into the central through-hole 96 through each intermediate portion 95, and each side through-hole 97 is formed toward the z-axis. These side through holes 9
A linear drive unit 50z is provided within the unit 7.

In the above configuration, the linear drive units 50x, 50
The reference axes of each symmetrical parallel deflection beam displacement mechanism configured with y and 50z are orthogonal to x.
axis, y-axis, and z-axis, and the rotational drive unit 60
The reference axes of each symmetrical radial deflection beam displacement mechanism constituted by x, 60y, and 60z also coincide with the x-axis, y-axis, and z-axis, which are perpendicular to each other.

Note that P represents the intersection of the x-axis, y-axis, and z-axis, θ ₁ represents the radiation angle of the radial bending beams of the rotary drive units 60x and 60y, and θ ₂ represents the radiation angle of the radial bending beam of the rotation drive unit 60z.

Next, the operation of this embodiment will be explained. Since the operation is based on the operation of the embodiment shown in FIG. 8, FIG. 9 a, b, and FIG. The explanation will be limited to the operation when the rotation drive unit 60x at 93 is driven. When the rotation drive unit 60x is driven, the rigid body parts 93a ₂ and 93b ₂ and the rigid body part 93
A relative rotational displacement around the x-axis occurs between a ₃ and 93b ₃ . However, since the linear drive section 50x has sufficiently high rigidity against torque around the x-axis, in this case, the rigid sections 93a ₂ and 93b ₂ are connected to each other through the linear drive section 50x and the rigid sections 93a ₁ and 93b ₁ Thus, it is rigidly connected to the rigid body part 91. On the other hand, the rotation drive unit 60z, the semi-rigid structure 90c, the second
Since the rotational drive section 60y and the linear drive section 50y provided on the columnar body 94 also have sufficiently high rigidity against the torque around the x-axis, in this case, the rigid body sections 93a ₃ and 93b ₃ are section 60z, semi-rigid structure 90c, rotational drive section 60y, rigid section 94
It is rigidly connected to the rigid body part 92 via a ₁ , 94b ₂ , the linear drive part 50y, and the rigid body part 94b ₁ . After all, when the rotational drive section 60x is driven, a relative rotational displacement δx about the x-axis is applied between the rigid body section 91 and the rigid body section 92.

Since the operations when the other linear drive units and rotary drive units are driven are similar to this, in this embodiment, displacement in each axial direction and rotational displacement around each axis can be generated independently. and,
For example, if the rigid body part 92 is fixed to a support stand or a coarse movement table shown in FIG. 18, and a fine movement table is fixed to the rigid body part 91, a highly accurate fine positioning mechanism that generates three-dimensional displacement and rotational displacement is constructed. will be done.

By the way, when a rotational displacement mechanism with two or more axes is incorporated as in this embodiment, the rotation center P of each rotational displacement mechanism becomes the center of the entire fine positioning device. In this case, the fine movement table may be designed so that a certain reference point on the surface thereof coincides with its center of rotation. However, this imposes large restrictions on the size, arrangement, etc. of the fine movement table, and it is conceivable that practical problems may arise. In the above embodiment, an example in which the fine movement table is fixed to the rigid body part 91 has been described, but the simplest configuration is a method in which the rigid body part 91 is the fine movement table itself. However, if this is done, displacement interference will occur due to the geometrical relationship. This will be explained using a diagram.

FIG. 15 is a simplified side view of FIG. 13. In the figure, only the parts necessary for explanation are given the same reference numerals as those shown in FIG. 13. Now, rigid body part 9
2 is fixed and the rotational drive unit 60y is driven, a rotational displacement δy is generated around the point P. In order to facilitate understanding, the rotational displacement δy is drawn significantly enlarged, and the rigid body part 91 itself is used as a fine movement table, and the point Q on the surface thereof is used as a reference point. With respect to the rotational displacement δy, point Q produces the following displacements εxy, εzy in the x-axis and z-axis directions.

εxy=Zosinδy εzy=−Zo(1−cosδy) Note that Zo is the distance between the point P and the point Q in the z-axis direction. Similarly, for the rotational displacement around the x-axis, the following displacements in the y-axis and z-axis directions εyx,
produces εzx.

