JPH0548244Y2 - - Google Patents

Info

Publication number

JPH0548244Y2

JPH0548244Y2 JP11929686U JP11929686U JPH0548244Y2 JP H0548244 Y2 JPH0548244 Y2 JP H0548244Y2 JP 11929686 U JP11929686 U JP 11929686U JP 11929686 U JP11929686 U JP 11929686U JP H0548244 Y2 JPH0548244 Y2 JP H0548244Y2

Authority

JP

Japan

Prior art keywords

magnetic

core

ferromagnetic metal

metal thin

magnetic core

Prior art date

1986-08-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired - Lifetime

Links

• Espacenet
• Global Dossier
• Discuss

• 230000005291 magnetic effect Effects 0.000 claims description 119
• 230000005294 ferromagnetic effect Effects 0.000 claims description 61
• 239000010409 thin film Substances 0.000 claims description 49
• 229910052751 metal Inorganic materials 0.000 claims description 44
• 239000002184 metal Substances 0.000 claims description 44
• 230000001105 regulatory effect Effects 0.000 claims description 24
• 239000000463 material Substances 0.000 claims description 13
• 230000035699 permeability Effects 0.000 claims description 9
• 239000011162 core material Substances 0.000 description 74
• 238000000034 method Methods 0.000 description 19
• 239000000696 magnetic material Substances 0.000 description 10
• 230000008569 process Effects 0.000 description 10
• 239000000758 substrate Substances 0.000 description 8
• 229910045601 alloy Inorganic materials 0.000 description 7
• 239000000956 alloy Substances 0.000 description 7
• 239000010408 film Substances 0.000 description 7
• 238000004804 winding Methods 0.000 description 6
• 229910000859 α-Fe Inorganic materials 0.000 description 6
• 239000002131 composite material Substances 0.000 description 5
• 238000004519 manufacturing process Methods 0.000 description 5
• 230000000694 effects Effects 0.000 description 4
• 230000004907 flux Effects 0.000 description 4
• 239000007769 metal material Substances 0.000 description 4
• 229910021364 Al-Si alloy Inorganic materials 0.000 description 3
• 229910004298 SiO 2 Inorganic materials 0.000 description 3
• 238000001704 evaporation Methods 0.000 description 3
• 230000008020 evaporation Effects 0.000 description 3
• 239000011521 glass Substances 0.000 description 3
• 125000006850 spacer group Chemical group 0.000 description 3
• 239000000853 adhesive Substances 0.000 description 2
• 230000001070 adhesive effect Effects 0.000 description 2
• 229910052782 aluminium Inorganic materials 0.000 description 2
• 229910000808 amorphous metal alloy Inorganic materials 0.000 description 2
• 230000008878 coupling Effects 0.000 description 2
• 238000010168 coupling process Methods 0.000 description 2
• 238000005859 coupling reaction Methods 0.000 description 2
• 238000000151 deposition Methods 0.000 description 2
• 238000005516 engineering process Methods 0.000 description 2
• 229910052735 hafnium Inorganic materials 0.000 description 2
• 229910052742 iron Inorganic materials 0.000 description 2
• 229910052759 nickel Inorganic materials 0.000 description 2
• 230000003014 reinforcing effect Effects 0.000 description 2
• 229910052719 titanium Inorganic materials 0.000 description 2
• 229910052726 zirconium Inorganic materials 0.000 description 2
• 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
• 229910000838 Al alloy Inorganic materials 0.000 description 1
• 229910017082 Fe-Si Inorganic materials 0.000 description 1
• 229910017133 Fe—Si Inorganic materials 0.000 description 1
• 229910018605 Ni—Zn Inorganic materials 0.000 description 1
• 229910018598 Si-Co Inorganic materials 0.000 description 1
• 229910008453 Si—Co Inorganic materials 0.000 description 1
• -1 Ta 2 O 5 Inorganic materials 0.000 description 1
• 238000005452 bending Methods 0.000 description 1
• 229910052790 beryllium Inorganic materials 0.000 description 1
• 229910052796 boron Inorganic materials 0.000 description 1
• 229910052804 chromium Inorganic materials 0.000 description 1
• 238000005520 cutting process Methods 0.000 description 1
• 230000004927 fusion Effects 0.000 description 1
• 229910052732 germanium Inorganic materials 0.000 description 1
• 229910052738 indium Inorganic materials 0.000 description 1
• 238000007733 ion plating Methods 0.000 description 1
• 238000010884 ion-beam technique Methods 0.000 description 1
• 238000005304 joining Methods 0.000 description 1
• 239000010410 layer Substances 0.000 description 1
• 239000006247 magnetic powder Substances 0.000 description 1
• 229910052748 manganese Inorganic materials 0.000 description 1
• 229910052752 metalloid Inorganic materials 0.000 description 1
• 229910052750 molybdenum Inorganic materials 0.000 description 1
• 229910052758 niobium Inorganic materials 0.000 description 1
• 229910000889 permalloy Inorganic materials 0.000 description 1
• 239000000843 powder Substances 0.000 description 1
• 230000002250 progressing effect Effects 0.000 description 1
• 229910052761 rare earth metal Inorganic materials 0.000 description 1
• 239000012779 reinforcing material Substances 0.000 description 1
• 230000004044 response Effects 0.000 description 1
• 229910000702 sendust Inorganic materials 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000002356 single layer Substances 0.000 description 1
• 238000004544 sputter deposition Methods 0.000 description 1
• 229910052715 tantalum Inorganic materials 0.000 description 1
• 229910052718 tin Inorganic materials 0.000 description 1
• 230000007704 transition Effects 0.000 description 1
• 229910052721 tungsten Inorganic materials 0.000 description 1
• 238000007738 vacuum evaporation Methods 0.000 description 1
• 238000003466 welding Methods 0.000 description 1