JPS6366615A - Fine positioning device - Google Patents

Abstract

PURPOSE:To perform displacements toward axes (x), (y) and (z) as well as a rotary displacement around the axis (z) in a simple structure, by combining the parallel and radial flexible beam displacement mechanisms. CONSTITUTION:The parallel flexible beam displacement mechanisms 16Fxa and 16Fxb which have parallel displacements toward an axis (x) and the radial flexure beam displacement mechanisms 16Mza and 16Mzb which have radial displacements around an axis (z) are provided to the projected parts 16a and 16b of a center rigid body 15 respectively. While the parallel flexible beam displacement mechanisms 17Fya and 17Fyb which have parallel displacements toward an axis (y) and the parallel flexible beam displacement mechanisms 17Fza and 17Fzb which have parallel displacements toward the axis (z) are provided to the projected parts 17a and 17b of the body 15 respectively. Then the end parts of both parts 16a and 16b are fixed and a fine adjustment table 20 is fixed at the end parts of both parts 17a and 17b. Thus it is possible to obtain the parallel displacements toward those three axes and a rotary displacement around a single axis in a simple constitution.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a fine positioning device used in devices that require adjustment on the μm order, such as semiconductor manufacturing equipment and electron microscopes.

[Conventional technology]

In recent years, in various technical fields, there has been a demand for devices capable of fine displacement adjustment on the order of μm. Typical examples are semiconductor manufacturing equipment such as mask aligners and electron beam lithography equipment used in the manufacturing process of LSIs (Large Scale Integrated Circuits) and VLSIs. These devices require fine positioning on the μm order, and as the positioning accuracy improves, the degree of integration also increases.
It is possible to manufacture high-performance products. Such fine positioning is necessary not only for the semiconductor devices mentioned above, but also for various high-magnification optical devices such as electron microscopes, and by improving its accuracy, it is also necessary for cutting-edge technologies such as biotechnology and space development. This will greatly contribute to the development of the world.

Conventionally, such a fine positioning device has been described, for example, in "Mechanical Design" magazine, Vol. 27, No. 1 (January 1983 issue), No. 32.
Various types have been proposed as shown on pages 36 to 36. Among these, a type of fine positioning device using a parallel spring and a fine movement actuator is considered to be superior in that it does not require a particularly troublesome displacement reduction mechanism and has a simple configuration. will be explained based on FIG.

FIG. 4 is a side view of a conventional fine positioning device. In the figure, 1 is a support stand, 2a and 2b are plate-shaped parallel springs fixed parallel to each other on the support stand 1, and 3 are parallel springs 2a, 2.
This is a highly rigid fine movement table fixed on the top. Reference numeral 4 denotes a fine movement actuator mounted on the support base 1 and the fine movement table 3.

This fine movement actuator 4 uses a piezoelectric element, an electromagnetic solenoid, or the like, and by exciting it, a force is applied to the fine movement table 3 in the X-axis direction of the coordinate axes shown in the figure.

Here, the parallel springs 2a and 2b have low rigidity in the X-axis direction due to their structure, but have high rigidity in the biaxial directions and the y-axis direction (direction perpendicular to the paper), so the fine movement actuator is excited. Then, the fine movement table 3 is displaced almost only in the X-axis direction, and almost no displacement occurs in other directions.

FIG. 5 is a perspective view of another conventional fine positioning device that can be easily considered from the example disclosed in the above-mentioned reference document. In the figure, 6 is the support stand, ? a and 7b are plate-shaped parallel springs fixed to each other on the support base 6; 8 is a highly rigid intermediate table fixed to the parallel springs 7a and 7b; and 9a and 9b are parallel springs in a direction orthogonal to the parallel springs 7a and 7b. Plate-shaped parallel springs are fixed to the intermediate table 8 in parallel with each other, and reference numeral 10 is a highly rigid fine movement table fixed on the parallel springs 9a and 9b. If the coordinate axes are set as shown in the figure, the parallel spring 7a
, 7b are arranged along the X-axis direction, and parallel springs 9a, 9
b is arranged along the y-axis direction. This structure basically consists of one axis (displacement in the X-axis direction) as shown in Figure 4.
This is a structure in which the structure in the case of 2 is stacked in two layers. Arrow F is a force applied to the fine movement table 10 in the X-axis direction, arrow Fy
indicates the force in the y-axis direction applied to the intermediate table 10,
Fine movement actuators (not shown) capable of applying forces F, , F, are provided between the support base 6 and the fine movement table 10, and between the support base 6 and the intermediate table 8, respectively.