εyx＝−Zosinδx εzx＝−Zo(1−cosδx) These displacements are caused by purely geometric relationships caused by the distance Zo, and their characteristics are completely different from the secondary displacements mentioned earlier. It is meant to be. Since the exact value of the distance Zo is known, the desired fine movement table displacements εxo, εyo, εzo,
For δxo, δyo, δzo, εxo′=εxo+εxy=εxo+Zosinδyo εyo′=εyo+εyx=εyo−Zosinδxo εzo′=εzo+εzx+εzy =εzo−Zo (2−cosδxo
=
cosδyo) δxo′＝δxo δyo′＝δyo δzo′＝δzo Displacement εxo′, δyo′, εzo′, δxo′, δyo′, δ
By inputting an input corresponding to zo' to each displacement mechanism, displacement interference can be easily eliminated, and fine positioning can be performed without compromising high precision at all. In addition,
The above matters also apply to the fifth embodiment.

As described above, in this embodiment, a symmetrical parallel flexural beam displacement mechanism and a symmetrical radial flexural beam displacement mechanism, each of which uses each of the three orthogonal axes as a reference axis, are configured and arranged in a cross-shaped column. Therefore, highly accurate positioning can be performed in terms of three-dimensional displacement and rotational displacement, and the apparatus can be easily configured. The effects regarding feedback control using a strain gauge, the effects regarding internal integration of the linear drive section and the rotary drive section, and the effects regarding the integrated structure of the device are the same as those of the fourth embodiment.

16a and 16b are partial side views of a fine positioning device according to an eighth embodiment of the present invention. In each of the above embodiments, the embodiments mainly use a laminated piezoelectric actuator, but a special example different from this will be explained with the drawings. The laminated piezoelectric actuator that has been described so far is one in which piezoelectric elements that expand and contract in the thickness direction to which a voltage is applied are further laminated in the thickness direction.Its characteristic is that it can generate a large force, but the disadvantage is that the displacement is small. That's true.
However, by using a bimorph element as an actuator, which can obtain a large displacement even though the generated force is small, all the features mentioned so far can be exhibited. Another feature is added that allows for displacement. A bimorph element is a piezoelectric actuator in which piezoelectric elements that deform in the expansion and contraction direction of a flat plate when a voltage is applied are fitted together so that when one expands, the other contracts. For this reason, bimorph elements are used as actuators that bend in response to voltage, and when one end is fixed, the other end is largely displaced.

FIG. 16a shows a flexible beam 103 linking rigid parts 101 and 102. FIG. This figure is representative of all the flexible beams used in all the embodiments up to now. The thickness of the flexible beam 103 is made thinner and the length is increased to lower the rigidity, and piezoelectric elements having different expansion and contraction directions are attached above and below it. The piezoelectric elements 104, 104' extend in the direction of a certain applied voltage, and the piezoelectric elements 105, 105' contract at that time. Of course, if the direction of the applied voltage is reversed, the direction of expansion and contraction will also be reversed. In the figure, the contact portions of the piezoelectric elements 104, 104' on the extension side and the piezoelectric elements 105, 105' on the contraction side, respectively, are approximately at the center of the flexible beam 103. Bimorph structure 10 constructed in this way
When a voltage is applied to the flexible beam 6 so as to make it expand and contract as shown in Fig. 16a, the left half of the flexible beam in the figure bends convexly upward, the right half bends convexly downward, and just as the second The deformation mode of each flexible beam portion is as shown in FIGS. Therefore, a relative displacement occurs between the rigid body parts 101 and 102 that causes bending deformation of the flexible beam 103. That is, the actuator can also be constructed by configuring the bimorph structure 106 of this type in a flexible beam portion.

At this time, it is ideal that all the flexible beams constituting the parallel flexible beam structure and the radial flexible beam structure are provided with the bimorph structure 106 of the same shape, but it is also possible to provide only a portion of the bimorph structure 106, in particular, only one flexible beam. The reason for this is that the parallel flexural beam structure and radial flexural beam structure themselves have the characteristic that when force or torque in the direction of bending the flexural beam is applied, only translational displacement and rotational displacement occur, respectively. When providing the bimorph structure 106 only on some of the flexible beams, care must be taken to ensure that the rigidity of each flexible beam in the bending direction and the expansion/contraction direction is equal. This is because this is an essential condition for maintaining the basic characteristics of each flexible beam structure.

Considering its principle, the bimorph structure shown in FIG. 16a may have only piezoelectric elements 104 and 105 (or only piezoelectric elements 104' and 105'). This type of element is usually called a unimorph element.

The method shown in FIG. 16b is based on the same principle as in FIG. 16a, but is easier to implement in practice. The difference from Figure A is that piezoelectric elements 104, 104', 105, 1 are placed on the upper and lower surfaces of the thin plate member 107 in the same relationship as in Figure A.
05' is attached to the rigid body parts 101, 1 on both sides using fastening members such as bolts 109.
02, respectively. This method is more practical because the bimorph element 108 is easier to manufacture and easier to replace. Other than that, the characteristics of FIG. 16a apply as they are.

Several embodiments of the present invention have been described above.
All of these embodiments relate to fine positioning devices, and are also consistent with the name of the present invention. However, the term "fine positioning device" as used in the present invention means a device that generates minute displacements and minute rotational displacements, and the fine positioning device exemplified in the description of the embodiments is a typical example of the field of use of the present invention. This is because it takes into consideration that it is a positioning device, and is considered to express the content of the present invention most simply and directly. Therefore, the application of the present invention is not limited to positioning devices. In other words, in addition to the positioning device, there are also devices that deform the sample by a desired minute displacement to examine the displacement of the contact surface and changes in the physical properties of the sample, and devices that apply precise loads to each crystal direction of a single crystal. There are loading devices within the fine displacement range.

By the way, in a fine positioning device, the fine positioning section usually uses a silicon wafer, optical fiber, or
Light weight items such as microscope samples that do not generate resistance when moved are often placed or attached. In this case, each rigid body part of the device and other driving parts interposed in between are "rigid against forces perpendicular to the reference plane" and "rigid against forces acting radially perpendicular to the reference axis". That's fine. On the other hand, in other above-mentioned devices, a resistance force is generated with minute displacement, so each rigid body part and each other intermediate drive part are not rigid against force or torque in a predetermined displacement direction. There needs to be.
In each of the embodiments of the present invention, as described above, all
It also satisfies the following conditions. Therefore, the structure is such that it can withstand use as a loading device.

In addition, as a more general condition, in the present invention, the rigid body section is ``rigid at least against the force in the direction perpendicular to the reference plane'' for the symmetrical parallel deflection beam displacement mechanism, as mentioned earlier. It is clear that the symmetrical radial deflection beam displacement mechanism is a part or member that is "rigid at least against forces acting radially perpendicular to the reference axis."

Considering the rigid body part as described above, in the explanation of each of the above embodiments, a single parallel flexure beam displacement mechanism (linear drive unit) is symmetrically connected by the rigid body part, and a single radial flexure beam displacement mechanism (rotation The explanation has been given based on the view that the drive unit (driving unit) is connected symmetrically by a rigid body part, but from a different perspective, it is a configuration in which multiple sets of parallel flexible beams are arranged symmetrically with respect to a certain plane, or A plurality of sets of radial flexible beams arranged axially symmetrically with respect to a certain axis are symmetrically connected to each other by a structure that is rigid against forces in at least the above directions with respect to these flexible beams, and furthermore, the ends of the flexible beams are connected to each other symmetrically by a structure that is rigid against forces in at least the above directions. It can also be seen as a configuration in which the structures are connected.

Furthermore, regarding the reference axes, in the laminated shape embodiments after the fourth embodiment, examples in which the reference axes are orthogonal have been described, but it is natural that the reference axes do not necessarily need to be orthogonal. . As can be seen from the sixth and seventh embodiments, the reference axis is not necessarily located on the rigid body section.

In addition, in the explanation of each of the above embodiments, a configuration in which a set of two parallel flexible beams or a radial flexible beam is used is illustrated and explained, but these are not limited to two, and three or more beams are used. It is obvious that a configuration in which a plurality of sheets are combined into one set is also acceptable. Furthermore, although the parallel deflection beams and radial deflection beams have been explained by exemplifying flat plate-like beams with the same thickness, they are not necessarily limited to those with uniform thickness. The shape of the through-hole that penetrates the block can be selected from various shapes from the viewpoint of processing, etc., and the through-hole can have a non-uniform thickness accordingly.

Furthermore, in the description of the above embodiments, a piezoelectric actuator was used as an example of the actuator, but the actuator is not limited to the piezoelectric actuator, and a solenoid or other suitable actuator may be used. Moreover, although the example in which the actuator is installed on both sides except for the third embodiment has been described, it is not necessarily necessary to provide it on both sides, and it may be installed only on either side. The reason for this can be explained by taking the symmetrical parallel deflection beam displacement mechanism shown in Fig. 1 as an example.
A case where only piezoelectric actuator 9a is present and piezoelectric actuator 19b is not present will be briefly described. When the piezoelectric actuator 19a is driven, a force f acts, and the center of the reference plane K and the piezoelectric actuator 19a
A moment f1 acts depending on the distance 1 between the two. The effect of the force f has been explained in each embodiment. On the other hand, the moment f1 stretches the parallel flexible beams 16a, 16b',
16b, but the parallel deflection beam displacement mechanism has high rigidity against such deformations. Therefore, piezoelectric actuator 1
Even in the case of a symmetric parallel deflection beam displacement mechanism without 9b, only the force f acts on it, resulting in deformation as shown in FIG. Furthermore, as an example of the installation location of the actuator, an area surrounded by two rigid body parts and a parallel flexible beam or a radial flexible beam that connects them is illustrated, but it is also possible to install the bimorph element as described above on the flexible beam. Alternatively, a concave portion may be provided in one rigid body portion, and a protrusion portion protruding from the other rigid body portion may be inserted into the second concave portion.
An actuator can be installed between the inserted protrusion and the one rigid body part, and further, as shown in FIG. Even if the actuator 19 is provided, the characteristic of only generating displacement in a predetermined direction or rotational displacement is maintained, and the point is that it is sufficient to be able to generate relative force or torque between both rigid body parts.

Furthermore, in the description of the above embodiments, the fine positioning device was explained by exemplifying the configuration in which it is integrally formed from one rigid block as the most ideal embodiment, but each part formed separately is connected to a member such as a bolt. They may also be rigidly connected to each other by welding or the like.

Furthermore, the means for detecting the displacement and stress strain of the flexible beam is not limited to strain gauges, and other means can also be used. It can also be installed on the flexible beam. Furthermore, a feedback control system including such a strain detection means is not necessarily necessary, and it is clear that minute displacements and minute rotational displacements can be obtained with sufficient precision even without it.

〔Effect of the invention〕

As described above, in the present invention, since at least one fine positioning device of the symmetric parallel flexure beam displacement mechanism and the symmetric radial flexure beam displacement mechanism is configured, it is possible to prevent interference displacement from occurring. Accurate minute displacement and minute rotational displacement can be obtained, and a multi-axis positioning device can be easily constructed.

[Brief explanation of drawings]

1 and 2 are side views of a fine positioning device according to a first embodiment of the present invention, FIGS. 3 and 4 are side views of a fine positioning device according to a second embodiment of the present invention, FIG. 5 is an explanatory diagram for explaining the operation of the device shown in FIG. 3, and FIG.
Seventh side view of the fine positioning device according to the embodiment of
Figures a and b are explanatory diagrams for explaining the symbols of the linear drive unit and the rotary drive unit, Figure 8 is a perspective view of a fine positioning device according to the fourth embodiment of the present invention, and Figures 9a and b are A plan view and a side view of a fine positioning device according to a fifth embodiment of the present invention, and FIGS. 10a and 10b are perspective views of a fine positioning device according to a sixth embodiment of the present invention, FIGS. Figure, Figure 13, Figure 14
15 is a perspective view, a partially plan view, and a partially sectional view of a fine positioning device according to a seventh embodiment of the present invention, and FIGS. 16a and 16b are according to an eighth embodiment of the present invention. FIG. 17 is a side view of the fine positioning device; FIG. 18 is a side view showing another arrangement example of piezoelectric actuators;
1 and 19 are side views of a conventional fine positioning device, and FIG. 20 is a perspective view of another conventional fine positioning device. 15a, 15b, 15c, 25a, 25b, 2
5c, 70c, 71, 72, 73a ₁ , 73a ₂ , 7
3b ₁ , 73b ₂ , 74a, 74b, 75a, 75
b, 76a, 76b, 90c, 91, 92, 93
a ₁ , 93a ₂ , 93a ₃ , 93b, 93b ₂ , 93b ₃ ,
94a ₁ , 94a ₂ , 94b ₂ ... rigid body part, 16a, 1
6a', 16b, 16b'...Parallel flexible beam, 18
a, 18b, 18c ₁ , 18c ₂ , 28a, 28b,
28c ₁ , 28c ₂ ... protrusion, 19a, 19b, 2
9a, 29b...Piezoelectric actuator, 21...
Strain gauge, 22a, 22b...parallel flexure beam displacement mechanism, 32a, 32b...radial flexure beam displacement mechanism, 33...symmetric radial flexure beam displacement mechanism,
50x, 50y, 50z...Linear drive section, 60
x, 60y, 60z... Rotation drive unit, 70, 8
0,90...Cross-shaped column, 73,81,93...
...First column body, 74, 82, 94... Second column body, 84, 96... Central through hole, 104, 104',
105, 105'...Piezoelectric element.

