JPH0554619B2 - - Google Patents

Info

Publication number
JPH0554619B2
JPH0554619B2 JP59065211A JP6521184A JPH0554619B2 JP H0554619 B2 JPH0554619 B2 JP H0554619B2 JP 59065211 A JP59065211 A JP 59065211A JP 6521184 A JP6521184 A JP 6521184A JP H0554619 B2 JPH0554619 B2 JP H0554619B2
Authority
JP
Japan
Prior art keywords
pressure
pressure sensor
sensitive
terminals
required number
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59065211A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60209131A (ja
Inventor
Shinobu Sagisawa
Mitsuo Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP59065211A priority Critical patent/JPS60209131A/ja
Publication of JPS60209131A publication Critical patent/JPS60209131A/ja
Publication of JPH0554619B2 publication Critical patent/JPH0554619B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
JP59065211A 1984-04-03 1984-04-03 ユニツト型圧覚センサアレイ Granted JPS60209131A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59065211A JPS60209131A (ja) 1984-04-03 1984-04-03 ユニツト型圧覚センサアレイ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59065211A JPS60209131A (ja) 1984-04-03 1984-04-03 ユニツト型圧覚センサアレイ

Publications (2)

Publication Number Publication Date
JPS60209131A JPS60209131A (ja) 1985-10-21
JPH0554619B2 true JPH0554619B2 (en:Method) 1993-08-13

Family

ID=13280349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59065211A Granted JPS60209131A (ja) 1984-04-03 1984-04-03 ユニツト型圧覚センサアレイ

Country Status (1)

Country Link
JP (1) JPS60209131A (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0663893B2 (ja) * 1987-03-06 1994-08-22 工業技術院長 接触覚センサ
KR102721676B1 (ko) 2020-07-27 2024-10-23 주식회사 엘지에너지솔루션 압력 측정 유닛 및 배터리 검사 장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5688135U (en:Method) * 1979-12-11 1981-07-14

Also Published As

Publication number Publication date
JPS60209131A (ja) 1985-10-21

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