When the force FX is applied to the fine movement table 10, the parallel spring 9
a, 9b are deformed, while parallel spring 7a.

Since 7b has high rigidity against the force FX in the X-axis direction, the fine movement table 10 is displaced almost only in the X-axis direction. Furthermore, when a force F is applied to the intermediate table 8, the parallel spring 7
a, 7b are deformed, and the fine movement table 10 has parallel springs 9a,
9b, it is displaced approximately only in the y-axis direction. Furthermore, if both forces FX+F are applied simultaneously, each parallel spring 7
a, 7b, 9a, 9b are deformed at the same time, fine movement table 1
0 is two-dimensionally displaced accordingly.

In this manner, the device shown in FIG. 5 can perform positioning in two axial directions, whereas the device shown in FIG. 4 is a positioning device in only one axial direction.

The device shown in FIGS. 4 and 5 described above is a device that linearly displaces the following movement table 10 in a predetermined axial direction. On the other hand, a fine positioning device for slightly rotationally displacing a fine movement table around a certain axis is disclosed in Japanese Patent Application Publication No. 57-50433. This allH positioning device will be explained with reference to FIG.

FIG. 6 is a partially cutaway perspective view of a conventional fine positioning device that performs minute rotational displacement. In the figure, reference numeral 11 denotes a cylindrical central fixing part, and lla, llb, and llc are longitudinal grooves formed on the circumferential surface of the central fixing part 11 at equal intervals in its longitudinal direction. 12 is a ring-shaped stage rotatably provided around the central fixed part 11, 12a+ ~ 12as, 12bt ~ 1
2bs, 12cl to 12 (-+ is vertical groove 11a,
11b.

It is a U-shaped metal fitting fixed to the stage 12 opposite to the stage 11c. 13 is each vertical groove 11a, 11b.

The bimorph piezoelectric element 13A is mounted between the bimorph piezoelectric element 11c and each of the U-shaped metal fittings 12 at to 12 Cs, and 13A is a protrusion fixed to a portion of the bimorph piezoelectric element 13 that engages with the U-shaped metal fitting. Central fixed part 11, stage 12) each U
All of the character-shaped fittings 12 at to l 2 Cs are rigid bodies. Here, the bimorph type piezoelectric element 13 will be briefly explained in the seventh drawing.

FIG. 7 is a perspective view of a bimorph piezoelectric element.

In the figure, 13a and 13b are piezoelectric elements, and 13c is piezoelectric element 1.
This is a common electrode provided between 3a and 13b. The piezoelectric elements 13a and 13b are closely attached to each other with a common electrode 13C sandwiched therebetween. 13d and 13e are surface electrodes fixed to piezoelectric elements 13a and 13b, respectively. In this state, a voltage with a polarity that shrinks the piezoelectric element 13a is applied between the surface electrode 13d and the common electrode 13c, and at the same time, a voltage with a polarity that stretches the piezoelectric element 13b is applied between the surface electrode 13e and the common electrode 13c. When applied, each piezoelectric element 1
By expanding and contracting 3a and 13b in the direction of the arrow, the entire bimorph piezoelectric element 13 is deformed as shown in the figure. With such a bimorph type piezoelectric element 13, a larger amount of displacement can be obtained than with a single piezoelectric element.

In the device shown in FIG. 6, such a bimorph piezoelectric element 13 has one end fixed to the vertical grooves 11a, 11b, and llc, and the other end is a free end and has a projection 13A on each corresponding U-shaped metal fitting. I am in contact with you through. Now, when an appropriate voltage is applied to each bimorph type piezoelectric element 13 to cause the deformation shown in FIG. 7, the stage 12 will be rotated about the central fixed part 11 in accordance with the deformation. Therefore, by placing and fixing the fine movement table on the stage 12, it is possible to obtain minute rotational displacement of the fine movement table.

The conventional device described above uses the U-shaped metal fitting and the bimorph type piezoelectric element 13 to hold the two in a fixed state, thereby allowing the bimorph type piezoelectric element 13 to be mounted while being naturally deformed, and This prevents displacement restriction (interference) that would occur when the shaped piezoelectric element 13 is fixed to the stage 12.

[Problem that the invention seeks to solve]

By the way, the fine positioning devices shown in FIGS. 4 and 5 are only capable of one-dimensional and two-dimensional positioning, and are capable of displacement in the z-axis direction, X-axis, and y-axis.