Claims (1)

[Scope of Claims] 1. A group of flexible beams made up of flexible beams parallel to each other, and a flexible beam that connects at least two of the group of flexible beams in a plane symmetrical manner and is rigid against forces in a direction perpendicular to the plane. a second structure that connects the group of flexible beams connected symmetrically to the plane on the other side of the first structure and is rigid against forces in a direction perpendicular to the plane; a symmetrical parallel flexible beam displacement mechanism, comprising a first actuator that generates a relative displacement between the first structure and the second structure in a direction that causes bending deformation in each of the flexible beams; ,
a third structure that axially symmetrically connects at least two of a group of flexible beams made up of flexible beams arranged radially with respect to one axis and is rigid against forces in a direction perpendicular to the axis; , a fourth structure that connects the axially symmetrically connected group of flexible beams on the other side of the third structure and is rigid against a force in a direction perpendicular to the axis; and and a second actuator that generates a relative rotational displacement between the body and the fourth structure in a direction that causes bending deformation in each of the flexible beams. A fine positioning position characterized by comprising: 2. The fine positioning device according to claim 1, wherein the surface is a surface perpendicular to a plane formed by the flexible beam. 3. The fine positioning device according to claim 1, wherein the axis is a straight line that intersects planes formed by the flexible beams. 4. In claim 1, a predetermined flexible beam of the group of parallel flexible beams is provided with a detection means for detecting a displacement occurring between the first structure and the second structure. A fine positioning device characterized by: 5. In claim 1, a predetermined flexible beam of the radially arranged flexible beam group detects rotational displacement occurring between the third structure and the fourth structure. A fine positioning device characterized by comprising a detection means. 6 In claim 4 or 5,
A fine positioning device characterized in that the detection means is a strain gauge. 7. The fine positioning device according to claim 1, wherein the group of parallel flexible beams, the first structure, and the second structure are formed from one rigid block. 8. According to claim 1, the radially arranged flexible beam group, the third structure, and the fourth structure are formed from one rigid block. Positioning device. 9. The fine positioning device according to claim 1, wherein the group of parallel flexible beams, the first structure, and the second structure are rigidly connected by a connecting means. 10. The fine positioning according to claim 1, wherein the radially arranged flexible beam group, the third structure, and the fourth structure are rigidly connected by a connecting means. Device. 11 In claim 1, the first
A fine positioning device characterized in that the actuator and the second actuator are made of laminated piezoelectric elements. 12 In claim 1, the first
A fine positioning device characterized in that the actuator and the second actuator are made of bimorph elements. 13 In claim 1, the first
The actuator is mounted within a region surrounded by the first structure, the second structure, and a predetermined flexible beam of the group of parallel flexible beams and including the top of the flexible beam. Features a fine positioning device. 14 In claim 1, the second
The actuator is mounted in a region surrounded by the third structure, the fourth structure, and a predetermined flexible beam of the radially arranged flexible beam group and including the top of the flexible beam. A fine positioning device characterized by: 15. The fine positioning device according to claim 1, wherein a plurality of the symmetrical parallel flexible beam displacement mechanisms are provided with their reference axes oriented in different directions. 16. The fine positioning device according to claim 15, wherein each of the symmetrical parallel flexible beam displacement mechanisms is integrally formed in a substantially cross shape with the first structure in common. 17. The fine positioning device according to claim 1, wherein a plurality of the symmetrical radial deflection beam displacement mechanisms are provided with their reference axes oriented in different directions. 18. The fine positioning device according to claim 17, wherein each of the symmetrical radial deflection beam displacement mechanisms is integrally formed in a substantially cross shape with the third structure in common. 19 In claim 1, the symmetrical parallel flexural beam displacement mechanism and the symmetrical radial flexural beam displacement mechanism are arranged so that the respective reference axes between the same type of flexural beam structures are in different directions.
A fine positioning device characterized by being provided with two or more. 20 In claim 19, each of one or more of the symmetrical parallel flexure beam displacement mechanisms and the symmetric radial flexure beam displacement mechanisms move the first structure and the third structure into one A fine positioning device characterized by being integrally constructed in a substantially cross shape as a common structure.