JPS60209131A - ユニツト型圧覚センサアレイ - Google Patents

ユニツト型圧覚センサアレイ

Info

Publication number
JPS60209131A
JPS60209131A JP59065211A JP6521184A JPS60209131A JP S60209131 A JPS60209131 A JP S60209131A JP 59065211 A JP59065211 A JP 59065211A JP 6521184 A JP6521184 A JP 6521184A JP S60209131 A JPS60209131 A JP S60209131A
Authority
JP
Japan
Prior art keywords
pressure
sensitive
sensor array
pressure sensor
plural
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59065211A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0554619B2 (en:Method
Inventor
Shinobu Sagisawa
鷺沢　忍
Mitsuo Kobayashi
光男 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP59065211A priority Critical patent/JPS60209131A/ja
Publication of JPS60209131A publication Critical patent/JPS60209131A/ja
Publication of JPH0554619B2 publication Critical patent/JPH0554619B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
JP59065211A 1984-04-03 1984-04-03 ユニツト型圧覚センサアレイ Granted JPS60209131A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59065211A JPS60209131A (ja) 1984-04-03 1984-04-03 ユニツト型圧覚センサアレイ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59065211A JPS60209131A (ja) 1984-04-03 1984-04-03 ユニツト型圧覚センサアレイ

Publications (2)

Publication Number Publication Date
JPS60209131A true JPS60209131A (ja) 1985-10-21
JPH0554619B2 JPH0554619B2 (en:Method) 1993-08-13

Family

ID=13280349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59065211A Granted JPS60209131A (ja) 1984-04-03 1984-04-03 ユニツト型圧覚センサアレイ

Country Status (1)

Country Link
JP (1) JPS60209131A (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63217241A (ja) * 1987-03-06 1988-09-09 Agency Of Ind Science & Technol 接触覚センサ
KR20220013847A (ko) * 2020-07-27 2022-02-04 주식회사 엘지에너지솔루션 압력 측정 유닛 및 배터리 검사 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5688135U (en:Method) * 1979-12-11 1981-07-14

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5688135U (en:Method) * 1979-12-11 1981-07-14

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63217241A (ja) * 1987-03-06 1988-09-09 Agency Of Ind Science & Technol 接触覚センサ
KR20220013847A (ko) * 2020-07-27 2022-02-04 주식회사 엘지에너지솔루션 압력 측정 유닛 및 배터리 검사 장치
CN115088114A (zh) * 2020-07-27 2022-09-20 株式会社Lg新能源 压力测量单元和电池检查装置
JP2023509545A (ja) * 2020-07-27 2023-03-08 エルジー エナジー ソリューション リミテッド 圧力測定ユニット及びバッテリー検査装置
EP4092802A4 (en) * 2020-07-27 2024-08-21 LG Energy Solution, Ltd. PRESSURE MEASURING UNIT AND BATTERY INSPECTION DEVICE
US12379269B2 (en) 2020-07-27 2025-08-05 Lg Energy Solution, Ltd. Pressure measuring unit and battery inspection device
CN115088114B (zh) * 2020-07-27 2025-09-26 株式会社Lg新能源 压力测量单元、电池检查装置及包括压力测量单元的电池制造设备

Also Published As

Publication number Publication date
JPH0554619B2 (en:Method) 1993-08-13

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