JPH0548921B2 - - Google Patents

Info

Publication number
JPH0548921B2
JPH0548921B2 JP62117591A JP11759187A JPH0548921B2 JP H0548921 B2 JPH0548921 B2 JP H0548921B2 JP 62117591 A JP62117591 A JP 62117591A JP 11759187 A JP11759187 A JP 11759187A JP H0548921 B2 JPH0548921 B2 JP H0548921B2
Authority
JP
Japan
Prior art keywords
moisture
sic
mol
compounds
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62117591A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63283002A (ja
Inventor
Masanori Mishima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHINEI TSUSHIN KOGYO KK
Original Assignee
SHINEI TSUSHIN KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHINEI TSUSHIN KOGYO KK filed Critical SHINEI TSUSHIN KOGYO KK
Priority to JP62117591A priority Critical patent/JPS63283002A/ja
Publication of JPS63283002A publication Critical patent/JPS63283002A/ja
Publication of JPH0548921B2 publication Critical patent/JPH0548921B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)
JP62117591A 1987-05-14 1987-05-14 ＳｉＣ感湿素材およびＳｉＣ感湿センサー Granted JPS63283002A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62117591A JPS63283002A (ja) 1987-05-14 1987-05-14 ＳｉＣ感湿素材およびＳｉＣ感湿センサー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62117591A JPS63283002A (ja) 1987-05-14 1987-05-14 ＳｉＣ感湿素材およびＳｉＣ感湿センサー

Publications (2)

Publication Number Publication Date
JPS63283002A JPS63283002A (ja) 1988-11-18
JPH0548921B2 true JPH0548921B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-22

Family

ID=14715609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62117591A Granted JPS63283002A (ja) 1987-05-14 1987-05-14 ＳｉＣ感湿素材およびＳｉＣ感湿センサー

Country Status (1)

Country Link
JP (1) JPS63283002A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4497477T1 (de) * 1993-10-05 1995-10-19 Mitsubishi Materials Corp Gassensor und Gasunterscheidungsverfahren

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60220902A (ja) * 1984-04-17 1985-11-05 エヌオーケー株式会社 感温素子

Also Published As

Publication number Publication date
JPS63283002A (ja) 1988-11-18

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