DE4497477T1 - Gassensor und Gasunterscheidungsverfahren - Google Patents

Gassensor und Gasunterscheidungsverfahren

Info

Publication number
DE4497477T1
DE4497477T1 DE4497477T DE4497477T DE4497477T1 DE 4497477 T1 DE4497477 T1 DE 4497477T1 DE 4497477 T DE4497477 T DE 4497477T DE 4497477 T DE4497477 T DE 4497477T DE 4497477 T1 DE4497477 T1 DE 4497477T1
Authority
DE
Germany
Prior art keywords
gas
discrimination method
sensor
gas sensor
gas discrimination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE4497477T
Other languages
English (en)
Inventor
Hiroaki Yanagida
Masaru Miyayama
Kazuyasu Hikita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP24952693A external-priority patent/JPH07103924A/ja
Priority claimed from JP6028125A external-priority patent/JPH07239314A/ja
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Publication of DE4497477T1 publication Critical patent/DE4497477T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/129—Diode type sensors, e.g. gas sensitive Schottky diodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE4497477T 1993-10-05 1994-10-03 Gassensor und Gasunterscheidungsverfahren Withdrawn DE4497477T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP24952693A JPH07103924A (ja) 1993-10-05 1993-10-05 ガスセンサ及びガス識別方法
JP6028125A JPH07239314A (ja) 1994-02-25 1994-02-25 ガスセンサ及びガス識別方法
PCT/JP1994/001650 WO1995010039A1 (fr) 1993-10-05 1994-10-03 Detecteur de gaz et procede permettant de faire la distinction entre plusieurs gas

Publications (1)

Publication Number Publication Date
DE4497477T1 true DE4497477T1 (de) 1995-10-19

Family

ID=26366163

Family Applications (1)

Application Number Title Priority Date Filing Date
DE4497477T Withdrawn DE4497477T1 (de) 1993-10-05 1994-10-03 Gassensor und Gasunterscheidungsverfahren

Country Status (3)

Country Link
US (1) US5602324A (de)
DE (1) DE4497477T1 (de)
WO (1) WO1995010039A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7274082B2 (en) 2000-01-19 2007-09-25 Adrena, Inc. Chemical sensor using chemically induced electron-hole production at a schottky barrier
US7282778B2 (en) 2000-01-19 2007-10-16 Adrena, Inc. Chemical sensor using chemically induced electron-hole production at a Schottky barrier

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4432729C1 (de) * 1994-09-14 1996-04-11 Siemens Ag Gassensor
FR2745637B1 (fr) * 1996-03-04 1998-05-22 Motorola Semiconducteurs Dispositif capteur chimique a semiconducteur et procede de formation d'un thermocouple pour ce dispositif
JP2003520351A (ja) * 2000-01-19 2003-07-02 ザ・リージェンツ・オブ・ザ・ユニバーシティー・オブ・カリフォルニア ショットキー・バリヤで化学的に誘起された電子孔を用いる化学センサー
DE102005047949A1 (de) * 2005-10-06 2007-04-12 Eberhard-Karls-Universität Tübingen CO2-Sensor
US7900501B2 (en) * 2005-12-20 2011-03-08 Atmospheric Sensors Ltd. Air quality monitor
TWI395938B (zh) * 2008-12-22 2013-05-11 Taiwan Textile Res Inst 氣體混合裝置
US8972204B2 (en) * 2010-11-01 2015-03-03 Atmospheric Sensors Ltd. Gas discriminating semiconductor sensors
CN106908497B (zh) * 2017-01-19 2018-11-30 华南师范大学 一种以钼酸铜/钛酸钡p-n异质结为光电活性物质的光电化学传感器及其构建方法和应用
US11408874B2 (en) 2017-06-13 2022-08-09 General Electric Technology Gmbh Sensing system and method
CN109307688B (zh) * 2017-07-27 2021-06-01 通用电气公司 感测系统和方法
JP6416435B1 (ja) * 2018-08-22 2018-10-31 株式会社荏原製作所 基板のめっきに使用される酸化銅固形物、該酸化銅固形物を製造する方法、およびめっき液をめっき槽まで供給するための装置
CN111505062B (zh) * 2020-04-27 2022-03-25 电子科技大学 一种基于有机-无机异质结的光伏自驱动柔性气体传感器及其制备方法
US20240011934A1 (en) * 2022-07-07 2024-01-11 General Electric Company Systems and methods for gas sensing with electrochemical gas sensors

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2975362A (en) * 1957-05-06 1961-03-14 Mine Safety Appliances Co Semiconductor diodes for gas detection
JPS5246498A (en) * 1975-10-09 1977-04-13 Matsushita Electric Ind Co Ltd Moisture sensitive resistance element
US4103227A (en) * 1977-03-25 1978-07-25 University Of Pennsylvania Ion-controlled diode
JPH0711497B2 (ja) * 1985-06-29 1995-02-08 博明 柳田 ガス検出方法およびガスセンサ
JPS63283002A (ja) * 1987-05-14 1988-11-18 Shinei Tsushin Kogyo Kk ＳｉＣ感湿素材およびＳｉＣ感湿センサー
JPH03223660A (ja) * 1990-01-29 1991-10-02 Osaka Gas Co Ltd ガスセンサ用金属酸化物系半導体素子
JP3081244B2 (ja) * 1992-01-10 2000-08-28 株式会社ミクニ ガスセンサおよびその製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7274082B2 (en) 2000-01-19 2007-09-25 Adrena, Inc. Chemical sensor using chemically induced electron-hole production at a schottky barrier
US7282778B2 (en) 2000-01-19 2007-10-16 Adrena, Inc. Chemical sensor using chemically induced electron-hole production at a Schottky barrier
US7385271B2 (en) 2000-01-19 2008-06-10 Adrena, Inc. Chemical sensor using chemically induced electron-hole production at a schottky barrier
US7391056B2 (en) 2000-01-19 2008-06-24 Adrena, Inc. Chemical sensor using chemically induced electron-hole production at a Schottky barrier

Also Published As

Publication number Publication date
WO1995010039A1 (fr) 1995-04-13
US5602324A (en) 1997-02-11

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee