JPS6366613A - Fine positioning device - Google Patents

Abstract

PURPOSE:To carry out the displacements toward axes (x), (y) and (z) and the rotary displacements around these axes in a simple structure, by combining a parallel flexible beam displacement mechanism and a radial flexure beam displacement mechanism. CONSTITUTION:The parallel flexible beam displacement mechanisms 16Fxa and 16Fxb which have parallel displacements toward an axis (x) and the radial flexure beam displacement mechanisms 16Mza and 16Mzb which have rotary displacements around the axis (x) are provided to the projected parts 16a and 16b of a center rigid body 15 respectively. While the parallel flexible beam displacement mechanisms 17Fya and 17Fyb which have parallel displacements toward the axis (y) and the parallel flexible beam displacement mechanisms 17Fza and 17Fzb which have parallel displacements toward the axis (z) are provided to the projected parts 17a and 17b. Then the fixing parts of the radial flexible beam displacement mechanisms 22Mxa and 22Mxb which are attached to a support plate 21 and have rotary displacements around the axis (x) are connected to the end parts of the parts 17a and 17b. Then a fine adjustment table 26 is fixed to the fixing parts of the radial flexible beam displacement mechanisms 22Mya and 22Myb which are attached to the plate 21 and have rotary displacements around the axis (y). In such a constitution, the displacements and the rotary displacements of those three axes are secured in a simple structure.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a fine positioning device used in devices that require adjustment on the μm order, such as semiconductor manufacturing equipment and electron microscopes.

[Conventional technology]

In recent years, in various technical fields, there has been a demand for devices capable of fine displacement adjustment on the order of μm. Typical examples are semiconductor manufacturing equipment such as mask aligners and electron beam lithography equipment used in the manufacturing process of LSIs (Large Scale Integrated Circuits) and VLSIs. These devices require fine positioning on the μm order, and as the positioning accuracy improves, the degree of integration also increases.
It is possible to manufacture high-performance products. Such fine positioning is necessary not only for the semiconductor devices mentioned above, but also for various high-magnification optical devices such as electron microscopes, and by improving its accuracy, it is also necessary for cutting-edge technologies such as biotechnology and space development. This will greatly contribute to the development of the world.

Conventionally, such a fine positioning device has been described, for example, in "Mechanical Design" magazine, Vol. 27, No. 1 (January 1983 issue), No. 32.
Various types have been proposed as shown on pages 36 to 36. Among these, a type of fine positioning device using a parallel spring and a fine movement actuator is considered to be superior in that it does not require a particularly troublesome displacement reduction mechanism and has a simple configuration. will be explained based on FIG.

FIG. 4 is a side view of a conventional fine positioning device. In the figure, 1 is a support base, 2a and 2b are plate-shaped parallel springs fixed parallel to each other on the support base 1, and 3 is a highly rigid fine movement table fixed on the parallel springs 2a and 2b. Reference numeral 4 denotes a fine movement actuator mounted between the support base 1 and the fine movement table 3.

This fine movement actuator 4 uses a piezoelectric element, an electromagnetic solenoid, or the like, and by exciting it, a force is applied to the fine movement table 3 in the X-axis direction of the coordinate axes shown in the figure.

Here, due to their structure, parallel springs 2a and 'lb have low rigidity in the Then, the fine movement table 3 is displaced almost only in the X-axis direction, and almost no displacement occurs in other directions.

FIG. 5 is a perspective view of another conventional fine positioning device that can be easily considered from the example disclosed in the above-mentioned reference document. In the figure, 6 is a support base, 7a and 7b are plate-shaped parallel springs fixed to each other on the support base 6, 8 is a highly rigid intermediate table fixed to the parallel springs 7a and 7b, and 9a and 9b are parallel springs. A plate-shaped parallel spring is fixed to the intermediate table 8 in parallel with each other in a direction perpendicular to 7a and 7b, and 10 is a highly rigid fine movement table fixed on the parallel springs 9a and 9b. If the coordinate axes are set as shown in the figure, the parallel spring 7a
, 7b are arranged along the X-axis direction, and parallel springs 9a, 9
b is arranged along the y-axis direction. This structure basically consists of one axis (displacement in the X-axis direction) as shown in Figure 4.
This is a structure in which the structure in the case of 2 is stacked in two layers. Arrow F is a force applied to the fine movement table 10 in the X-axis direction;
, indicates the force in the y-axis direction applied to the intermediate table 8,
Fine movement actuators (not shown) capable of applying forces F, , F, are provided between the support base 6 and the fine movement table 10, and between the support base 6 and the intermediate table 8, respectively.

When a force F is applied to the fine movement table 10, the parallel spring 9
a, 9b are deformed, while parallel spring 7a.

Since it has high rigidity against the force F in the X-axis direction, the fine movement table 10 is displaced almost only in the X-axis direction. Further, when a force F is applied to the intermediate table 8, the parallel springs 7a and 7b are deformed, and the turbulent table IO is displaced approximately only in the y-axis direction via the parallel springs 9a and 9b. Furthermore, both forces F.

, Fy are applied simultaneously, each parallel spring 7a.

7b, 9a, and 9b are deformed simultaneously, and the fine movement table 10 is two-dimensionally displaced accordingly.

In this manner, the device shown in FIG. 5 can perform positioning in two axial directions, whereas the device shown in FIG. 4 is a positioning device in only one axial direction.

The device shown in FIGS. 4 and 5 described above is a device that linearly displaces the fine movement table 10 in a predetermined axial direction. On the other hand, a fine positioning device for slightly rotationally displacing a fine movement table around a certain axis is disclosed in Japanese Patent Application Publication No. 57-50433. This fine positioning device will be explained with reference to FIG.

FIG. 6 is a partially cutaway perspective view of a conventional fine positioning device that performs minute rotational displacement. In the figure, 1) is a cylindrical central fixing part, and lla, llb, and llc are vertical grooves formed on the circumferential surface of the central fixing part 1) at equal intervals in the longitudinal direction. 12 is a ring-shaped stage rotatably provided around the central fixed part 1), 12a+ to 12az, 12rit to
12by, 12C1 to 12C3 are each vertical groove 1)a
, Ilb.

1) It is a U-shaped metal fitting fixed to the stage 12 facing C. 13 is each longitudinal groove 1ia', ilb.

1) A bimorph piezoelectric element is mounted between C and each U-shaped metal fitting 12a, ~12C, and 13A is a protrusion fixed to a portion of the bimorph piezoelectric element 13 that engages with the U-shaped metal fitting. be. The central fixing portion 1) and the stage 12) each of the U-shaped fittings 12aI to 12C1 are rigid bodies. here,
The bimorph type piezoelectric element 13 will be briefly explained in the seventh drawing.

FIG. 7 is a perspective view of a bimorph piezoelectric element.

In the figure, 13a and 13b are piezoelectric elements, and 13c is piezoelectric element 1.
This is a common electrode provided between 3a and 13b. The piezoelectric elements 13a and 13b are closely attached to each other with the common electrode 3C sandwiched therebetween. 13d and 13e are surface electrodes fixed to piezoelectric elements 13a and 13b, respectively. In this state, a voltage with a polarity that shrinks the piezoelectric element 13a is applied between the surface electrode 13d and the common electrode 13c, and at the same time, a voltage with a polarity that stretches the piezoelectric element 13d is applied between the surface electrode 13e and the common electrode 13c. When applied, each piezoelectric element 1
By expanding and contracting 3a and 13b in the direction of the arrow, the entire bimorph piezoelectric element 13 is deformed as shown in the figure. With such a bimorph type piezoelectric element 13, a larger amount of displacement can be obtained than with a single piezoelectric element.

In the device shown in FIG. 6, such a bimorph piezoelectric element 13 has one end fixed to the vertical grooves 1) a, 1) b, and llc, and the other end is a free end and is attached to each corresponding U-shaped metal fitting. is in contact with via the protrusion 13A. Now, when an appropriate voltage is applied to each bimorph piezoelectric element 13 to cause the deformation shown in FIG. 7, the stage 12 rotates around the central fixed part 1) in accordance with the deformation of the other parts. Therefore, by placing and fixing the fine movement table on the stage 12, it is possible to obtain minute rotational displacement of the fine movement table.

The above-mentioned conventional device holds the U-shaped metal fitting and the bimorph piezoelectric element 13 in an engaged state, thereby allowing the bimorph piezoelectric element 13 to be mounted while being naturally deformed, and This prevents displacement restriction (interference) that would occur when the shaped piezoelectric element 13 is fixed to the stage 12.

[Problem that the invention seeks to solve]

By the way, the fine positioning devices shown in FIGS. 4 and 5 are only capable of one-dimensional and two-dimensional positioning, and are capable of displacement in the z-axis direction, X-axis, and y-axis.

It is not possible to give rotational displacement around two axes, and the sixth
For the fine positioning device shown in the figure, the X axis.

Displacement in the y-axis and Z-axis directions and rotational displacement in the other two directions cannot be given. From these conventional fine positioning devices, we assume a three-axis fine positioning device that combines the devices shown in Figures 5 and 6 to provide displacement in the X-axis and y-axis directions and rotational displacement around two axes. However, it is extremely difficult to construct a fine positioning device with four or more axes from these.

The present invention has been made in view of the above circumstances, and its purpose is to solve the problems of the prior art and to provide displacement in the X-axis, y-axis, and z-axis directions, as well as displacement in the , y-axis, 2
The present invention provides a fine positioning device capable of performing rotational displacement around an axis.

[Means for solving problems]

In order to achieve the above object, the present invention includes a pair of first overhanging parts that overhang from a central rigid body part along the first axial direction of three orthogonal axes, and and another pair of second overhangs extending along the first overhang. , the parallel deflection beam displacement mechanism and the radial deflection displacement mechanism on both sides are arranged symmetrically with respect to the central rigid body part, and the parallel deflection beam displacement mechanism generates a translational displacement in the second axial direction. , the radial deflection beam displacement mechanism is the third
The rotational displacement around the axis of the second
Two sets of parallel flexure beam displacement mechanisms are arranged on each of the overhang part on one side and the overhang part on the other side of the overhang part, so that each set of parallel flexure beam displacement mechanisms is symmetrical to each other about the central rigid body part. , one set of parallel flexure beam displacement mechanisms is configured to generate a first axial translational displacement, and the other set of parallel flexure beam displacement mechanisms are configured to generate a third axial translational displacement; A rigid support plate is provided, and a radial flexure beam displacement mechanism that generates a rotational displacement around a first axis and a radial flexure beam displacement mechanism that generates a rotational displacement around a second axis are provided on the support plate. It is characterized in that the rigid body part of one of the radial deflection beam displacement mechanisms is connected to the end of the first set of overhanging parts or the end of the second set of overhanging parts.

[Effect]

X-axis and y-axis by three parallel deflection beam displacement mechanisms.

Translational displacement in the z-axis direction is caused, and rotational displacement around the x-axis, y-axis direction, and two axes is caused by the three radial deflection beam displacement mechanisms.

〔Example〕

Hereinafter, the present invention will be explained based on illustrated embodiments.

FIG. 1 is an exploded perspective view of a fine positioning device according to an embodiment of the present invention. In the figure, X+3'+2 indicates coordinate axes that are orthogonal to each other. Reference numeral 15 denotes a central rigid body part made of a highly rigid member, 16a an overhanging part extending from the central rigid body part 31 in the y-axis direction, 16b an overhanging part extending from the central rigid body part 15 in the opposite direction to the overhanging part 16a, and 17a a center An overhanging portion 17b extending from the rigid body portion 15 in the X-axis direction is the central rigid body portion 1
This is an overhang portion that overhangs from 5 in the opposite direction to the overhang portion 17a. 18a and 18b are projecting portions 16a and 16, respectively.
The fixed parts 19a and 19b provided at the lower ends of the ends of b are connecting parts provided at the upper ends of the overhanging parts 17a and 17b, respectively. Overhanging portions 16a, 16b, 17a
, 17bs fixing part 1) 3a, isb and connecting part 19a
, 19b are each made of the same material as the central rigid body part 15, and are processed and formed together with the central rigid body part 15 from one block.

16 M, , 16 M, b are respectively overhang parts 1
6a.

16b, and are configured symmetrically with respect to the central rigid body portion 15. Radial deflection beam displacement mechanism 16M2□16M,.

work together to generate rotational displacement about the axes in two axial directions.

The structure of the radial deflection beam displacement mechanism will be described later. 16 F, , 16 FX are the radial deflection beam displacement mechanisms 16 M at the overhanging portions 16 a and 16 b, respectively.
2-, 16 Mzb are parallel flexible beam displacement mechanisms configured outwardly, and are configured symmetrically to each other with respect to the central rigid body portion 15. Parallel deflection beam displacement mechanism 16F,,
, 16 FXb work together to generate translational displacement in the X-axis direction.

17 F, , 17 F and b are respectively overhang parts 1
7a.

17b, and are configured symmetrically with respect to the central rigid body portion 15. The parallel deflection beam displacement mechanisms 17Fy- and 17Fyb work together to generate translational displacement in the y-axis direction. 17Fz,,17
Fzb is a parallel deflection beam displacement mechanism configured outwardly of the parallel deflection beam displacement mechanisms 17F, . Parallel deflection beam displacement mechanism 17F! ,.

17Fzb works together to generate translational displacement in two axial directions.

The portion where the parallel deflection beam displacement mechanism 17F2□ 17Fzb is constructed is formed such that its upper end is higher than the other portions. The structure of the parallel deflection beam displacement mechanism will be described later.

The above radial deflection beam displacement mechanism 16M! ,, 16M2 parallel deflection beam displacement mechanism 16F, , 16FXb, 17F y
-, 17Fyb, 17F□, and 17Fzb are constructed by forming predetermined through holes at predetermined locations of each of the overhang portions 16a, 16b, 17a, and 17b.

21 is a support plate made of a rigid member. 22M, □
22M, b are radial deflection beam displacement mechanisms symmetrically arranged on the support plate 21; Each radial deflection beam displacement mechanism 22
My- and 22Myb generate rotational displacement around one common axis extending in the y-axis direction. 22M,,,22
MXb is a radial deflection beam displacement mechanism arranged symmetrically on the support plate 21, each with a common one extending in the X-axis direction.
Generates rotational displacement around two axes. Each radial deflection beam displacement mechanism 16My-1) 6M, b, 16MX,, 1
The structure of 6M-b will be described later.

23a and 23b are respectively radial deflection beam displacement mechanisms 22
One rigid body part (the other rigid body part is the support plate 21) constituting My-, 22Myb, and 24a, 24b are one rigid body part (the other rigid body The part is the support plate 21). 25a and 25b are L-shaped connecting parts fixed to the rigid body parts 24a and 24b, respectively, and 26 is the rigid body part 23a and 23b.
It is a fine movement table fixed to. This fine movement table 2
A target object to be finely positioned is placed and fixed on 6.

The connecting portions 19a, 19b of the overhanging portions 172.17b and the L-shaped connecting portions 25a, 25b are connected to each other as shown by the two-dot chain line in the figure. As a result, the support plate 21 and the radial deflection beam displacement mechanism 22M-=22M supported by the support plate 21
o, 22My-922Myb and the fine movement table 26 are connected to the connecting part 19 a, at the upper part of the central rigid body part 15.
It will be in a suspended state by 19 b, 25 a, and 25 b.

In this state, each radial deflection beam displacement mechanism 22Mx-
= 22M-b, 22My-, 22Myb, 16M-
By selecting the radiation angle of each flexible beam (described later) of -, 16M-b, each of their rotation axes can be adjusted to the fine movement table 26.
are perpendicular to each other at a point on the surface of

Here, the structures of the parallel flexure beam displacement mechanism and the radial flexure beam displacement mechanism in the above structure will be explained with reference to the drawings. Second
Figures (a) and (b) are side views of a symmetrical parallel flexure beam displacement mechanism.

In the figure, 31a, 3lb, and 31c are rigid parts, and 34a1 and 34az are parallel flexible beams connected in parallel between the rigid parts 31c and 31a. The parallel flexible beams 34a+ and 34az are formed by through holes 32a formed in the rigid body part. 34 b+, 34 bt are rigid body parts 31
It is a parallel flexible beam connected parallel to each other between c and 31b, and is formed by a through hole 32b drilled in the rigid body part. 36a and 36b are piezoelectric actuators, each having a through hole 32a.

It is mounted between the protrusions from the rigid body part protruding into 32b. The configuration to the left of the center of the rigid body portion 31c constitutes a parallel deflection beam displacement mechanism 39a, and the configuration to the right constitutes a parallel deflection beam displacement mechanism 39b.

Here, coordinate axes are determined as shown in the figure (y-axis is perpendicular to the plane of the paper). Now, a voltage is simultaneously applied to the piezoelectric actuators 36a and 36b to generate the same force f in the Z-axis direction. At this time, consider the displacement that occurs in one parallel flexible beam displacement mechanism, for example, the parallel flexible beam displacement mechanism 39a. By applying a voltage to the piezoelectric actuator 36a, the rigid body portion 31c is pressed in the z-axis direction by a force f. For this reason, the parallel deflection beam 34a+,
34az is a parallel spring 2a shown in FIG.

Similar to 2b, bending deformation occurs, and the rigid body part 31c
As shown in Figure (b), it is displaced in two axial directions.

At this time, if the other parallel deflection beam displacement mechanism 39b were not present, a very small lateral displacement (displacement in the X-axis direction) would also occur in the rigid portion 31C at the same time.

Moreover, when considering the displacement that occurs in the other parallel flexible beam displacement mechanism 39b when the parallel flexible beam displacement mechanism 39a does not exist, the parallel flexible beam displacement mechanism 39b is the rigid body part 31c.
Since it is constructed in plane symmetry with the parallel deflection beam displacement mechanism 39a with respect to the plane (reference plane) along the y-axis direction passing through the center of The above-mentioned lateral displacement occurs in the rigid body portion 31c at the same time as the displacement in the biaxial directions, and its magnitude and direction are symmetrical with respect to the reference plane with respect to the parallel deflection beam displacement mechanism 39a. That is, regarding the above-mentioned lateral displacement, the lateral displacement that occurs in the parallel deflection beam displacement mechanism 39a occurs in the left direction in the figure for displacement in the X-axis direction, and counterclockwise in the figure for rotational displacement around the y-axis. The lateral displacement that occurs in the parallel deflection beam displacement mechanism 39a occurs in the right direction in the figure for displacement in the X-axis direction, and clockwise in the figure for rotational displacement around the y-axis.

The magnitude of each displacement in the X-axis direction and the magnitude of rotational displacement around the y-axis are equal. Therefore, the lateral displacements occurring in both cancel each other out. As a result, the force f
By adding , each parallel flexible beam 34a+, 34
When az, 34b+, and 34bz are only slightly increased in internal stress due to their longitudinal extension, the rigid body portion 31c produces a displacement (principal displacement) ε only in the z-axis direction.

When the voltage applied to piezoelectric actuators 36a, 36b is removed, each parallel flexible beam 34a+, 34az,
34J and 34bz return to the state before deformation, the parallel deflection beam displacement mechanisms 39a and 39b return to the state shown in FIG. 2(a), and the displacement ε becomes 0.

FIGS. 3(a) and 3(b) are side views of the radial deflection beam displacement mechanism. In the figure, 41a, 41b, 41c are rigid body parts,
44a+, 44ag, 44b, 44bt.

is a radial deflection beam. Each radial deflection beam 44a+.

44 az, 44 bt, 44 bz are rigid body parts 41c
Draw a dashed line with respect to the axis O perpendicular to the paper plane passing through the center of +,
It extends radially along t and z, and connects adjacent rigid body parts. Radial deflection beam 44'a+.

44a2 is formed by drilling a through hole 42a,
Further, the radial deflection beams 44b+, 44bz are formed by opening the through holes 42b. 46a.

46b is a piezoelectric actuator, and each through hole 4
2a and 42b between the protruding parts protruding from the rigid body part. The configuration on the left side of the axis O constitutes a radial flexure beam displacement mechanism 49a, and the configuration on the right side constitutes a radial flexure beam displacement mechanism 49b.

Now, a predetermined voltage is simultaneously applied to the piezoelectric actuators 46a and 46b to generate a force f of the same magnitude in a tangential direction to a circle centered on the central axis 0. Then,
The left protrusion of the rigid body part 41c is a piezoelectric actuator 46.
a is pushed upward along the tangent line, and the right protrusion of the rigid body part 41C is pushed upward by the piezoelectric actuator 4.
The force generated at 6b pushes it downward along the tangent line. Since the rigid body part 41c is connected to both open body parts 41a and 41b by radial bending beams 44a+, 44az, 441)+, and 44bz, as a result of receiving the above force,
As shown in FIG. 3(b), the radiation deflection ff144a+,
44az, 44b+, 44bz rigid body parts 41a, 41b
The part connected to is a straight line L extending radially from point 0.
The portions located on r and Lz but connected to the rigid body portion 41c are straight lines slightly deviated from the straight lines L+ and Lx (this straight line is also a straight line extending radially from point O) L, ゛,
A minute displacement is caused on L2'. Therefore, the rigid body portion 41c rotates by a small angle δ clockwise in the figure. The magnitude of this rotational displacement δ is the radial deflection beam 44a.

Since it is determined by the bending rigidity of 443z, 44b+, and 44bz, if the force f is accurately controlled, the rotational displacement δ can also be controlled with the same accuracy.

When the voltage applied to the piezoelectric actuators 46a, 46b is removed, the radiating deflection beam 44a+.

44az, 44b+, and 44bz return to the state before deformation, the rotational displacement mechanism returns to the state shown in FIG. 3(a), and the displacement δ becomes 0.

In addition, the radial deflection beam displacement mechanism 22MX-, shown in FIG.
22M, Ib, 22 My-, 22Myb are one of the radial deflection beam displacement mechanisms 49a (49
It is obvious that this corresponds to b), and its operation is also similar to the above operation.

Next, the operation of this embodiment will be explained. Now, when an equal voltage is applied to the piezoelectric actuators of the parallel flexible beam displacement mechanisms 16 F, , 16 F, b, the parallel flexible beam 3
4at, '34ai, 34b+, and 34bz are deformed and translated in the X-axis direction of FIG. 1 as shown in FIG. 2(b) according to the applied voltage. This translational displacement is caused by the radial flexure beam displacement mechanisms 16M, , 16M,b, the central rigid body portion 15, and the parallel flexure beam displacement mechanisms 17F, .

17 Fyb, 17 F,, 17 F,...
Connecting portion 19a.

19 b, 25 a, 25 b, radial flexure beam displacement mechanism M
3a and 23b, and the fine movement table 26 is translated by the same amount in the X-axis direction.

Furthermore, when an equal voltage is applied to the piezoelectric actuators of the radial flexure beams 16 Mz- and 16Mzb, the radial flexure beams 44a+, 44az, 44b+, and 44bz move in the third direction around the two axes in FIG. 1 according to the applied voltage. It deforms and rotates as shown in Figure (b).

This rotational displacement is caused by the central rigid body portion 15. Parallel deflection beam displacement mechanism 17F□, 17 F, b, 17 F,,, 17
F...

It is transmitted to the fine movement table 26 through the connecting parts 19a, 19b, 25a, 25b, the radial flexure beam displacement mechanisms 22MX, 22M, . Rotational displacement around the axis.

Similarly, parallel deflection beam displacement mechanism 17F, , 17Fyb
When the same voltage is applied to the piezoelectric actuators of , the fine movement table 26 is translated in the y-axis direction, and when the same voltage is applied to the piezoelectric actuators of the parallel deflection beam displacement mechanism 17F, 17Fzb, the fine movement table 26
is translated in the X-axis direction.

On the other hand, when the same voltage is applied to the piezoelectric actuators of the radial deflection beams 22M, . In this case, the support plate 15 has connecting portions 25 a, 2
5 b, radial deflection beam displacement mechanism 22MX,, 22M, b
Since it is in a fixed state via , the radial deflection beam displacement mechanism 2
2M, , 22M, b generate a rotational displacement around an axis in the y-axis direction, and thereby the fine movement table 26 is rotationally displaced around the axis.

In addition, radial deflection beam displacement mechanism 22 M, 22 M
, b, when the same voltage is applied to the piezoelectric actuators, the radial deflection beams are deformed in accordance with this voltage and generate rotational displacement around the X-axis direction. This rotational displacement is caused by the support plate 2
1. Radiation deflection beam displacement machine horizontal 22M... 22 My
b to the fine movement table 26, and the fine movement table 26 is rotationally displaced around the axis.

The above explanation is about translational displacement and rotational displacement about one axis, but any plurality of the above-mentioned parallel flexure beam displacement mechanisms and radial flexure beam displacement mechanisms can be selected and an arbitrary voltage applied. By doing so, the fine movement table 26 can be arbitrarily displaced.

As described above, in this embodiment, a parallel flexure beam displacement mechanism for translational displacement in the X-axis direction and a radial flexure beam displacement mechanism for rotational displacement around an axis in the X-axis direction are provided on one of the overhangs,
A parallel flexible beam displacement mechanism that translates in the y-axis direction and a parallel flexible beam displacement mechanism that translates in the x-axis direction are installed on the other overhang, and the end of one overhang is fixed, and the The rigid body part of the radial deflection beam displacement mechanism that rotates around the axis in the X-axis direction provided on the support plate is connected to the end, and the rigid body part rotates around the axis in the y-axis direction also provided on the support plate. Since the fine movement table is fixed to the rigid part of the displacing radial beam displacement mechanism, three-axis translational displacement and three-axis rotational displacement can be obtained with an extremely simple and compact configuration.

Furthermore, since the respective rotational axes are orthogonal to each other at one point on the surface of the fine movement table, the center of rotation for rotational displacement is located on the fine movement table, and accurate rotational displacement can be performed.

In the above embodiment, an example was explained in which the end of the overhang in the y-axis direction was fixed and a connecting part was provided at the end of the overhang in the X-axis direction. It is clear that the ends of the axial extensions may be fixed and the legs of the y-axis extensions provided with connections. Although an example has been described in which two radial deflection beam displacement mechanisms for each axis on the support plate are provided symmetrically, the present invention is not limited to this, and one may be provided in the center. In this case, if the single radial deflection beam displacement mechanism provided at the center is not connected to the connecting portion, the rigid body portion serves as the fine movement table. Further, each rotation axis does not necessarily have to be present on the surface of the fine movement table, and can be arbitrarily selected.

〔Effect of the invention〕

As described above, in the present invention, two parallel deflection beam displacement machines with different translation directions are configured on an overhang in one direction,
A parallel flexure beam displacement mechanism and a radial flexure beam displacement mechanism in a translational direction different from the translation direction of the two parallel flexure beam displacement mechanisms are configured on an overhang in the other direction, and a radial flexure beam displacement mechanism is provided on the support plate at the end of one overhang. The rigid body parts of the radial flexure beam displacement mechanisms were connected, and another radial flexure beam displacement mechanism was provided on the support plate, so that the axial directions of the rotation axes of the three radial flexure beam displacement mechanisms were orthogonal to each other. Therefore, three-axis translational displacement and three-axis rotational displacement can be obtained with an extremely simple and compact configuration.