It is not possible to give rotational displacement around two axes, and the sixth
For the fine positioning device shown in the figure, the X axis.

It is not possible to provide displacement in the y- and z-axis directions and rotational displacement around the other two axes, and these conventional fine positioning devices can be combined with the devices shown in FIGS. , it is only possible to imagine a three-axis fine positioning device that provides displacement in the y-axis direction and rotational displacement around two axes,
It is extremely difficult to construct a fine positioning and positioning device with four or more axes from these.

The present invention has been made in view of the above circumstances, and its purpose is to solve the problems of the prior art and to provide displacement in the X-axis, y-axis, and z-axis directions, as well as around two axes, with a simple structure. An object of the present invention is to provide a fine positioning device capable of performing rotational displacement of .

[Means for solving problems]

In order to achieve the above object, the present invention includes a pair of first overhanging parts that overhang from a central rigid body part along the first axial direction of three orthogonal axes, and and another pair of second overhangs extending along the first overhang. A barrel is provided, and the parallel flexure beam displacement mechanisms and the radial flexure beam displacement mechanisms on both sides are arranged symmetrically with respect to the central rigid body part, and the parallel flexure beam displacement mechanisms are configured to perform translational displacement in the second axial direction. The radial deflection beam displacement mechanism is configured to generate rotational displacement around the third axis, and two sets of parallel beams are provided on each of the overhang portion on one side and the overhang portion on the other side of the second overhang portion. The flexible beam displacement mechanisms are arranged such that each set of parallel flexible beam displacement mechanisms is symmetrical with respect to the central rigid body part, and one set of parallel flexible beam displacement mechanisms generates a translational displacement in the first axial direction. , the other set of parallel deflection beam displacement mechanisms is characterized in that it generates translational displacement in the third axial direction.

[Effect]

X-axis and y-axis by three parallel deflection beam displacement mechanisms.

A translational displacement is caused in an arbitrary direction of the z-axis direction or a composite direction thereof, and a rotational displacement is caused around a predetermined one of the axes by the radial deflection beam displacement mechanism.

〔Example〕

Hereinafter, the present invention will be explained based on illustrated embodiments.

FIG. 1 is an exploded perspective view of a fine positioning device according to an embodiment of the present invention. In the figure, X, y, and 2 indicate coordinate axes that are orthogonal to each other. Reference numeral 15 denotes a central rigid body part made of a highly rigid member, 16'a an overhanging part extending from the central rigid body part 31 in the y-axis direction, and 16b an overhanging part 16a extending from the central rigid body part 15.
The overhanging part 17a that overhangs in the opposite direction is the central rigid body part 1.
The overhanging portion 17b overhanging from the central rigid body portion 15 in the X-axis direction is an overhanging portion extending from the central rigid body portion 15 in the opposite direction to the overhanging portion 17a. 18a and 18b are projecting portions 16a and 1, respectively.
A fixed part 6b is provided at the lower end of the end, 19a and 19b are fine movement tape connecting parts provided at the upper end of the overhang parts 17a and 17b, respectively, and 20 is a fine movement table. Overhanging portions 16a, 16b.

17a, 17b, fixed parts 18a, 18b, and fine movement table connecting parts 19a, 19b are each connected to the central rigid body part 15.
It is made of the same material as the central rigid body part 15, and is processed and formed from one block.

16Mz- and 16Mz are respectively overhang portions 16a.

16b, and are configured symmetrically with respect to the central rigid body portion 15. Radiation deflection beam displacement mechanism 16Mg,, 16M! b work together to generate rotational displacement about the axis in the z-axis direction. The structure of the radial deflection beam displacement mechanism will be described later. 16F
,,, 16 Fxk are overhang parts 16a and 1, respectively.
Radial deflection beam displacement mechanism in 6b 16M2□ 16M
z+, and are configured symmetrically with respect to the central rigid body portion 15. Parallel deflection beam displacement mechanism 16 FX,, 16 F
xb work together to generate translational displacement in the X-axis direction.

17 F, , 17 F and b are respectively overhang parts 1
7a.

17b, and are configured symmetrically with respect to the central rigid body portion 15. The parallel deflection beam displacement mechanisms 17F, 17F, b work together to generate translational displacement in the y-axis direction. 17F g11
+ 17 F zb are the overhanging portions 17a and 17, respectively.
Parallel deflection beam displacement mechanism 17F□, 17P at b,
These are parallel deflection beam displacement mechanisms configured outwardly of b, and are configured symmetrically to each other with respect to the central rigid body portion 15.

