JPH0548948B2 - - Google Patents
Info
- Publication number
- JPH0548948B2 JPH0548948B2 JP62281962A JP28196287A JPH0548948B2 JP H0548948 B2 JPH0548948 B2 JP H0548948B2 JP 62281962 A JP62281962 A JP 62281962A JP 28196287 A JP28196287 A JP 28196287A JP H0548948 B2 JPH0548948 B2 JP H0548948B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer chuck
- gas
- float
- chuck portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005484 gravity Effects 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000013585 weight reducing agent Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62281962A JPH01124232A (ja) | 1987-11-10 | 1987-11-10 | レベリング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62281962A JPH01124232A (ja) | 1987-11-10 | 1987-11-10 | レベリング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01124232A JPH01124232A (ja) | 1989-05-17 |
| JPH0548948B2 true JPH0548948B2 (enrdf_load_stackoverflow) | 1993-07-22 |
Family
ID=17646326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62281962A Granted JPH01124232A (ja) | 1987-11-10 | 1987-11-10 | レベリング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01124232A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4856941B2 (ja) * | 2005-12-09 | 2012-01-18 | 東芝機械株式会社 | ジンバル機構を備えた転写装置及び同装置を用いる転写方法 |
| JP4857050B2 (ja) * | 2006-08-23 | 2012-01-18 | 東芝機械株式会社 | ジンバル機構を備えた転写装置 |
| JP2009050959A (ja) * | 2007-08-27 | 2009-03-12 | Disco Abrasive Syst Ltd | 板状物搬送装置 |
| JP4877315B2 (ja) * | 2008-12-03 | 2012-02-15 | 横河電機株式会社 | ステージの昇降装置 |
| CN107378668B (zh) * | 2017-06-21 | 2019-07-02 | 浙江大学宁波理工学院 | 一种数控磨床 |
-
1987
- 1987-11-10 JP JP62281962A patent/JPH01124232A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01124232A (ja) | 1989-05-17 |
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