[Brief explanation of drawings]

Figure 1 is an exploded perspective view of a fine positioning device according to an embodiment of the present invention, Figures 2 (a) and (b) are side views of the radial deflection beam displacement mechanism shown in Figure 1, and Figure 3 (a). . (b) is a side view of the radial deflection beam displacement mechanism shown in Fig. 1;
4, 5, and 6 are a side view and a perspective view of a conventional fine positioning device, and FIG. 7 is a perspective view of a bimorph type piezoelectric element used in the device shown in FIG. 6. 15... Central rigid body part, 16a, 16b, 17a
. 17b... Overhang, 16F... 16
Fxb+ 16F□, 16Fyb, 17F-
, 17F-b...Parallel flexible beam displacement mechanism, 16
Mza, 16 Mzb, 22 M,. 22 Mxb, 22 My-, 22 Myb...
...radial deflection beam displacement mechanism, 19a, 19b, 25a,
25b---Series connection part, 21---Support plate, 2
6...Fine movement table. Figure 1 Figure 2 (a) (b) Figure 3 Figure 6/2c3 Figure 7

Claims (7)

[Claims] (1) a central rigid body part, a first set of overhanging parts symmetrically protruding from the central rigid body part in a first axis direction, and a second axis extending from the central rigid body part and perpendicular to the first axis; a second set of overhangs protruding symmetrically in the direction; and a third axis perpendicular to the first axis and the second axis, each symmetrically provided on the first set of overhangs. A set of a radial flexure beam displacement mechanism that generates a rotational displacement around the radial flexure beam displacement mechanism and a parallel flexure beam displacement mechanism that generates a translational displacement in the second axial direction, and a radial flexure beam displacement mechanism that is symmetrically provided on the overhang of the second set, respectively. A set of parallel flexible beam displacement mechanisms that generate the first translational displacement in the axial direction, a set of parallel flexible beam displacement mechanisms that generate the third translational displacement in the axial direction, a rigid support plate, and the support plate. a radial flexure beam displacement mechanism that is provided on the top and generates a rotational displacement around the first axis; a radial flexure beam displacement mechanism that generates a rotational displacement around the second axis; and one radial flexure on the support plate. A fine positioning device comprising: a connecting portion that connects the rigid body portion of the beam displacement mechanism and the end portion of one of the sets of overhang portions. (2) In claim (1), each of the parallel flexible beam displacement mechanisms includes a plurality of mutually parallel flexible beams that undergo bending deformation due to forces in respective displacement generating directions, and A fine positioning device characterized by comprising: an actuator that acts. (3) In claim (1), each of the radial deflection beam displacement mechanisms causes bending deformation due to a moment around the respective rotational displacement generating axis, and radially displaces each other with respect to a predetermined point on the axis. A fine positioning device comprising a plurality of extending flexible beams and an actuator that applies the moment to the flexible beams. (4) A fine positioning device according to claim (2) or (3), wherein the actuator is a piezoelectric actuator. (5) In claim (1), the central rigid body part, the radial flexure beam displacement mechanism that generates rotational displacement around the third axis, and each of the parallel flexure beam displacement mechanisms are one rigid block. A fine positioning device characterized by being processed and formed from. (6) In claim (1), the first set of overhanging parts and the second set of overhanging parts are such that each end of one set of overhanging parts is fixed, and the other set of overhanging parts is fixed. A fine positioning device characterized in that each end of the set of overhanging portions constitutes the connecting portion. (7) In claim (1), each of the rigid body portions of each of the radial deflection beam displacement mechanisms provided on the support plate and facing the support plate, one of which constitutes the connection portion. A fine positioning device characterized in that a fine movement table is provided on the other side.