Parallel deflection beam displacement mechanism 17Fz-.

17Fzb works together to generate translational displacement in the z-axis direction.

Parallel deflection beam displacement mechanism 17 Fz,, 17 Ftb
The portion having one structure is formed such that its upper end portion is higher than the other portions. The structure of the parallel deflection beam displacement mechanism will be described later.

The above radial flexure beam displacement mechanism 16Mza, 16M21 parallel flexure beam displacement mechanism 16FX-, 16Fxb, 17Fy-
, 17Fyb, ' 17 Fz-, 17Fzb are constructed by forming predetermined through holes at predetermined locations of each of the projecting portions 16a, 16b, 17a, and 17b.

Next, the configurations of the radial flexure beam displacement mechanism and the parallel flexure beam displacement mechanism will be explained with reference to the drawings. Figure 2(a),
(b) is a side view of a symmetrical radial flexure beam displacement mechanism;

In the figure, 21a, 21b, 21c are rigid parts, 24a1.2
4az, 24b+, 24bz are radial deflection beams.

Each radial deflection beam 24a1.24az, 24b, 24b
, extend radially along dashed-dotted lines Ll, L with respect to the axis 0 passing through the center of the rigid body part 20 and perpendicular to the plane of the paper, and connect adjacent rigid body parts. Radial deflection beam 2
4a1.24a= is formed by drilling the through hole 22a, and the radial deflection beams 24b+, 24bz are formed by drilling the through hole 22b. 26a, 26b
are piezoelectric actuators, and each has a through hole 22a.

22b between the protruding parts protruding from the rigid body part. Due to the configuration on the left side of the axis O, the radial deflection beam displacement mechanism 29a
However, due to the configuration on the right side, the radial deflection beam displacement mechanism 29b
is configured.

Now, a predetermined voltage is simultaneously applied to the piezoelectric actuators 26a and 26b to generate a force f of the same magnitude in a tangential direction to a circle centered on the central axis O. Then,
The left protrusion of the rigid body part 20 is a piezoelectric actuator 26a.
is pushed upward along the tangent line by the force generated in
The right protrusion of the rigid body part 20 is a piezoelectric actuator 26b.
is pushed downward along the tangent line by the force generated.

The rigid body part 20 has radial deflection beams 2 on both open body parts 21a and 21b.
Since it is connected by 4a+, 24az, 24b1.24bz, as a result of receiving the above force, the result shown in Figure 2 (b
) as shown in the radial deflection beam 24a,.

24az, 24b+, 24bz rigid body parts 21 a, 2
The part connected to lb is on the straight line 11L+, Lg extending radially from point 0, but the part connected to the rigid body part 20 is on a straight line slightly deviated from the straight line Ll, Lffi (this straight line is also It is a straight line extending radially from point 0.

)Ll', L,' causes a slight displacement upward. Therefore, the rigid body portion 20 rotates by a small angle δ clockwise in the figure. The magnitude of this rotational displacement δ is determined by the radial deflection beam 24
a+, 24az, 24b+.

Since it is determined by the bending rigidity of 24b2, if the force f is accurately controlled, the rotational displacement δ can also be controlled with the same accuracy.

When the voltage applied to the piezoelectric actuators 26a, 26b is removed, the radial deflection beam 24al.

24az, 24b+, and 24bt return to the state before deformation, the rotational displacement mechanism returns to the state shown in FIG. 2(a), and the displacement δ becomes 0.

FIGS. 3(a) and 3(b) are side views of a symmetrical parallel deflection beam displacement mechanism. In the figure, 31a and 31b.

31c is a rigid body part, 34a+, 34a2 is a rigid body part 31C,
31a are parallel flexible beams connected in parallel to each other. The parallel flexible beams 34a+ and 34az are formed by through holes 32a formed in the rigid body part.

Parallel flexible beams 34+ and 34bz are connected parallel to each other between the rigid body parts 31b and 31c, and are formed by a through hole 32b formed in the rigid body part.

Piezoelectric actuators 36a and 36b are mounted between protrusions from the rigid body parts protruding into the through holes 32a and 32b, respectively. The configuration to the left of the center of the rigid body portion 31c constitutes a parallel flexible beam displacement mechanism 39a, and the configuration to the right constitutes a parallel flexible beam displacement mechanism 39b.

Here, coordinate axes are determined as shown in the figure (y-axis is perpendicular to the plane of the paper). Now, a voltage is simultaneously applied to the piezoelectric actuators 36a and 36b to generate the same force f in the X-axis direction. At this time, consider the displacement that occurs in one parallel flexible beam displacement mechanism, for example, the parallel flexible beam displacement mechanism 39a. By applying a voltage to the piezoelectric actuator 36a, the rigid body portion 31c is pressed in the X-axis direction by a force f. For this reason, the parallel sagging beam 34al,
34az is a parallel spring 2a shown in FIG.

Similar to 2b, bending deformation occurs, and the rigid body part 31c
As shown in Figure (b), it is displaced in two axial directions.

At this time, if the other parallel deflection beam displacement mechanism 395 were not present, a very small lateral displacement (displacement in the X-axis direction) would also occur in the rigid body portion 31c at the same time.

Moreover, when considering the displacement that occurs in the other parallel flexible beam displacement mechanism 39b when the parallel flexible beam displacement mechanism 39a does not exist, the parallel flexible beam displacement mechanism 39b is the rigid body part 31c.
Since it is constructed in plane symmetry with the parallel deflection beam displacement mechanism 39a with respect to the plane (reference plane) along the y-axis direction passing through the center of The above-mentioned lateral displacement occurs in the rigid portion 31c at the same time as the displacement in the y-axis direction, and its magnitude and direction are symmetrical with respect to the reference plane with respect to the parallel deflection beam displacement mechanism 39a. That is, regarding the above-mentioned lateral displacement, the lateral displacement that occurs in the parallel deflection beam displacement mechanism 39a occurs in the left direction in the figure for displacement in the X-axis direction, and counterclockwise in the figure for rotational displacement around the y-axis. The lateral displacement that occurs in the parallel deflection beam displacement mechanism 39a occurs in the right direction in the figure for displacement in the X-axis direction, and clockwise in the figure for rotational displacement around the y-axis.

The magnitude of each displacement in the X-axis direction and the magnitude of rotational displacement around the y-axis are equal, so the lateral displacements occurring in both cancel each other out. As a result, the force f
By adding , each parallel flexible beam 34ar, 34
At, 34b1.34bz, a slight increase in internal stress due to the longitudinal elongation causes the rigid body portion 31C to undergo displacement (principal displacement) ε only in the biaxial direction.

When the voltage applied to piezoelectric actuators 36a, 36b is removed, each parallel flexible beam 34at.

34az, 34b+, and 34bz return to the state before deformation, and the parallel deflection beam displacement mechanisms 39a and 39b are as shown in FIG. 3(a).
The state returns to the state shown in , and the displacement ε becomes O.

Next, the operation of this embodiment will be explained. Now, when an equal voltage is applied to the piezoelectric actuators of the horizontal parallel deflection beam displacement machines 16FX- and 16FXb, the parallel deflection beam 34a+
, 34az, 34bt, and 34bz deform and translate in the X-axis direction of FIG. 1 as shown in FIG. 3(b) according to the applied voltage. These parallel deflection beam displacement mechanisms 16F...
16 FXb is a radial deflection tension displacement mechanism 16 M
-, 16M-b, central rigid body part 15, parallel deflection beam displacement mechanism 17F, 1.17Fyb.

17F--, 17F-b, and the fine movement table 20 fixed to the fixed part 19a, the translational displacement in the X-axis direction is directly transmitted to the fine movement table 20,
The fine movement table 20 is translated by the same amount in the X-axis direction.

Furthermore, when an equal voltage is applied to the piezoelectric actuators of the radial flexure beams 16 Mz- and 16Mzb, the radial flexure beams 24a1. Figure (b)
It deforms and rotates as shown in .

This rotational displacement is caused by the central rigid body portion 15. It is transmitted to the fine movement table 20 via the parallel deflection beam displacement mechanisms 17Fy-, 17Fyb, 17F-917F□ and the fixed parts 19a and 19b, and rotationally displaces the fine movement table 20 around the axis.

Similarly, when the same voltage is applied to the piezoelectric actuators of the parallel flexible beam displacement mechanisms 17F, 171b, the fine movement table 20 is translated in the y-axis direction, and the parallel flexure beam displacement mechanisms 17F, 17F When the same voltage is applied to the piezoelectric actuators , b, the fine movement table 20 is translated in the Z-axis direction.

Furthermore, by driving 2 m or more of these flexible beam displacement mechanisms in the same manner, a combined translational displacement or a composite displacement of translational displacement and rotational displacement can be obtained.

As described above, in this embodiment, one of the overhangs is provided with a parallel flexure beam displacement mechanism for translational displacement in the X-axis direction and a radial flexure beam displacement mechanism for rotational displacement around an axis in the y-axis direction.
A parallel flexible beam displacement mechanism that translates in the y-axis direction and a parallel flexible beam displacement mechanism that translates in the Z-axis direction are provided on the other overhang, and the end of one overhang is fixed and the end of the other overhang is fixed. Since a fine movement table is fixed to the part, translational displacement on three axes and rotation on one axis can be achieved with an extremely simple and compact configuration.
Axial displacement can be obtained.

In the above embodiment, an example was explained in which the end of the overhang in the y-axis direction was fixed and a fine movement table was provided at the end of the overhang in the X-axis direction. It is clear that the end of the axial extension may be fixed and a fine movement table may be provided at the end of the y-axis extension. In addition, although an example has been described in which the part to which the fine movement table is fixed is configured higher than the other parts, it is also possible to set the part to be the same height as the other parts,
Legs may be provided on the side of the fine movement table.

〔Effect of the invention〕

As described above, in the present invention, two parallel deflection beam displacement mechanisms with different translational directions are configured on an overhang in one direction,
Since a parallel flexure beam displacement mechanism and a radial flexure beam displacement mechanism in a translation direction different from the translation direction of the two parallel flexure beam displacement mechanisms are configured on the overhanging part in the other direction, translational displacement in three axial directions can be achieved with an extremely simple configuration. and the rotational displacement around one axis can be obtained.

[Brief explanation of drawings]

Figure 1 is an exploded perspective view of a fine positioning device according to an embodiment of the present invention, Figures 2 (a) and (b) are side views of the radial deflection beam displacement machine shown in Figure 1, and Figure 3 (a). ). (b) is a side view of the parallel deflection beam displacement mechanism shown in Fig. 1;
4, 5, and 6 are side and perspective views of a conventional fine positioning device, and FIG. 7 is a perspective view of a bimorph voltage element used in the device shown in FIG. 6. 15... Central rigid body part, 16a, 16b, 17a
. 17b... Overhang, 16FX-, 16Fxb
+ 17Fya, 17Fyb, 17Fg
−, 17Fvb...”=parallel deflection beam deformation mechanism, 16 M
z-, 16Mzb”... Radial deflection beam displacement mechanism. Fig. 1 8a Fig. 2 Fig. 3 Kokase 54D2 Fig. 5 Shi≦

Claims (6)

[Claims] (1) a central rigid body part, a first set of overhanging parts symmetrically protruding from the central rigid body part in a first axis direction, and a second axis extending from the central rigid body part and perpendicular to the first axis; a second set of overhangs protruding symmetrically in the direction; and a third axis perpendicular to the first axis and the second axis, each symmetrically provided on the first set of overhangs. A set of radial flexure beam displacement mechanisms that generate rotational displacement around the second set of radial flexure beam displacement mechanisms and a set of parallel flexure beam displacement mechanisms that generate translational displacement in the second axial direction are each provided symmetrically on the overhang of the second set. A set of parallel flexible beam displacement mechanisms that generate a translational displacement in the first axial direction and a set of parallel flexible beam displacement mechanisms that generate a translational displacement in the third axial direction. Fine positioning device. (2) In claim (1), each of the parallel flexible beam displacement mechanisms includes a plurality of mutually parallel flexible beams that undergo bending deformation due to forces in respective displacement generating directions, and A fine positioning device characterized by comprising: an actuator that acts. (3) In claim (1), the radial flexure beam displacement mechanism causes bending deformation due to a moment about a rotational displacement generation axis, and includes a plurality of radial beam displacement mechanisms extending radially from each other with respect to a predetermined point on the axis. A fine positioning device comprising flexible beams and an actuator that applies the moment to the flexible beams. (4) A fine positioning device according to claim (2) or (3), wherein the actuator is a piezoelectric actuator. (5) Claim (1), wherein the central rigid body part, the radial flexure beam displacement mechanism, and each of the parallel flexure beam displacement mechanisms are fabricated from one rigid block. Positioning device. (6) In claim (1), the first set of overhanging parts and the second set of overhanging parts are such that each end of one set of overhanging parts is fixed, and the other set of overhanging parts is fixed. A micro-positioning device characterized in that a micro-table is provided between each end of the set of overhangs.