JPH0554254B2 - - Google Patents

Info

Publication number
JPH0554254B2
JPH0554254B2 JP58233118A JP23311883A JPH0554254B2 JP H0554254 B2 JPH0554254 B2 JP H0554254B2 JP 58233118 A JP58233118 A JP 58233118A JP 23311883 A JP23311883 A JP 23311883A JP H0554254 B2 JPH0554254 B2 JP H0554254B2
Authority
JP
Japan
Prior art keywords
molybdenum
single crystal
silicon
growth
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP58233118A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60124817A (ja
Inventor
Takaaki Kimura
Hideki Yamawaki
Shigeo Kodama
Yoshihiro Arimoto
Masaru Ihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP58233118A priority Critical patent/JPS60124817A/ja
Publication of JPS60124817A publication Critical patent/JPS60124817A/ja
Publication of JPH0554254B2 publication Critical patent/JPH0554254B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/24—
    • H10P14/3411—
JP58233118A 1983-12-09 1983-12-09 気相エピタキシャル成長方法 Granted JPS60124817A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58233118A JPS60124817A (ja) 1983-12-09 1983-12-09 気相エピタキシャル成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58233118A JPS60124817A (ja) 1983-12-09 1983-12-09 気相エピタキシャル成長方法

Publications (2)

Publication Number Publication Date
JPS60124817A JPS60124817A (ja) 1985-07-03
JPH0554254B2 true JPH0554254B2 (cg-RX-API-DMAC10.html) 1993-08-12

Family

ID=16950043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58233118A Granted JPS60124817A (ja) 1983-12-09 1983-12-09 気相エピタキシャル成長方法

Country Status (1)

Country Link
JP (1) JPS60124817A (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009182354A (ja) * 2009-05-19 2009-08-13 Takashi Katoda 基板上に作製された半導体光デバイスおよびその作製方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57145317A (en) * 1981-03-04 1982-09-08 Toshiba Corp Manufacture of semiconductor device
JPS57178315A (en) * 1981-04-27 1982-11-02 Nippon Telegr & Teleph Corp <Ntt> Manufacture of semiconductor single crystal

Also Published As

Publication number Publication date
JPS60124817A (ja) 1985-07-03

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees