JPH05503586A - 顕微鏡検査法及び近領域反射顕微鏡 - Google Patents

顕微鏡検査法及び近領域反射顕微鏡

Info

Publication number
JPH05503586A
JPH05503586A JP2512873A JP51287390A JPH05503586A JP H05503586 A JPH05503586 A JP H05503586A JP 2512873 A JP2512873 A JP 2512873A JP 51287390 A JP51287390 A JP 51287390A JP H05503586 A JPH05503586 A JP H05503586A
Authority
JP
Japan
Prior art keywords
waveguide
fiber
wave
optical fiber
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2512873A
Other languages
English (en)
Japanese (ja)
Inventor
ド・フォーネル、フレデリック
グドネ、ジャン―ピエール
セレ、ナタリ
Original Assignee
スピラル・ルシェルシュ・エ・デベロプメント
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9384942&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPH05503586(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by スピラル・ルシェルシュ・エ・デベロプメント filed Critical スピラル・ルシェルシュ・エ・デベロプメント
Publication of JPH05503586A publication Critical patent/JPH05503586A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Glass Compositions (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Waveguide Aerials (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Pyrane Compounds (AREA)
  • Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
  • Pyrrole Compounds (AREA)
JP2512873A 1989-08-28 1990-08-27 顕微鏡検査法及び近領域反射顕微鏡 Pending JPH05503586A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR89/11297 1989-08-28
FR8911297A FR2651332B1 (fr) 1989-08-28 1989-08-28 Microscope en champ proche en reflexion utilisant un guide d'ondes comme sonde de ce champ.

Publications (1)

Publication Number Publication Date
JPH05503586A true JPH05503586A (ja) 1993-06-10

Family

ID=9384942

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2512873A Pending JPH05503586A (ja) 1989-08-28 1990-08-27 顕微鏡検査法及び近領域反射顕微鏡

Country Status (18)

Country Link
US (1) US5340981A (fr)
EP (1) EP0415838B1 (fr)
JP (1) JPH05503586A (fr)
KR (1) KR920704173A (fr)
CN (1) CN1050266A (fr)
AT (1) ATE119296T1 (fr)
AU (1) AU6400390A (fr)
BR (1) BR9007631A (fr)
CA (1) CA2065263A1 (fr)
DD (1) DD297521A5 (fr)
DE (1) DE69017317T2 (fr)
ES (1) ES2075178T3 (fr)
FI (1) FI920905A0 (fr)
FR (1) FR2651332B1 (fr)
IL (1) IL95487A0 (fr)
OA (1) OA09600A (fr)
WO (1) WO1991003757A1 (fr)
ZA (1) ZA906786B (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69121201D1 (de) * 1991-08-27 1996-09-05 Ibm Verfahren und Gerät zur Erzeugung hochauflösender optischer Bilder
FR2685127B1 (fr) * 1991-12-13 1994-02-04 Christian Licoppe Photonanographe a gaz pour la fabrication et l'analyse optique de motifs a l'echelle nanometrique.
US5410151A (en) * 1993-07-15 1995-04-25 Sumitomo Electric Lightwave Corp. Fiber optic probe and method of making same
AU5934296A (en) * 1995-05-26 1996-12-11 General Scanning, Inc. Wide field of view microscope and scanning system useful in the microscope
US5646731A (en) * 1995-08-04 1997-07-08 International Business Machines Corporation Interferometric detecting/imaging method based on multi-pole sensing
US5623338A (en) * 1995-08-04 1997-04-22 International Business Machines Corporation Interferometric near-field apparatus based on multi-pole sensing
US5623339A (en) * 1995-08-04 1997-04-22 International Business Machines Corporation Interferometric measuring method based on multi-pole sensing
US5874726A (en) * 1995-10-10 1999-02-23 Iowa State University Research Foundation Probe-type near-field confocal having feedback for adjusting probe distance
DE19741122C2 (de) * 1997-09-12 2003-09-25 Forschungsverbund Berlin Ev Anordnung zur Vermessung und Strukturierung (Nahfeldanordnung)
KR100797562B1 (ko) * 2006-08-24 2008-01-24 조성구 반사식 초소형 현미경 모듈
CN100590437C (zh) * 2007-04-16 2010-02-17 中国科学院物理研究所 结合磁镊观测生物大分子的全反射近场显微镜
KR101198910B1 (ko) 2009-05-27 2012-11-08 광주과학기술원 레이저 간섭계 및 광신호 정렬 장치를 결합한 레이저 간섭계
CN109374928B (zh) * 2018-09-12 2020-10-27 东南大学 一种基于等离聚焦的近场扫描探针
FR3097980B1 (fr) * 2019-06-28 2022-08-19 Laurent Galinier Lentille multifocale à aberration de coma

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0112401B1 (fr) * 1982-12-27 1987-04-22 International Business Machines Corporation Microscope de balayage optique de champ proche
DE3276917D1 (en) * 1982-12-27 1987-09-10 Ibm Light waveguide with a submicron aperture, method for manufacturing the waveguide and application of the waveguide in an optical memory
DE3477271D1 (en) * 1984-12-28 1989-04-20 Ibm Waveguide for an optical near-field microscope
EP0283256A3 (fr) * 1987-03-18 1990-02-07 Tektronix Inc. Microscope à balayage optique
US4917462A (en) * 1988-06-15 1990-04-17 Cornell Research Foundation, Inc. Near field scanning optical microscopy
US5105305A (en) * 1991-01-10 1992-04-14 At&T Bell Laboratories Near-field scanning optical microscope using a fluorescent probe

Also Published As

Publication number Publication date
DE69017317D1 (de) 1995-04-06
FR2651332B1 (fr) 1994-05-06
IL95487A0 (en) 1991-06-30
ATE119296T1 (de) 1995-03-15
US5340981A (en) 1994-08-23
ES2075178T3 (es) 1995-10-01
DE69017317T2 (de) 1995-11-09
ZA906786B (en) 1991-06-26
DD297521A5 (de) 1992-01-09
CN1050266A (zh) 1991-03-27
OA09600A (fr) 1993-04-30
EP0415838A1 (fr) 1991-03-06
BR9007631A (pt) 1992-07-07
AU6400390A (en) 1991-04-08
KR920704173A (ko) 1992-12-19
FI920905A0 (fi) 1992-02-28
EP0415838B1 (fr) 1995-03-01
CA2065263A1 (fr) 1991-03-01
FR2651332A1 (fr) 1991-03-01
WO1991003757A1 (fr) 1991-03-21

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